8/22/2011	9:03:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	9:03:05 AM	Recipe started at 9:03 AM
8/22/2011	9:03:05 AM	Helium valve closed
8/22/2011	9:03:05 AM	H2 valve closed
8/22/2011	9:03:05 AM	BCl3 valve closed
8/22/2011	9:03:05 AM	PH3 valve closed
8/22/2011	9:03:05 AM	SiCl4 pre valve closed
8/22/2011	9:03:05 AM	SiCl4 post valve closed
8/22/2011	9:03:05 AM	Main Vac valve closed
8/22/2011	9:03:05 AM	Bubbler valve closed
8/22/2011	9:03:05 AM	Bypass valve opened
8/22/2011	9:03:05 AM	Helium MFC set to  0.000000
8/22/2011	9:03:05 AM	H2 MFC set to  0.000000
8/22/2011	9:03:05 AM	BCl3 MFC set to  0.000000
8/22/2011	9:03:05 AM	PHl3 MFC set to  0.000000
8/22/2011	9:03:05 AM	SiCl4 MFC set to  0.000000
8/22/2011	9:03:05 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:03:05 AM	Tube furnace set to 0
8/22/2011	9:03:59 AM	Helium valve closed
8/22/2011	9:03:59 AM	H2 valve closed
8/22/2011	9:03:59 AM	BCl3 valve closed
8/22/2011	9:03:59 AM	PH3 valve closed
8/22/2011	9:03:59 AM	SiCl4 pre valve closed
8/22/2011	9:03:59 AM	SiCl4 post valve closed
8/22/2011	9:03:59 AM	Main Vac valve closed
8/22/2011	9:03:59 AM	Bubbler valve closed
8/22/2011	9:03:59 AM	Bypass valve opened
8/22/2011	9:03:59 AM	Helium MFC set to  0.000000
8/22/2011	9:03:59 AM	H2 MFC set to  0.000000
8/22/2011	9:03:59 AM	BCl3 MFC set to  0.000000
8/22/2011	9:03:59 AM	PHl3 MFC set to  0.000000
8/22/2011	9:03:59 AM	SiCl4 MFC set to  0.000000
8/22/2011	9:03:59 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:03:59 AM	Tube furnace set to 0
8/22/2011	9:04:59 AM	Helium valve closed
8/22/2011	9:04:59 AM	H2 valve closed
8/22/2011	9:04:59 AM	BCl3 valve closed
8/22/2011	9:04:59 AM	PH3 valve closed
8/22/2011	9:04:59 AM	SiCl4 pre valve closed
8/22/2011	9:04:59 AM	SiCl4 post valve closed
8/22/2011	9:04:59 AM	Bypass valve closed
8/22/2011	9:04:59 AM	Bubbler valve closed
8/22/2011	9:04:59 AM	Main Vac valve opened
8/22/2011	9:04:59 AM	Helium MFC set to  0.000000
8/22/2011	9:04:59 AM	H2 MFC set to  0.000000
8/22/2011	9:04:59 AM	BCl3 MFC set to  0.000000
8/22/2011	9:04:59 AM	PHl3 MFC set to  0.000000
8/22/2011	9:04:59 AM	SiCl4 MFC set to  0.000000
8/22/2011	9:04:59 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:04:59 AM	Tube furnace set to 0
8/22/2011	9:05:00 AM	Run finished at 9:05 AM
8/22/2011	9:05:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	9:26:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2011	9:26:28 AM	Recipe started at 9:26 AM
8/22/2011	9:26:28 AM	Helium valve closed
8/22/2011	9:26:28 AM	H2 valve closed
8/22/2011	9:26:28 AM	BCl3 valve closed
8/22/2011	9:26:28 AM	PH3 valve closed
8/22/2011	9:26:28 AM	SiCl4 pre valve closed
8/22/2011	9:26:28 AM	SiCl4 post valve closed
8/22/2011	9:26:28 AM	Main Vac valve closed
8/22/2011	9:26:28 AM	Bypass valve closed
8/22/2011	9:26:28 AM	Bubbler valve closed
8/22/2011	9:26:28 AM	Helium MFC set to  0.000000
8/22/2011	9:26:28 AM	H2 MFC set to  0.000000
8/22/2011	9:26:28 AM	BCl3 MFC set to  0.000000
8/22/2011	9:26:28 AM	PHl3 MFC set to  0.000000
8/22/2011	9:26:28 AM	SiCl4 MFC set to  0.000000
8/22/2011	9:26:28 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:26:28 AM	Tube furnace set to 0
8/22/2011	9:26:31 AM	H2 valve closed
8/22/2011	9:26:31 AM	BCl3 valve closed
8/22/2011	9:26:31 AM	PH3 valve closed
8/22/2011	9:26:31 AM	SiCl4 pre valve closed
8/22/2011	9:26:31 AM	SiCl4 post valve closed
8/22/2011	9:26:31 AM	Main Vac valve closed
8/22/2011	9:26:31 AM	Bypass valve closed
8/22/2011	9:26:31 AM	Bubbler valve closed
8/22/2011	9:26:31 AM	Helium valve opened
8/22/2011	9:26:31 AM	Helium MFC set to  500.000000
8/22/2011	9:26:31 AM	H2 MFC set to  0.000000
8/22/2011	9:26:31 AM	BCl3 MFC set to  0.000000
8/22/2011	9:26:31 AM	PHl3 MFC set to  0.000000
8/22/2011	9:26:31 AM	SiCl4 MFC set to  0.000000
8/22/2011	9:26:31 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:26:31 AM	Tube furnace set to 0
8/22/2011	9:27:35 AM	Helium valve closed
8/22/2011	9:27:35 AM	H2 valve closed
8/22/2011	9:27:35 AM	BCl3 valve closed
8/22/2011	9:27:35 AM	PH3 valve closed
8/22/2011	9:27:35 AM	SiCl4 pre valve closed
8/22/2011	9:27:35 AM	SiCl4 post valve closed
8/22/2011	9:27:35 AM	Main Vac valve closed
8/22/2011	9:27:35 AM	Bypass valve closed
8/22/2011	9:27:35 AM	Bubbler valve closed
8/22/2011	9:27:35 AM	Helium MFC set to  0.000000
8/22/2011	9:27:35 AM	H2 MFC set to  0.000000
8/22/2011	9:27:35 AM	BCl3 MFC set to  0.000000
8/22/2011	9:27:35 AM	PHl3 MFC set to  0.000000
8/22/2011	9:27:35 AM	SiCl4 MFC set to  0.000000
8/22/2011	9:27:35 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:27:36 AM	Tube furnace set to 0
8/22/2011	9:27:37 AM	Run finished at 9:27 AM
8/22/2011	9:27:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2011	9:34:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	9:34:51 AM	Recipe started at 9:34 AM
8/22/2011	9:34:51 AM	Helium valve closed
8/22/2011	9:34:51 AM	H2 valve closed
8/22/2011	9:34:51 AM	BCl3 valve closed
8/22/2011	9:34:51 AM	PH3 valve closed
8/22/2011	9:34:51 AM	SiCl4 pre valve closed
8/22/2011	9:34:51 AM	SiCl4 post valve closed
8/22/2011	9:34:51 AM	Main Vac valve closed
8/22/2011	9:34:51 AM	Bubbler valve closed
8/22/2011	9:34:51 AM	Bypass valve opened
8/22/2011	9:34:51 AM	Helium MFC set to  0.000000
8/22/2011	9:34:51 AM	H2 MFC set to  0.000000
8/22/2011	9:34:51 AM	BCl3 MFC set to  0.000000
8/22/2011	9:34:51 AM	PHl3 MFC set to  0.000000
8/22/2011	9:34:51 AM	SiCl4 MFC set to  0.000000
8/22/2011	9:34:51 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:34:52 AM	Tube furnace set to 0
8/22/2011	9:36:02 AM	Helium valve closed
8/22/2011	9:36:02 AM	H2 valve closed
8/22/2011	9:36:02 AM	BCl3 valve closed
8/22/2011	9:36:02 AM	PH3 valve closed
8/22/2011	9:36:02 AM	SiCl4 pre valve closed
8/22/2011	9:36:02 AM	SiCl4 post valve closed
8/22/2011	9:36:02 AM	Main Vac valve closed
8/22/2011	9:36:02 AM	Bubbler valve closed
8/22/2011	9:36:02 AM	Bypass valve opened
8/22/2011	9:36:02 AM	Helium MFC set to  0.000000
8/22/2011	9:36:02 AM	H2 MFC set to  0.000000
8/22/2011	9:36:02 AM	BCl3 MFC set to  0.000000
8/22/2011	9:36:02 AM	PHl3 MFC set to  0.000000
8/22/2011	9:36:02 AM	SiCl4 MFC set to  0.000000
8/22/2011	9:36:02 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:36:02 AM	Tube furnace set to 0
8/22/2011	9:37:02 AM	Helium valve closed
8/22/2011	9:37:02 AM	H2 valve closed
8/22/2011	9:37:02 AM	BCl3 valve closed
8/22/2011	9:37:02 AM	PH3 valve closed
8/22/2011	9:37:02 AM	SiCl4 pre valve closed
8/22/2011	9:37:02 AM	SiCl4 post valve closed
8/22/2011	9:37:02 AM	Bypass valve closed
8/22/2011	9:37:02 AM	Bubbler valve closed
8/22/2011	9:37:02 AM	Main Vac valve opened
8/22/2011	9:37:02 AM	Helium MFC set to  0.000000
8/22/2011	9:37:02 AM	H2 MFC set to  0.000000
8/22/2011	9:37:02 AM	BCl3 MFC set to  0.000000
8/22/2011	9:37:02 AM	PHl3 MFC set to  0.000000
8/22/2011	9:37:02 AM	SiCl4 MFC set to  0.000000
8/22/2011	9:37:02 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:37:03 AM	Tube furnace set to 0
8/22/2011	9:37:04 AM	Run finished at 9:37 AM
8/22/2011	9:37:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	10:27:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2011	10:27:42 AM	Recipe started at 10:27 AM
8/22/2011	10:27:42 AM	Helium valve closed
8/22/2011	10:27:43 AM	H2 valve closed
8/22/2011	10:27:43 AM	BCl3 valve closed
8/22/2011	10:27:43 AM	PH3 valve closed
8/22/2011	10:27:43 AM	SiCl4 pre valve closed
8/22/2011	10:27:43 AM	SiCl4 post valve closed
8/22/2011	10:27:43 AM	Main Vac valve closed
8/22/2011	10:27:43 AM	Bypass valve closed
8/22/2011	10:27:43 AM	Bubbler valve closed
8/22/2011	10:27:43 AM	Helium MFC set to  0.000000
8/22/2011	10:27:43 AM	H2 MFC set to  0.000000
8/22/2011	10:27:43 AM	BCl3 MFC set to  0.000000
8/22/2011	10:27:43 AM	PHl3 MFC set to  0.000000
8/22/2011	10:27:43 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:27:43 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:27:43 AM	Tube furnace set to 0
8/22/2011	10:27:46 AM	H2 valve closed
8/22/2011	10:27:46 AM	BCl3 valve closed
8/22/2011	10:27:46 AM	PH3 valve closed
8/22/2011	10:27:46 AM	SiCl4 pre valve closed
8/22/2011	10:27:46 AM	SiCl4 post valve closed
8/22/2011	10:27:46 AM	Main Vac valve closed
8/22/2011	10:27:46 AM	Bypass valve closed
8/22/2011	10:27:46 AM	Bubbler valve closed
8/22/2011	10:27:46 AM	Helium valve opened
8/22/2011	10:27:46 AM	Helium MFC set to  500.000000
8/22/2011	10:27:46 AM	H2 MFC set to  0.000000
8/22/2011	10:27:46 AM	BCl3 MFC set to  0.000000
8/22/2011	10:27:46 AM	PHl3 MFC set to  0.000000
8/22/2011	10:27:46 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:27:46 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:27:46 AM	Tube furnace set to 0
8/22/2011	10:28:52 AM	Helium valve closed
8/22/2011	10:28:52 AM	H2 valve closed
8/22/2011	10:28:52 AM	BCl3 valve closed
8/22/2011	10:28:52 AM	PH3 valve closed
8/22/2011	10:28:52 AM	SiCl4 pre valve closed
8/22/2011	10:28:52 AM	SiCl4 post valve closed
8/22/2011	10:28:52 AM	Main Vac valve closed
8/22/2011	10:28:52 AM	Bypass valve closed
8/22/2011	10:28:52 AM	Bubbler valve closed
8/22/2011	10:28:52 AM	Helium MFC set to  0.000000
8/22/2011	10:28:52 AM	H2 MFC set to  0.000000
8/22/2011	10:28:52 AM	BCl3 MFC set to  0.000000
8/22/2011	10:28:52 AM	PHl3 MFC set to  0.000000
8/22/2011	10:28:52 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:28:52 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:28:52 AM	Tube furnace set to 0
8/22/2011	10:28:53 AM	Run finished at 10:28 AM
8/22/2011	10:28:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2011	10:36:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	10:36:52 AM	Recipe started at 10:36 AM
8/22/2011	10:36:52 AM	Helium valve closed
8/22/2011	10:36:52 AM	H2 valve closed
8/22/2011	10:36:52 AM	BCl3 valve closed
8/22/2011	10:36:52 AM	PH3 valve closed
8/22/2011	10:36:52 AM	SiCl4 pre valve closed
8/22/2011	10:36:52 AM	SiCl4 post valve closed
8/22/2011	10:36:52 AM	Main Vac valve closed
8/22/2011	10:36:52 AM	Bubbler valve closed
8/22/2011	10:36:52 AM	Bypass valve opened
8/22/2011	10:36:52 AM	Helium MFC set to  0.000000
8/22/2011	10:36:52 AM	H2 MFC set to  0.000000
8/22/2011	10:36:52 AM	BCl3 MFC set to  0.000000
8/22/2011	10:36:52 AM	PHl3 MFC set to  0.000000
8/22/2011	10:36:52 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:36:52 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:36:52 AM	Tube furnace set to 0
8/22/2011	10:38:11 AM	Helium valve closed
8/22/2011	10:38:11 AM	H2 valve closed
8/22/2011	10:38:11 AM	BCl3 valve closed
8/22/2011	10:38:11 AM	PH3 valve closed
8/22/2011	10:38:11 AM	SiCl4 pre valve closed
8/22/2011	10:38:11 AM	SiCl4 post valve closed
8/22/2011	10:38:11 AM	Main Vac valve closed
8/22/2011	10:38:11 AM	Bubbler valve closed
8/22/2011	10:38:11 AM	Bypass valve opened
8/22/2011	10:38:11 AM	Helium MFC set to  0.000000
8/22/2011	10:38:11 AM	H2 MFC set to  0.000000
8/22/2011	10:38:11 AM	BCl3 MFC set to  0.000000
8/22/2011	10:38:11 AM	PHl3 MFC set to  0.000000
8/22/2011	10:38:11 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:38:11 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:38:11 AM	Tube furnace set to 0
8/22/2011	10:39:11 AM	Helium valve closed
8/22/2011	10:39:11 AM	H2 valve closed
8/22/2011	10:39:11 AM	BCl3 valve closed
8/22/2011	10:39:11 AM	PH3 valve closed
8/22/2011	10:39:11 AM	SiCl4 pre valve closed
8/22/2011	10:39:11 AM	SiCl4 post valve closed
8/22/2011	10:39:11 AM	Bypass valve closed
8/22/2011	10:39:11 AM	Bubbler valve closed
8/22/2011	10:39:11 AM	Main Vac valve opened
8/22/2011	10:39:11 AM	Helium MFC set to  0.000000
8/22/2011	10:39:11 AM	H2 MFC set to  0.000000
8/22/2011	10:39:11 AM	BCl3 MFC set to  0.000000
8/22/2011	10:39:11 AM	PHl3 MFC set to  0.000000
8/22/2011	10:39:11 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:39:11 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:39:11 AM	Tube furnace set to 0
8/22/2011	10:39:12 AM	Run finished at 10:39 AM
8/22/2011	10:39:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	10:44:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	10:44:19 AM	Recipe started at 10:44 AM
8/22/2011	10:44:19 AM	Helium valve closed
8/22/2011	10:44:19 AM	H2 valve closed
8/22/2011	10:44:19 AM	BCl3 valve closed
8/22/2011	10:44:19 AM	PH3 valve closed
8/22/2011	10:44:19 AM	SiCl4 pre valve closed
8/22/2011	10:44:19 AM	SiCl4 post valve closed
8/22/2011	10:44:19 AM	Main Vac valve closed
8/22/2011	10:44:19 AM	Bubbler valve closed
8/22/2011	10:44:19 AM	Bypass valve opened
8/22/2011	10:44:19 AM	Helium MFC set to  0.000000
8/22/2011	10:44:19 AM	H2 MFC set to  0.000000
8/22/2011	10:44:19 AM	BCl3 MFC set to  0.000000
8/22/2011	10:44:19 AM	PHl3 MFC set to  0.000000
8/22/2011	10:44:19 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:44:19 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:44:19 AM	Tube furnace set to 0
8/22/2011	10:44:20 AM	Helium valve closed
8/22/2011	10:44:20 AM	H2 valve closed
8/22/2011	10:44:20 AM	BCl3 valve closed
8/22/2011	10:44:20 AM	PH3 valve closed
8/22/2011	10:44:20 AM	SiCl4 pre valve closed
8/22/2011	10:44:20 AM	SiCl4 post valve closed
8/22/2011	10:44:20 AM	Main Vac valve closed
8/22/2011	10:44:20 AM	Bubbler valve closed
8/22/2011	10:44:20 AM	Bypass valve opened
8/22/2011	10:44:20 AM	Helium MFC set to  0.000000
8/22/2011	10:44:20 AM	H2 MFC set to  0.000000
8/22/2011	10:44:20 AM	BCl3 MFC set to  0.000000
8/22/2011	10:44:20 AM	PHl3 MFC set to  0.000000
8/22/2011	10:44:20 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:44:20 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:44:20 AM	Tube furnace set to 0
8/22/2011	10:44:49 AM	Helium valve closed
8/22/2011	10:44:49 AM	H2 valve closed
8/22/2011	10:44:49 AM	BCl3 valve closed
8/22/2011	10:44:49 AM	PH3 valve closed
8/22/2011	10:44:49 AM	SiCl4 pre valve closed
8/22/2011	10:44:49 AM	SiCl4 post valve closed
8/22/2011	10:44:49 AM	Bypass valve closed
8/22/2011	10:44:49 AM	Bubbler valve closed
8/22/2011	10:44:49 AM	Main Vac valve opened
8/22/2011	10:44:49 AM	Helium MFC set to  0.000000
8/22/2011	10:44:49 AM	H2 MFC set to  0.000000
8/22/2011	10:44:49 AM	BCl3 MFC set to  0.000000
8/22/2011	10:44:49 AM	PHl3 MFC set to  0.000000
8/22/2011	10:44:49 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:44:49 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:44:50 AM	Tube furnace set to 0
8/22/2011	10:45:20 AM	H2 valve closed
8/22/2011	10:45:20 AM	BCl3 valve closed
8/22/2011	10:45:20 AM	PH3 valve closed
8/22/2011	10:45:20 AM	SiCl4 pre valve closed
8/22/2011	10:45:20 AM	SiCl4 post valve closed
8/22/2011	10:45:20 AM	Bypass valve closed
8/22/2011	10:45:20 AM	Bubbler valve closed
8/22/2011	10:45:20 AM	Helium valve opened
8/22/2011	10:45:20 AM	Main Vac valve opened
8/22/2011	10:45:20 AM	Helium MFC set to  20.000000
8/22/2011	10:45:20 AM	H2 MFC set to  0.000000
8/22/2011	10:45:20 AM	BCl3 MFC set to  0.000000
8/22/2011	10:45:20 AM	PHl3 MFC set to  0.000000
8/22/2011	10:45:20 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:45:20 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:45:20 AM	Tube furnace set to 0
8/22/2011	10:45:50 AM	Helium valve closed
8/22/2011	10:45:50 AM	H2 valve closed
8/22/2011	10:45:50 AM	BCl3 valve closed
8/22/2011	10:45:50 AM	PH3 valve closed
8/22/2011	10:45:50 AM	SiCl4 pre valve closed
8/22/2011	10:45:50 AM	SiCl4 post valve closed
8/22/2011	10:45:50 AM	Bypass valve closed
8/22/2011	10:45:50 AM	Bubbler valve closed
8/22/2011	10:45:50 AM	Main Vac valve opened
8/22/2011	10:45:50 AM	Helium MFC set to  0.000000
8/22/2011	10:45:50 AM	H2 MFC set to  0.000000
8/22/2011	10:45:50 AM	BCl3 MFC set to  0.000000
8/22/2011	10:45:50 AM	PHl3 MFC set to  0.000000
8/22/2011	10:45:50 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:45:50 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:45:50 AM	Tube furnace set to 0
8/22/2011	10:46:20 AM	H2 valve closed
8/22/2011	10:46:20 AM	BCl3 valve closed
8/22/2011	10:46:20 AM	PH3 valve closed
8/22/2011	10:46:20 AM	SiCl4 pre valve closed
8/22/2011	10:46:20 AM	SiCl4 post valve closed
8/22/2011	10:46:20 AM	Bypass valve closed
8/22/2011	10:46:20 AM	Bubbler valve closed
8/22/2011	10:46:20 AM	Helium valve opened
8/22/2011	10:46:20 AM	Main Vac valve opened
8/22/2011	10:46:20 AM	Helium MFC set to  20.000000
8/22/2011	10:46:20 AM	H2 MFC set to  0.000000
8/22/2011	10:46:20 AM	BCl3 MFC set to  0.000000
8/22/2011	10:46:20 AM	PHl3 MFC set to  0.000000
8/22/2011	10:46:20 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:46:20 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:46:20 AM	Tube furnace set to 0
8/22/2011	10:46:50 AM	Helium valve closed
8/22/2011	10:46:50 AM	H2 valve closed
8/22/2011	10:46:50 AM	BCl3 valve closed
8/22/2011	10:46:50 AM	PH3 valve closed
8/22/2011	10:46:50 AM	SiCl4 pre valve closed
8/22/2011	10:46:50 AM	SiCl4 post valve closed
8/22/2011	10:46:50 AM	Bypass valve closed
8/22/2011	10:46:50 AM	Bubbler valve closed
8/22/2011	10:46:50 AM	Main Vac valve opened
8/22/2011	10:46:50 AM	Helium MFC set to  0.000000
8/22/2011	10:46:50 AM	H2 MFC set to  0.000000
8/22/2011	10:46:50 AM	BCl3 MFC set to  0.000000
8/22/2011	10:46:50 AM	PHl3 MFC set to  0.000000
8/22/2011	10:46:50 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:46:50 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:46:50 AM	Tube furnace set to 0
8/22/2011	10:47:20 AM	H2 valve closed
8/22/2011	10:47:20 AM	BCl3 valve closed
8/22/2011	10:47:20 AM	PH3 valve closed
8/22/2011	10:47:20 AM	SiCl4 pre valve closed
8/22/2011	10:47:20 AM	SiCl4 post valve closed
8/22/2011	10:47:20 AM	Bypass valve closed
8/22/2011	10:47:20 AM	Bubbler valve closed
8/22/2011	10:47:20 AM	Helium valve opened
8/22/2011	10:47:20 AM	Main Vac valve opened
8/22/2011	10:47:20 AM	Helium MFC set to  20.000000
8/22/2011	10:47:20 AM	H2 MFC set to  0.000000
8/22/2011	10:47:20 AM	BCl3 MFC set to  0.000000
8/22/2011	10:47:20 AM	PHl3 MFC set to  0.000000
8/22/2011	10:47:20 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:47:20 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:47:21 AM	Tube furnace set to 0
8/22/2011	10:47:51 AM	Helium valve closed
8/22/2011	10:47:51 AM	H2 valve closed
8/22/2011	10:47:51 AM	BCl3 valve closed
8/22/2011	10:47:51 AM	PH3 valve closed
8/22/2011	10:47:51 AM	SiCl4 pre valve closed
8/22/2011	10:47:51 AM	SiCl4 post valve closed
8/22/2011	10:47:51 AM	Bypass valve closed
8/22/2011	10:47:51 AM	Bubbler valve closed
8/22/2011	10:47:51 AM	Main Vac valve opened
8/22/2011	10:47:51 AM	Helium MFC set to  0.000000
8/22/2011	10:47:51 AM	H2 MFC set to  0.000000
8/22/2011	10:47:51 AM	BCl3 MFC set to  0.000000
8/22/2011	10:47:51 AM	PHl3 MFC set to  0.000000
8/22/2011	10:47:51 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:47:51 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:47:51 AM	Tube furnace set to 0
8/22/2011	10:48:21 AM	H2 valve closed
8/22/2011	10:48:21 AM	BCl3 valve closed
8/22/2011	10:48:21 AM	PH3 valve closed
8/22/2011	10:48:21 AM	SiCl4 pre valve closed
8/22/2011	10:48:21 AM	SiCl4 post valve closed
8/22/2011	10:48:21 AM	Bypass valve closed
8/22/2011	10:48:21 AM	Bubbler valve closed
8/22/2011	10:48:21 AM	Helium valve opened
8/22/2011	10:48:21 AM	Main Vac valve opened
8/22/2011	10:48:21 AM	Helium MFC set to  20.000000
8/22/2011	10:48:21 AM	H2 MFC set to  0.000000
8/22/2011	10:48:21 AM	BCl3 MFC set to  0.000000
8/22/2011	10:48:21 AM	PHl3 MFC set to  0.000000
8/22/2011	10:48:21 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:48:21 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:48:21 AM	Tube furnace set to 0
8/22/2011	10:48:51 AM	Helium valve closed
8/22/2011	10:48:51 AM	H2 valve closed
8/22/2011	10:48:51 AM	BCl3 valve closed
8/22/2011	10:48:51 AM	PH3 valve closed
8/22/2011	10:48:51 AM	SiCl4 pre valve closed
8/22/2011	10:48:51 AM	SiCl4 post valve closed
8/22/2011	10:48:51 AM	Bypass valve closed
8/22/2011	10:48:51 AM	Bubbler valve closed
8/22/2011	10:48:51 AM	Main Vac valve opened
8/22/2011	10:48:51 AM	Helium MFC set to  0.000000
8/22/2011	10:48:51 AM	H2 MFC set to  0.000000
8/22/2011	10:48:51 AM	BCl3 MFC set to  0.000000
8/22/2011	10:48:51 AM	PHl3 MFC set to  0.000000
8/22/2011	10:48:51 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:48:51 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:48:51 AM	Tube furnace set to 0
8/22/2011	10:49:21 AM	H2 valve closed
8/22/2011	10:49:21 AM	BCl3 valve closed
8/22/2011	10:49:21 AM	PH3 valve closed
8/22/2011	10:49:21 AM	SiCl4 pre valve closed
8/22/2011	10:49:21 AM	SiCl4 post valve closed
8/22/2011	10:49:21 AM	Bypass valve closed
8/22/2011	10:49:21 AM	Bubbler valve closed
8/22/2011	10:49:21 AM	Helium valve opened
8/22/2011	10:49:21 AM	Main Vac valve opened
8/22/2011	10:49:21 AM	Helium MFC set to  20.000000
8/22/2011	10:49:21 AM	H2 MFC set to  0.000000
8/22/2011	10:49:21 AM	BCl3 MFC set to  0.000000
8/22/2011	10:49:21 AM	PHl3 MFC set to  0.000000
8/22/2011	10:49:21 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:49:21 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:49:21 AM	Tube furnace set to 0
8/22/2011	10:49:51 AM	Helium valve closed
8/22/2011	10:49:51 AM	H2 valve closed
8/22/2011	10:49:51 AM	BCl3 valve closed
8/22/2011	10:49:51 AM	PH3 valve closed
8/22/2011	10:49:51 AM	SiCl4 pre valve closed
8/22/2011	10:49:51 AM	SiCl4 post valve closed
8/22/2011	10:49:51 AM	Bypass valve closed
8/22/2011	10:49:51 AM	Bubbler valve closed
8/22/2011	10:49:51 AM	Main Vac valve opened
8/22/2011	10:49:51 AM	Helium MFC set to  0.000000
8/22/2011	10:49:51 AM	H2 MFC set to  0.000000
8/22/2011	10:49:51 AM	BCl3 MFC set to  0.000000
8/22/2011	10:49:51 AM	PHl3 MFC set to  0.000000
8/22/2011	10:49:51 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:49:51 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:49:51 AM	Tube furnace set to 0
8/22/2011	10:50:22 AM	H2 valve closed
8/22/2011	10:50:22 AM	BCl3 valve closed
8/22/2011	10:50:22 AM	PH3 valve closed
8/22/2011	10:50:22 AM	SiCl4 pre valve closed
8/22/2011	10:50:22 AM	SiCl4 post valve closed
8/22/2011	10:50:22 AM	Bypass valve closed
8/22/2011	10:50:22 AM	Bubbler valve closed
8/22/2011	10:50:22 AM	Helium valve opened
8/22/2011	10:50:22 AM	Main Vac valve opened
8/22/2011	10:50:22 AM	Helium MFC set to  20.000000
8/22/2011	10:50:22 AM	H2 MFC set to  0.000000
8/22/2011	10:50:22 AM	BCl3 MFC set to  0.000000
8/22/2011	10:50:22 AM	PHl3 MFC set to  0.000000
8/22/2011	10:50:22 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:50:22 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:50:22 AM	Tube furnace set to 0
8/22/2011	10:50:52 AM	Helium valve closed
8/22/2011	10:50:52 AM	H2 valve closed
8/22/2011	10:50:52 AM	BCl3 valve closed
8/22/2011	10:50:52 AM	PH3 valve closed
8/22/2011	10:50:52 AM	SiCl4 pre valve closed
8/22/2011	10:50:52 AM	SiCl4 post valve closed
8/22/2011	10:50:52 AM	Bypass valve closed
8/22/2011	10:50:52 AM	Bubbler valve closed
8/22/2011	10:50:52 AM	Main Vac valve opened
8/22/2011	10:50:52 AM	Helium MFC set to  0.000000
8/22/2011	10:50:52 AM	H2 MFC set to  0.000000
8/22/2011	10:50:52 AM	BCl3 MFC set to  0.000000
8/22/2011	10:50:52 AM	PHl3 MFC set to  0.000000
8/22/2011	10:50:52 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:50:52 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:50:52 AM	Tube furnace set to 0
8/22/2011	10:51:22 AM	H2 valve closed
8/22/2011	10:51:22 AM	BCl3 valve closed
8/22/2011	10:51:22 AM	PH3 valve closed
8/22/2011	10:51:22 AM	SiCl4 pre valve closed
8/22/2011	10:51:22 AM	SiCl4 post valve closed
8/22/2011	10:51:22 AM	Bypass valve closed
8/22/2011	10:51:22 AM	Bubbler valve closed
8/22/2011	10:51:22 AM	Helium valve opened
8/22/2011	10:51:22 AM	Main Vac valve opened
8/22/2011	10:51:22 AM	Helium MFC set to  20.000000
8/22/2011	10:51:22 AM	H2 MFC set to  0.000000
8/22/2011	10:51:22 AM	BCl3 MFC set to  0.000000
8/22/2011	10:51:22 AM	PHl3 MFC set to  0.000000
8/22/2011	10:51:22 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:51:22 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:51:22 AM	Tube furnace set to 0
8/22/2011	10:51:52 AM	Helium valve closed
8/22/2011	10:51:52 AM	H2 valve closed
8/22/2011	10:51:52 AM	BCl3 valve closed
8/22/2011	10:51:52 AM	PH3 valve closed
8/22/2011	10:51:52 AM	SiCl4 pre valve closed
8/22/2011	10:51:52 AM	SiCl4 post valve closed
8/22/2011	10:51:52 AM	Bypass valve closed
8/22/2011	10:51:52 AM	Bubbler valve closed
8/22/2011	10:51:52 AM	Main Vac valve opened
8/22/2011	10:51:52 AM	Helium MFC set to  0.000000
8/22/2011	10:51:52 AM	H2 MFC set to  0.000000
8/22/2011	10:51:52 AM	BCl3 MFC set to  0.000000
8/22/2011	10:51:52 AM	PHl3 MFC set to  0.000000
8/22/2011	10:51:52 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:51:52 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:51:52 AM	Tube furnace set to 0
8/22/2011	10:52:22 AM	H2 valve closed
8/22/2011	10:52:22 AM	BCl3 valve closed
8/22/2011	10:52:22 AM	PH3 valve closed
8/22/2011	10:52:22 AM	SiCl4 pre valve closed
8/22/2011	10:52:22 AM	SiCl4 post valve closed
8/22/2011	10:52:22 AM	Bypass valve closed
8/22/2011	10:52:22 AM	Bubbler valve closed
8/22/2011	10:52:22 AM	Helium valve opened
8/22/2011	10:52:22 AM	Main Vac valve opened
8/22/2011	10:52:22 AM	Helium MFC set to  20.000000
8/22/2011	10:52:22 AM	H2 MFC set to  0.000000
8/22/2011	10:52:22 AM	BCl3 MFC set to  0.000000
8/22/2011	10:52:22 AM	PHl3 MFC set to  0.000000
8/22/2011	10:52:22 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:52:22 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:52:22 AM	Tube furnace set to 0
8/22/2011	10:52:52 AM	Helium valve closed
8/22/2011	10:52:53 AM	H2 valve closed
8/22/2011	10:52:53 AM	BCl3 valve closed
8/22/2011	10:52:53 AM	PH3 valve closed
8/22/2011	10:52:53 AM	SiCl4 pre valve closed
8/22/2011	10:52:53 AM	SiCl4 post valve closed
8/22/2011	10:52:53 AM	Bypass valve closed
8/22/2011	10:52:53 AM	Bubbler valve closed
8/22/2011	10:52:53 AM	Main Vac valve opened
8/22/2011	10:52:53 AM	Helium MFC set to  0.000000
8/22/2011	10:52:53 AM	H2 MFC set to  0.000000
8/22/2011	10:52:53 AM	BCl3 MFC set to  0.000000
8/22/2011	10:52:53 AM	PHl3 MFC set to  0.000000
8/22/2011	10:52:53 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:52:53 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:52:53 AM	Tube furnace set to 0
8/22/2011	10:53:23 AM	H2 valve closed
8/22/2011	10:53:23 AM	BCl3 valve closed
8/22/2011	10:53:23 AM	PH3 valve closed
8/22/2011	10:53:23 AM	SiCl4 pre valve closed
8/22/2011	10:53:23 AM	SiCl4 post valve closed
8/22/2011	10:53:23 AM	Bypass valve closed
8/22/2011	10:53:23 AM	Bubbler valve closed
8/22/2011	10:53:23 AM	Helium valve opened
8/22/2011	10:53:23 AM	Main Vac valve opened
8/22/2011	10:53:23 AM	Helium MFC set to  20.000000
8/22/2011	10:53:23 AM	H2 MFC set to  0.000000
8/22/2011	10:53:23 AM	BCl3 MFC set to  0.000000
8/22/2011	10:53:23 AM	PHl3 MFC set to  0.000000
8/22/2011	10:53:23 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:53:23 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:53:23 AM	Tube furnace set to 0
8/22/2011	10:53:53 AM	Helium valve closed
8/22/2011	10:53:53 AM	H2 valve closed
8/22/2011	10:53:53 AM	BCl3 valve closed
8/22/2011	10:53:53 AM	PH3 valve closed
8/22/2011	10:53:53 AM	SiCl4 pre valve closed
8/22/2011	10:53:53 AM	SiCl4 post valve closed
8/22/2011	10:53:53 AM	Bypass valve closed
8/22/2011	10:53:53 AM	Bubbler valve closed
8/22/2011	10:53:53 AM	Main Vac valve opened
8/22/2011	10:53:53 AM	Helium MFC set to  0.000000
8/22/2011	10:53:53 AM	H2 MFC set to  0.000000
8/22/2011	10:53:53 AM	BCl3 MFC set to  0.000000
8/22/2011	10:53:53 AM	PHl3 MFC set to  0.000000
8/22/2011	10:53:53 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:53:53 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:53:53 AM	Tube furnace set to 0
8/22/2011	10:54:23 AM	H2 valve closed
8/22/2011	10:54:23 AM	BCl3 valve closed
8/22/2011	10:54:23 AM	PH3 valve closed
8/22/2011	10:54:23 AM	SiCl4 pre valve closed
8/22/2011	10:54:23 AM	SiCl4 post valve closed
8/22/2011	10:54:23 AM	Bypass valve closed
8/22/2011	10:54:23 AM	Bubbler valve closed
8/22/2011	10:54:23 AM	Helium valve opened
8/22/2011	10:54:23 AM	Main Vac valve opened
8/22/2011	10:54:23 AM	Helium MFC set to  20.000000
8/22/2011	10:54:23 AM	H2 MFC set to  0.000000
8/22/2011	10:54:23 AM	BCl3 MFC set to  0.000000
8/22/2011	10:54:23 AM	PHl3 MFC set to  0.000000
8/22/2011	10:54:23 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:54:23 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:54:23 AM	Tube furnace set to 0
8/22/2011	10:54:53 AM	Helium valve closed
8/22/2011	10:54:53 AM	H2 valve closed
8/22/2011	10:54:53 AM	BCl3 valve closed
8/22/2011	10:54:53 AM	PH3 valve closed
8/22/2011	10:54:53 AM	SiCl4 pre valve closed
8/22/2011	10:54:53 AM	SiCl4 post valve closed
8/22/2011	10:54:53 AM	Bypass valve closed
8/22/2011	10:54:53 AM	Bubbler valve closed
8/22/2011	10:54:53 AM	Main Vac valve opened
8/22/2011	10:54:53 AM	Helium MFC set to  0.000000
8/22/2011	10:54:53 AM	H2 MFC set to  0.000000
8/22/2011	10:54:53 AM	BCl3 MFC set to  0.000000
8/22/2011	10:54:53 AM	PHl3 MFC set to  0.000000
8/22/2011	10:54:53 AM	SiCl4 MFC set to  0.000000
8/22/2011	10:54:53 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:54:53 AM	Tube furnace set to 0
8/22/2011	10:54:54 AM	Run finished at 10:54 AM
8/22/2011	10:54:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	11:09:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/22/2011	11:09:01 AM	Recipe started at 11:09 AM
8/22/2011	11:09:01 AM	Helium valve closed
8/22/2011	11:09:01 AM	H2 valve closed
8/22/2011	11:09:01 AM	BCl3 valve closed
8/22/2011	11:09:01 AM	PH3 valve closed
8/22/2011	11:09:01 AM	SiCl4 pre valve closed
8/22/2011	11:09:01 AM	SiCl4 post valve closed
8/22/2011	11:09:01 AM	Main Vac valve closed
8/22/2011	11:09:01 AM	Bypass valve closed
8/22/2011	11:09:01 AM	Bubbler valve closed
8/22/2011	11:09:01 AM	Helium MFC set to  0.000000
8/22/2011	11:09:01 AM	H2 MFC set to  0.000000
8/22/2011	11:09:01 AM	BCl3 MFC set to  0.000000
8/22/2011	11:09:01 AM	PHl3 MFC set to  0.000000
8/22/2011	11:09:01 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:09:01 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:09:01 AM	Tube furnace set to 0
8/22/2011	11:09:01 AM	Run finished at 11:09 AM
8/22/2011	11:09:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/22/2011	11:09:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	11:09:25 AM	Recipe started at 11:09 AM
8/22/2011	11:09:25 AM	Helium valve closed
8/22/2011	11:09:25 AM	H2 valve closed
8/22/2011	11:09:25 AM	BCl3 valve closed
8/22/2011	11:09:25 AM	PH3 valve closed
8/22/2011	11:09:25 AM	SiCl4 pre valve closed
8/22/2011	11:09:25 AM	SiCl4 post valve closed
8/22/2011	11:09:25 AM	Main Vac valve closed
8/22/2011	11:09:25 AM	Bubbler valve closed
8/22/2011	11:09:25 AM	Bypass valve opened
8/22/2011	11:09:25 AM	Helium MFC set to  0.000000
8/22/2011	11:09:25 AM	H2 MFC set to  0.000000
8/22/2011	11:09:25 AM	BCl3 MFC set to  0.000000
8/22/2011	11:09:25 AM	PHl3 MFC set to  0.000000
8/22/2011	11:09:25 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:09:25 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:09:25 AM	Tube furnace set to 0
8/22/2011	11:09:26 AM	Helium valve closed
8/22/2011	11:09:26 AM	H2 valve closed
8/22/2011	11:09:26 AM	BCl3 valve closed
8/22/2011	11:09:26 AM	PH3 valve closed
8/22/2011	11:09:26 AM	SiCl4 pre valve closed
8/22/2011	11:09:26 AM	SiCl4 post valve closed
8/22/2011	11:09:26 AM	Main Vac valve closed
8/22/2011	11:09:26 AM	Bubbler valve closed
8/22/2011	11:09:26 AM	Bypass valve opened
8/22/2011	11:09:26 AM	Helium MFC set to  0.000000
8/22/2011	11:09:26 AM	H2 MFC set to  0.000000
8/22/2011	11:09:26 AM	BCl3 MFC set to  0.000000
8/22/2011	11:09:26 AM	PHl3 MFC set to  0.000000
8/22/2011	11:09:26 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:09:26 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:09:26 AM	Tube furnace set to 0
8/22/2011	11:10:16 AM	Helium valve closed
8/22/2011	11:10:16 AM	H2 valve closed
8/22/2011	11:10:16 AM	BCl3 valve closed
8/22/2011	11:10:16 AM	PH3 valve closed
8/22/2011	11:10:16 AM	SiCl4 pre valve closed
8/22/2011	11:10:16 AM	SiCl4 post valve closed
8/22/2011	11:10:16 AM	Bypass valve closed
8/22/2011	11:10:16 AM	Bubbler valve closed
8/22/2011	11:10:16 AM	Main Vac valve opened
8/22/2011	11:10:16 AM	Helium MFC set to  0.000000
8/22/2011	11:10:16 AM	H2 MFC set to  0.000000
8/22/2011	11:10:16 AM	BCl3 MFC set to  0.000000
8/22/2011	11:10:16 AM	PHl3 MFC set to  0.000000
8/22/2011	11:10:16 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:10:16 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:10:16 AM	Tube furnace set to 0
8/22/2011	11:10:17 AM	Run finished at 11:10 AM
8/22/2011	11:10:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	11:12:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/22/2011	11:12:03 AM	Recipe started at 11:12 AM
8/22/2011	11:12:03 AM	Helium valve closed
8/22/2011	11:12:03 AM	H2 valve closed
8/22/2011	11:12:03 AM	BCl3 valve closed
8/22/2011	11:12:03 AM	PH3 valve closed
8/22/2011	11:12:03 AM	SiCl4 pre valve closed
8/22/2011	11:12:03 AM	SiCl4 post valve closed
8/22/2011	11:12:03 AM	Main Vac valve closed
8/22/2011	11:12:03 AM	Bypass valve closed
8/22/2011	11:12:03 AM	Bubbler valve closed
8/22/2011	11:12:03 AM	Helium MFC set to  0.000000
8/22/2011	11:12:03 AM	H2 MFC set to  0.000000
8/22/2011	11:12:03 AM	BCl3 MFC set to  0.000000
8/22/2011	11:12:03 AM	PHl3 MFC set to  0.000000
8/22/2011	11:12:03 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:12:03 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:12:03 AM	Tube furnace set to 0
8/22/2011	11:12:03 AM	Run finished at 11:12 AM
8/22/2011	11:12:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/22/2011	11:12:33 AM	Main Vac valve opened
8/22/2011	11:19:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2011	11:19:01 AM	Recipe started at 11:19 AM
8/22/2011	11:19:01 AM	Helium valve closed
8/22/2011	11:19:01 AM	H2 valve closed
8/22/2011	11:19:01 AM	BCl3 valve closed
8/22/2011	11:19:01 AM	PH3 valve closed
8/22/2011	11:19:01 AM	SiCl4 pre valve closed
8/22/2011	11:19:01 AM	SiCl4 post valve closed
8/22/2011	11:19:01 AM	Main Vac valve closed
8/22/2011	11:19:01 AM	Bypass valve closed
8/22/2011	11:19:01 AM	Bubbler valve closed
8/22/2011	11:19:01 AM	Helium MFC set to  0.000000
8/22/2011	11:19:01 AM	H2 MFC set to  0.000000
8/22/2011	11:19:01 AM	BCl3 MFC set to  0.000000
8/22/2011	11:19:01 AM	PHl3 MFC set to  0.000000
8/22/2011	11:19:01 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:19:01 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:19:01 AM	Tube furnace set to 0
8/22/2011	11:19:04 AM	H2 valve closed
8/22/2011	11:19:04 AM	BCl3 valve closed
8/22/2011	11:19:04 AM	PH3 valve closed
8/22/2011	11:19:04 AM	SiCl4 pre valve closed
8/22/2011	11:19:04 AM	SiCl4 post valve closed
8/22/2011	11:19:04 AM	Main Vac valve closed
8/22/2011	11:19:04 AM	Bypass valve closed
8/22/2011	11:19:04 AM	Bubbler valve closed
8/22/2011	11:19:04 AM	Helium valve opened
8/22/2011	11:19:04 AM	Helium MFC set to  500.000000
8/22/2011	11:19:04 AM	H2 MFC set to  0.000000
8/22/2011	11:19:04 AM	BCl3 MFC set to  0.000000
8/22/2011	11:19:04 AM	PHl3 MFC set to  0.000000
8/22/2011	11:19:04 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:19:04 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:19:05 AM	Tube furnace set to 0
8/22/2011	11:20:12 AM	Helium valve closed
8/22/2011	11:20:12 AM	H2 valve closed
8/22/2011	11:20:12 AM	BCl3 valve closed
8/22/2011	11:20:12 AM	PH3 valve closed
8/22/2011	11:20:12 AM	SiCl4 pre valve closed
8/22/2011	11:20:12 AM	SiCl4 post valve closed
8/22/2011	11:20:12 AM	Main Vac valve closed
8/22/2011	11:20:12 AM	Bypass valve closed
8/22/2011	11:20:12 AM	Bubbler valve closed
8/22/2011	11:20:12 AM	Helium MFC set to  0.000000
8/22/2011	11:20:12 AM	H2 MFC set to  0.000000
8/22/2011	11:20:12 AM	BCl3 MFC set to  0.000000
8/22/2011	11:20:12 AM	PHl3 MFC set to  0.000000
8/22/2011	11:20:12 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:20:12 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:20:12 AM	Tube furnace set to 0
8/22/2011	11:20:13 AM	Run finished at 11:20 AM
8/22/2011	11:20:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/22/2011	11:35:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	11:35:20 AM	Recipe started at 11:35 AM
8/22/2011	11:35:20 AM	Helium valve closed
8/22/2011	11:35:20 AM	H2 valve closed
8/22/2011	11:35:20 AM	BCl3 valve closed
8/22/2011	11:35:20 AM	PH3 valve closed
8/22/2011	11:35:20 AM	SiCl4 pre valve closed
8/22/2011	11:35:20 AM	SiCl4 post valve closed
8/22/2011	11:35:20 AM	Main Vac valve closed
8/22/2011	11:35:20 AM	Bubbler valve closed
8/22/2011	11:35:20 AM	Bypass valve opened
8/22/2011	11:35:20 AM	Helium MFC set to  0.000000
8/22/2011	11:35:20 AM	H2 MFC set to  0.000000
8/22/2011	11:35:20 AM	BCl3 MFC set to  0.000000
8/22/2011	11:35:20 AM	PHl3 MFC set to  0.000000
8/22/2011	11:35:20 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:35:20 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:35:20 AM	Tube furnace set to 0
8/22/2011	11:36:39 AM	Helium valve closed
8/22/2011	11:36:39 AM	H2 valve closed
8/22/2011	11:36:39 AM	BCl3 valve closed
8/22/2011	11:36:39 AM	PH3 valve closed
8/22/2011	11:36:39 AM	SiCl4 pre valve closed
8/22/2011	11:36:39 AM	SiCl4 post valve closed
8/22/2011	11:36:39 AM	Main Vac valve closed
8/22/2011	11:36:39 AM	Bubbler valve closed
8/22/2011	11:36:39 AM	Bypass valve opened
8/22/2011	11:36:39 AM	Helium MFC set to  0.000000
8/22/2011	11:36:39 AM	H2 MFC set to  0.000000
8/22/2011	11:36:39 AM	BCl3 MFC set to  0.000000
8/22/2011	11:36:39 AM	PHl3 MFC set to  0.000000
8/22/2011	11:36:39 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:36:39 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:36:39 AM	Tube furnace set to 0
8/22/2011	11:37:23 AM	Helium valve closed
8/22/2011	11:37:23 AM	H2 valve closed
8/22/2011	11:37:23 AM	BCl3 valve closed
8/22/2011	11:37:23 AM	PH3 valve closed
8/22/2011	11:37:23 AM	SiCl4 pre valve closed
8/22/2011	11:37:23 AM	SiCl4 post valve closed
8/22/2011	11:37:23 AM	Bypass valve closed
8/22/2011	11:37:23 AM	Bubbler valve closed
8/22/2011	11:37:23 AM	Main Vac valve opened
8/22/2011	11:37:23 AM	Helium MFC set to  0.000000
8/22/2011	11:37:23 AM	H2 MFC set to  0.000000
8/22/2011	11:37:23 AM	BCl3 MFC set to  0.000000
8/22/2011	11:37:23 AM	PHl3 MFC set to  0.000000
8/22/2011	11:37:23 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:37:23 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:37:23 AM	Tube furnace set to 0
8/22/2011	11:37:24 AM	Run finished at 11:37 AM
8/22/2011	11:37:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	11:40:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	11:40:33 AM	Recipe started at 11:40 AM
8/22/2011	11:40:33 AM	Helium valve closed
8/22/2011	11:40:33 AM	H2 valve closed
8/22/2011	11:40:33 AM	BCl3 valve closed
8/22/2011	11:40:33 AM	PH3 valve closed
8/22/2011	11:40:33 AM	SiCl4 pre valve closed
8/22/2011	11:40:33 AM	SiCl4 post valve closed
8/22/2011	11:40:33 AM	Main Vac valve closed
8/22/2011	11:40:33 AM	Bubbler valve closed
8/22/2011	11:40:33 AM	Bypass valve opened
8/22/2011	11:40:33 AM	Helium MFC set to  0.000000
8/22/2011	11:40:33 AM	H2 MFC set to  0.000000
8/22/2011	11:40:33 AM	BCl3 MFC set to  0.000000
8/22/2011	11:40:33 AM	PHl3 MFC set to  0.000000
8/22/2011	11:40:33 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:40:33 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:40:33 AM	Tube furnace set to 0
8/22/2011	11:40:34 AM	Helium valve closed
8/22/2011	11:40:34 AM	H2 valve closed
8/22/2011	11:40:34 AM	BCl3 valve closed
8/22/2011	11:40:34 AM	PH3 valve closed
8/22/2011	11:40:34 AM	SiCl4 pre valve closed
8/22/2011	11:40:34 AM	SiCl4 post valve closed
8/22/2011	11:40:34 AM	Main Vac valve closed
8/22/2011	11:40:34 AM	Bubbler valve closed
8/22/2011	11:40:34 AM	Bypass valve opened
8/22/2011	11:40:34 AM	Helium MFC set to  0.000000
8/22/2011	11:40:34 AM	H2 MFC set to  0.000000
8/22/2011	11:40:34 AM	BCl3 MFC set to  0.000000
8/22/2011	11:40:34 AM	PHl3 MFC set to  0.000000
8/22/2011	11:40:34 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:40:34 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:40:34 AM	Tube furnace set to 0
8/22/2011	11:40:40 AM	Helium valve closed
8/22/2011	11:40:40 AM	H2 valve closed
8/22/2011	11:40:40 AM	BCl3 valve closed
8/22/2011	11:40:40 AM	PH3 valve closed
8/22/2011	11:40:40 AM	SiCl4 pre valve closed
8/22/2011	11:40:40 AM	SiCl4 post valve closed
8/22/2011	11:40:40 AM	Bypass valve closed
8/22/2011	11:40:40 AM	Bubbler valve closed
8/22/2011	11:40:40 AM	Main Vac valve opened
8/22/2011	11:40:40 AM	Helium MFC set to  0.000000
8/22/2011	11:40:40 AM	H2 MFC set to  0.000000
8/22/2011	11:40:40 AM	BCl3 MFC set to  0.000000
8/22/2011	11:40:40 AM	PHl3 MFC set to  0.000000
8/22/2011	11:40:40 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:40:40 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:40:40 AM	Tube furnace set to 0
8/22/2011	11:41:10 AM	H2 valve closed
8/22/2011	11:41:10 AM	BCl3 valve closed
8/22/2011	11:41:10 AM	PH3 valve closed
8/22/2011	11:41:10 AM	SiCl4 pre valve closed
8/22/2011	11:41:10 AM	SiCl4 post valve closed
8/22/2011	11:41:10 AM	Bypass valve closed
8/22/2011	11:41:10 AM	Bubbler valve closed
8/22/2011	11:41:10 AM	Helium valve opened
8/22/2011	11:41:10 AM	Main Vac valve opened
8/22/2011	11:41:10 AM	Helium MFC set to  20.000000
8/22/2011	11:41:10 AM	H2 MFC set to  0.000000
8/22/2011	11:41:10 AM	BCl3 MFC set to  0.000000
8/22/2011	11:41:10 AM	PHl3 MFC set to  0.000000
8/22/2011	11:41:10 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:41:10 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:41:10 AM	Tube furnace set to 0
8/22/2011	11:41:40 AM	Helium valve closed
8/22/2011	11:41:40 AM	H2 valve closed
8/22/2011	11:41:40 AM	BCl3 valve closed
8/22/2011	11:41:40 AM	PH3 valve closed
8/22/2011	11:41:40 AM	SiCl4 pre valve closed
8/22/2011	11:41:40 AM	SiCl4 post valve closed
8/22/2011	11:41:40 AM	Bypass valve closed
8/22/2011	11:41:40 AM	Bubbler valve closed
8/22/2011	11:41:40 AM	Main Vac valve opened
8/22/2011	11:41:40 AM	Helium MFC set to  0.000000
8/22/2011	11:41:40 AM	H2 MFC set to  0.000000
8/22/2011	11:41:40 AM	BCl3 MFC set to  0.000000
8/22/2011	11:41:40 AM	PHl3 MFC set to  0.000000
8/22/2011	11:41:40 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:41:40 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:41:40 AM	Tube furnace set to 0
8/22/2011	11:42:10 AM	H2 valve closed
8/22/2011	11:42:10 AM	BCl3 valve closed
8/22/2011	11:42:10 AM	PH3 valve closed
8/22/2011	11:42:10 AM	SiCl4 pre valve closed
8/22/2011	11:42:10 AM	SiCl4 post valve closed
8/22/2011	11:42:10 AM	Bypass valve closed
8/22/2011	11:42:10 AM	Bubbler valve closed
8/22/2011	11:42:10 AM	Helium valve opened
8/22/2011	11:42:10 AM	Main Vac valve opened
8/22/2011	11:42:10 AM	Helium MFC set to  20.000000
8/22/2011	11:42:10 AM	H2 MFC set to  0.000000
8/22/2011	11:42:10 AM	BCl3 MFC set to  0.000000
8/22/2011	11:42:10 AM	PHl3 MFC set to  0.000000
8/22/2011	11:42:10 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:42:10 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:42:11 AM	Tube furnace set to 0
8/22/2011	11:42:41 AM	Helium valve closed
8/22/2011	11:42:41 AM	H2 valve closed
8/22/2011	11:42:41 AM	BCl3 valve closed
8/22/2011	11:42:41 AM	PH3 valve closed
8/22/2011	11:42:41 AM	SiCl4 pre valve closed
8/22/2011	11:42:41 AM	SiCl4 post valve closed
8/22/2011	11:42:41 AM	Bypass valve closed
8/22/2011	11:42:41 AM	Bubbler valve closed
8/22/2011	11:42:41 AM	Main Vac valve opened
8/22/2011	11:42:41 AM	Helium MFC set to  0.000000
8/22/2011	11:42:41 AM	H2 MFC set to  0.000000
8/22/2011	11:42:41 AM	BCl3 MFC set to  0.000000
8/22/2011	11:42:41 AM	PHl3 MFC set to  0.000000
8/22/2011	11:42:41 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:42:41 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:42:41 AM	Tube furnace set to 0
8/22/2011	11:43:11 AM	H2 valve closed
8/22/2011	11:43:11 AM	BCl3 valve closed
8/22/2011	11:43:11 AM	PH3 valve closed
8/22/2011	11:43:11 AM	SiCl4 pre valve closed
8/22/2011	11:43:11 AM	SiCl4 post valve closed
8/22/2011	11:43:11 AM	Bypass valve closed
8/22/2011	11:43:11 AM	Bubbler valve closed
8/22/2011	11:43:11 AM	Helium valve opened
8/22/2011	11:43:11 AM	Main Vac valve opened
8/22/2011	11:43:11 AM	Helium MFC set to  20.000000
8/22/2011	11:43:11 AM	H2 MFC set to  0.000000
8/22/2011	11:43:11 AM	BCl3 MFC set to  0.000000
8/22/2011	11:43:11 AM	PHl3 MFC set to  0.000000
8/22/2011	11:43:11 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:43:11 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:43:11 AM	Tube furnace set to 0
8/22/2011	11:43:41 AM	Helium valve closed
8/22/2011	11:43:41 AM	H2 valve closed
8/22/2011	11:43:41 AM	BCl3 valve closed
8/22/2011	11:43:41 AM	PH3 valve closed
8/22/2011	11:43:41 AM	SiCl4 pre valve closed
8/22/2011	11:43:41 AM	SiCl4 post valve closed
8/22/2011	11:43:41 AM	Bypass valve closed
8/22/2011	11:43:41 AM	Bubbler valve closed
8/22/2011	11:43:41 AM	Main Vac valve opened
8/22/2011	11:43:41 AM	Helium MFC set to  0.000000
8/22/2011	11:43:41 AM	H2 MFC set to  0.000000
8/22/2011	11:43:41 AM	BCl3 MFC set to  0.000000
8/22/2011	11:43:41 AM	PHl3 MFC set to  0.000000
8/22/2011	11:43:41 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:43:41 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:43:41 AM	Tube furnace set to 0
8/22/2011	11:44:11 AM	H2 valve closed
8/22/2011	11:44:11 AM	BCl3 valve closed
8/22/2011	11:44:11 AM	PH3 valve closed
8/22/2011	11:44:11 AM	SiCl4 pre valve closed
8/22/2011	11:44:11 AM	SiCl4 post valve closed
8/22/2011	11:44:11 AM	Bypass valve closed
8/22/2011	11:44:11 AM	Bubbler valve closed
8/22/2011	11:44:11 AM	Helium valve opened
8/22/2011	11:44:11 AM	Main Vac valve opened
8/22/2011	11:44:11 AM	Helium MFC set to  20.000000
8/22/2011	11:44:11 AM	H2 MFC set to  0.000000
8/22/2011	11:44:11 AM	BCl3 MFC set to  0.000000
8/22/2011	11:44:11 AM	PHl3 MFC set to  0.000000
8/22/2011	11:44:11 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:44:11 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:44:11 AM	Tube furnace set to 0
8/22/2011	11:44:41 AM	Helium valve closed
8/22/2011	11:44:41 AM	H2 valve closed
8/22/2011	11:44:41 AM	BCl3 valve closed
8/22/2011	11:44:41 AM	PH3 valve closed
8/22/2011	11:44:41 AM	SiCl4 pre valve closed
8/22/2011	11:44:41 AM	SiCl4 post valve closed
8/22/2011	11:44:41 AM	Bypass valve closed
8/22/2011	11:44:41 AM	Bubbler valve closed
8/22/2011	11:44:41 AM	Main Vac valve opened
8/22/2011	11:44:41 AM	Helium MFC set to  0.000000
8/22/2011	11:44:41 AM	H2 MFC set to  0.000000
8/22/2011	11:44:41 AM	BCl3 MFC set to  0.000000
8/22/2011	11:44:41 AM	PHl3 MFC set to  0.000000
8/22/2011	11:44:41 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:44:41 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:44:41 AM	Tube furnace set to 0
8/22/2011	11:45:12 AM	H2 valve closed
8/22/2011	11:45:12 AM	BCl3 valve closed
8/22/2011	11:45:12 AM	PH3 valve closed
8/22/2011	11:45:12 AM	SiCl4 pre valve closed
8/22/2011	11:45:12 AM	SiCl4 post valve closed
8/22/2011	11:45:12 AM	Bypass valve closed
8/22/2011	11:45:12 AM	Bubbler valve closed
8/22/2011	11:45:12 AM	Helium valve opened
8/22/2011	11:45:12 AM	Main Vac valve opened
8/22/2011	11:45:12 AM	Helium MFC set to  20.000000
8/22/2011	11:45:12 AM	H2 MFC set to  0.000000
8/22/2011	11:45:12 AM	BCl3 MFC set to  0.000000
8/22/2011	11:45:12 AM	PHl3 MFC set to  0.000000
8/22/2011	11:45:12 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:45:12 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:45:12 AM	Tube furnace set to 0
8/22/2011	11:45:42 AM	Helium valve closed
8/22/2011	11:45:42 AM	H2 valve closed
8/22/2011	11:45:42 AM	BCl3 valve closed
8/22/2011	11:45:42 AM	PH3 valve closed
8/22/2011	11:45:42 AM	SiCl4 pre valve closed
8/22/2011	11:45:42 AM	SiCl4 post valve closed
8/22/2011	11:45:42 AM	Bypass valve closed
8/22/2011	11:45:42 AM	Bubbler valve closed
8/22/2011	11:45:42 AM	Main Vac valve opened
8/22/2011	11:45:42 AM	Helium MFC set to  0.000000
8/22/2011	11:45:42 AM	H2 MFC set to  0.000000
8/22/2011	11:45:42 AM	BCl3 MFC set to  0.000000
8/22/2011	11:45:42 AM	PHl3 MFC set to  0.000000
8/22/2011	11:45:42 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:45:42 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:45:42 AM	Tube furnace set to 0
8/22/2011	11:46:12 AM	H2 valve closed
8/22/2011	11:46:12 AM	BCl3 valve closed
8/22/2011	11:46:12 AM	PH3 valve closed
8/22/2011	11:46:12 AM	SiCl4 pre valve closed
8/22/2011	11:46:12 AM	SiCl4 post valve closed
8/22/2011	11:46:12 AM	Bypass valve closed
8/22/2011	11:46:12 AM	Bubbler valve closed
8/22/2011	11:46:12 AM	Helium valve opened
8/22/2011	11:46:12 AM	Main Vac valve opened
8/22/2011	11:46:12 AM	Helium MFC set to  20.000000
8/22/2011	11:46:12 AM	H2 MFC set to  0.000000
8/22/2011	11:46:12 AM	BCl3 MFC set to  0.000000
8/22/2011	11:46:12 AM	PHl3 MFC set to  0.000000
8/22/2011	11:46:12 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:46:12 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:46:12 AM	Tube furnace set to 0
8/22/2011	11:46:42 AM	Helium valve closed
8/22/2011	11:46:42 AM	H2 valve closed
8/22/2011	11:46:42 AM	BCl3 valve closed
8/22/2011	11:46:42 AM	PH3 valve closed
8/22/2011	11:46:42 AM	SiCl4 pre valve closed
8/22/2011	11:46:42 AM	SiCl4 post valve closed
8/22/2011	11:46:42 AM	Bypass valve closed
8/22/2011	11:46:42 AM	Bubbler valve closed
8/22/2011	11:46:42 AM	Main Vac valve opened
8/22/2011	11:46:42 AM	Helium MFC set to  0.000000
8/22/2011	11:46:42 AM	H2 MFC set to  0.000000
8/22/2011	11:46:42 AM	BCl3 MFC set to  0.000000
8/22/2011	11:46:42 AM	PHl3 MFC set to  0.000000
8/22/2011	11:46:42 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:46:42 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:46:42 AM	Tube furnace set to 0
8/22/2011	11:47:12 AM	H2 valve closed
8/22/2011	11:47:12 AM	BCl3 valve closed
8/22/2011	11:47:12 AM	PH3 valve closed
8/22/2011	11:47:12 AM	SiCl4 pre valve closed
8/22/2011	11:47:12 AM	SiCl4 post valve closed
8/22/2011	11:47:12 AM	Bypass valve closed
8/22/2011	11:47:12 AM	Bubbler valve closed
8/22/2011	11:47:12 AM	Helium valve opened
8/22/2011	11:47:12 AM	Main Vac valve opened
8/22/2011	11:47:12 AM	Helium MFC set to  20.000000
8/22/2011	11:47:12 AM	H2 MFC set to  0.000000
8/22/2011	11:47:12 AM	BCl3 MFC set to  0.000000
8/22/2011	11:47:12 AM	PHl3 MFC set to  0.000000
8/22/2011	11:47:12 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:47:12 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:47:12 AM	Tube furnace set to 0
8/22/2011	11:47:42 AM	Helium valve closed
8/22/2011	11:47:42 AM	H2 valve closed
8/22/2011	11:47:43 AM	BCl3 valve closed
8/22/2011	11:47:43 AM	PH3 valve closed
8/22/2011	11:47:43 AM	SiCl4 pre valve closed
8/22/2011	11:47:43 AM	SiCl4 post valve closed
8/22/2011	11:47:43 AM	Bypass valve closed
8/22/2011	11:47:43 AM	Bubbler valve closed
8/22/2011	11:47:43 AM	Main Vac valve opened
8/22/2011	11:47:43 AM	Helium MFC set to  0.000000
8/22/2011	11:47:43 AM	H2 MFC set to  0.000000
8/22/2011	11:47:43 AM	BCl3 MFC set to  0.000000
8/22/2011	11:47:43 AM	PHl3 MFC set to  0.000000
8/22/2011	11:47:43 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:47:43 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:47:43 AM	Tube furnace set to 0
8/22/2011	11:48:13 AM	H2 valve closed
8/22/2011	11:48:13 AM	BCl3 valve closed
8/22/2011	11:48:13 AM	PH3 valve closed
8/22/2011	11:48:13 AM	SiCl4 pre valve closed
8/22/2011	11:48:13 AM	SiCl4 post valve closed
8/22/2011	11:48:13 AM	Bypass valve closed
8/22/2011	11:48:13 AM	Bubbler valve closed
8/22/2011	11:48:13 AM	Helium valve opened
8/22/2011	11:48:13 AM	Main Vac valve opened
8/22/2011	11:48:13 AM	Helium MFC set to  20.000000
8/22/2011	11:48:13 AM	H2 MFC set to  0.000000
8/22/2011	11:48:13 AM	BCl3 MFC set to  0.000000
8/22/2011	11:48:13 AM	PHl3 MFC set to  0.000000
8/22/2011	11:48:13 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:48:13 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:48:13 AM	Tube furnace set to 0
8/22/2011	11:48:43 AM	Helium valve closed
8/22/2011	11:48:43 AM	H2 valve closed
8/22/2011	11:48:43 AM	BCl3 valve closed
8/22/2011	11:48:43 AM	PH3 valve closed
8/22/2011	11:48:43 AM	SiCl4 pre valve closed
8/22/2011	11:48:43 AM	SiCl4 post valve closed
8/22/2011	11:48:43 AM	Bypass valve closed
8/22/2011	11:48:43 AM	Bubbler valve closed
8/22/2011	11:48:43 AM	Main Vac valve opened
8/22/2011	11:48:43 AM	Helium MFC set to  0.000000
8/22/2011	11:48:43 AM	H2 MFC set to  0.000000
8/22/2011	11:48:43 AM	BCl3 MFC set to  0.000000
8/22/2011	11:48:43 AM	PHl3 MFC set to  0.000000
8/22/2011	11:48:43 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:48:43 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:48:43 AM	Tube furnace set to 0
8/22/2011	11:49:13 AM	H2 valve closed
8/22/2011	11:49:13 AM	BCl3 valve closed
8/22/2011	11:49:13 AM	PH3 valve closed
8/22/2011	11:49:13 AM	SiCl4 pre valve closed
8/22/2011	11:49:13 AM	SiCl4 post valve closed
8/22/2011	11:49:13 AM	Bypass valve closed
8/22/2011	11:49:13 AM	Bubbler valve closed
8/22/2011	11:49:13 AM	Helium valve opened
8/22/2011	11:49:13 AM	Main Vac valve opened
8/22/2011	11:49:13 AM	Helium MFC set to  20.000000
8/22/2011	11:49:13 AM	H2 MFC set to  0.000000
8/22/2011	11:49:13 AM	BCl3 MFC set to  0.000000
8/22/2011	11:49:13 AM	PHl3 MFC set to  0.000000
8/22/2011	11:49:13 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:49:13 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:49:13 AM	Tube furnace set to 0
8/22/2011	11:49:43 AM	Helium valve closed
8/22/2011	11:49:43 AM	H2 valve closed
8/22/2011	11:49:43 AM	BCl3 valve closed
8/22/2011	11:49:43 AM	PH3 valve closed
8/22/2011	11:49:43 AM	SiCl4 pre valve closed
8/22/2011	11:49:43 AM	SiCl4 post valve closed
8/22/2011	11:49:43 AM	Bypass valve closed
8/22/2011	11:49:43 AM	Bubbler valve closed
8/22/2011	11:49:43 AM	Main Vac valve opened
8/22/2011	11:49:43 AM	Helium MFC set to  0.000000
8/22/2011	11:49:43 AM	H2 MFC set to  0.000000
8/22/2011	11:49:43 AM	BCl3 MFC set to  0.000000
8/22/2011	11:49:43 AM	PHl3 MFC set to  0.000000
8/22/2011	11:49:43 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:49:43 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:49:44 AM	Tube furnace set to 0
8/22/2011	11:50:14 AM	H2 valve closed
8/22/2011	11:50:14 AM	BCl3 valve closed
8/22/2011	11:50:14 AM	PH3 valve closed
8/22/2011	11:50:14 AM	SiCl4 pre valve closed
8/22/2011	11:50:14 AM	SiCl4 post valve closed
8/22/2011	11:50:14 AM	Bypass valve closed
8/22/2011	11:50:14 AM	Bubbler valve closed
8/22/2011	11:50:14 AM	Helium valve opened
8/22/2011	11:50:14 AM	Main Vac valve opened
8/22/2011	11:50:14 AM	Helium MFC set to  20.000000
8/22/2011	11:50:14 AM	H2 MFC set to  0.000000
8/22/2011	11:50:14 AM	BCl3 MFC set to  0.000000
8/22/2011	11:50:14 AM	PHl3 MFC set to  0.000000
8/22/2011	11:50:14 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:50:14 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:50:14 AM	Tube furnace set to 0
8/22/2011	11:50:44 AM	Helium valve closed
8/22/2011	11:50:44 AM	H2 valve closed
8/22/2011	11:50:44 AM	BCl3 valve closed
8/22/2011	11:50:44 AM	PH3 valve closed
8/22/2011	11:50:44 AM	SiCl4 pre valve closed
8/22/2011	11:50:44 AM	SiCl4 post valve closed
8/22/2011	11:50:44 AM	Bypass valve closed
8/22/2011	11:50:44 AM	Bubbler valve closed
8/22/2011	11:50:44 AM	Main Vac valve opened
8/22/2011	11:50:44 AM	Helium MFC set to  0.000000
8/22/2011	11:50:44 AM	H2 MFC set to  0.000000
8/22/2011	11:50:44 AM	BCl3 MFC set to  0.000000
8/22/2011	11:50:44 AM	PHl3 MFC set to  0.000000
8/22/2011	11:50:44 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:50:44 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:50:44 AM	Tube furnace set to 0
8/22/2011	11:50:45 AM	Run finished at 11:50 AM
8/22/2011	11:50:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	11:55:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	11:56:06 AM	Recipe started at 11:56 AM
8/22/2011	11:56:06 AM	Helium valve closed
8/22/2011	11:56:06 AM	H2 valve closed
8/22/2011	11:56:06 AM	BCl3 valve closed
8/22/2011	11:56:06 AM	PH3 valve closed
8/22/2011	11:56:06 AM	SiCl4 pre valve closed
8/22/2011	11:56:06 AM	SiCl4 post valve closed
8/22/2011	11:56:06 AM	Main Vac valve closed
8/22/2011	11:56:06 AM	Bubbler valve closed
8/22/2011	11:56:06 AM	Bypass valve opened
8/22/2011	11:56:06 AM	Helium MFC set to  0.000000
8/22/2011	11:56:06 AM	H2 MFC set to  0.000000
8/22/2011	11:56:06 AM	BCl3 MFC set to  0.000000
8/22/2011	11:56:06 AM	PHl3 MFC set to  0.000000
8/22/2011	11:56:06 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:56:06 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:56:06 AM	Tube furnace set to 0
8/22/2011	11:56:06 AM	Helium valve closed
8/22/2011	11:56:06 AM	H2 valve closed
8/22/2011	11:56:06 AM	BCl3 valve closed
8/22/2011	11:56:06 AM	PH3 valve closed
8/22/2011	11:56:06 AM	SiCl4 pre valve closed
8/22/2011	11:56:06 AM	SiCl4 post valve closed
8/22/2011	11:56:06 AM	Main Vac valve closed
8/22/2011	11:56:06 AM	Bubbler valve closed
8/22/2011	11:56:06 AM	Bypass valve opened
8/22/2011	11:56:06 AM	Helium MFC set to  0.000000
8/22/2011	11:56:06 AM	H2 MFC set to  0.000000
8/22/2011	11:56:06 AM	BCl3 MFC set to  0.000000
8/22/2011	11:56:06 AM	PHl3 MFC set to  0.000000
8/22/2011	11:56:06 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:56:07 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:56:07 AM	Tube furnace set to 0
8/22/2011	11:56:13 AM	Helium valve closed
8/22/2011	11:56:13 AM	H2 valve closed
8/22/2011	11:56:13 AM	BCl3 valve closed
8/22/2011	11:56:13 AM	PH3 valve closed
8/22/2011	11:56:13 AM	SiCl4 pre valve closed
8/22/2011	11:56:13 AM	SiCl4 post valve closed
8/22/2011	11:56:13 AM	Bypass valve closed
8/22/2011	11:56:13 AM	Bubbler valve closed
8/22/2011	11:56:13 AM	Main Vac valve opened
8/22/2011	11:56:13 AM	Helium MFC set to  0.000000
8/22/2011	11:56:13 AM	H2 MFC set to  0.000000
8/22/2011	11:56:13 AM	BCl3 MFC set to  0.000000
8/22/2011	11:56:13 AM	PHl3 MFC set to  0.000000
8/22/2011	11:56:13 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:56:13 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:56:13 AM	Tube furnace set to 0
8/22/2011	11:56:43 AM	H2 valve closed
8/22/2011	11:56:43 AM	BCl3 valve closed
8/22/2011	11:56:43 AM	PH3 valve closed
8/22/2011	11:56:43 AM	SiCl4 pre valve closed
8/22/2011	11:56:43 AM	SiCl4 post valve closed
8/22/2011	11:56:43 AM	Bypass valve closed
8/22/2011	11:56:43 AM	Bubbler valve closed
8/22/2011	11:56:43 AM	Helium valve opened
8/22/2011	11:56:43 AM	Main Vac valve opened
8/22/2011	11:56:43 AM	Helium MFC set to  20.000000
8/22/2011	11:56:43 AM	H2 MFC set to  0.000000
8/22/2011	11:56:43 AM	BCl3 MFC set to  0.000000
8/22/2011	11:56:43 AM	PHl3 MFC set to  0.000000
8/22/2011	11:56:43 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:56:43 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:56:44 AM	Tube furnace set to 0
8/22/2011	11:57:14 AM	Helium valve closed
8/22/2011	11:57:14 AM	H2 valve closed
8/22/2011	11:57:14 AM	BCl3 valve closed
8/22/2011	11:57:14 AM	PH3 valve closed
8/22/2011	11:57:14 AM	SiCl4 pre valve closed
8/22/2011	11:57:14 AM	SiCl4 post valve closed
8/22/2011	11:57:14 AM	Bypass valve closed
8/22/2011	11:57:14 AM	Bubbler valve closed
8/22/2011	11:57:14 AM	Main Vac valve opened
8/22/2011	11:57:14 AM	Helium MFC set to  0.000000
8/22/2011	11:57:14 AM	H2 MFC set to  0.000000
8/22/2011	11:57:14 AM	BCl3 MFC set to  0.000000
8/22/2011	11:57:14 AM	PHl3 MFC set to  0.000000
8/22/2011	11:57:14 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:57:14 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:57:14 AM	Tube furnace set to 0
8/22/2011	11:57:36 AM	Run aborted at 11:57 AM
8/22/2011	11:57:36 AM	Helium valve closed
8/22/2011	11:57:36 AM	H2 valve closed
8/22/2011	11:57:36 AM	BCl3 valve closed
8/22/2011	11:57:36 AM	PH3 valve closed
8/22/2011	11:57:36 AM	SiCl4 pre valve closed
8/22/2011	11:57:36 AM	SiCl4 post valve closed
8/22/2011	11:57:36 AM	Bypass valve closed
8/22/2011	11:57:36 AM	Main Vac valve closed
8/22/2011	11:57:36 AM	Bubbler valve closed
8/22/2011	11:57:36 AM	Helium MFC set to  0.000000
8/22/2011	11:57:36 AM	H2 MFC set to  0.000000
8/22/2011	11:57:36 AM	BCl3 MFC set to  0.000000
8/22/2011	11:57:36 AM	PHl3 MFC set to  0.000000
8/22/2011	11:57:36 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:57:36 AM	Tube furnace set to 0
8/22/2011	11:57:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	11:57:41 AM	Main Vac valve opened
8/22/2011	11:59:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	11:59:20 AM	Recipe started at 11:59 AM
8/22/2011	11:59:20 AM	Helium valve closed
8/22/2011	11:59:20 AM	H2 valve closed
8/22/2011	11:59:20 AM	BCl3 valve closed
8/22/2011	11:59:20 AM	PH3 valve closed
8/22/2011	11:59:20 AM	SiCl4 pre valve closed
8/22/2011	11:59:20 AM	SiCl4 post valve closed
8/22/2011	11:59:20 AM	Main Vac valve closed
8/22/2011	11:59:20 AM	Bubbler valve closed
8/22/2011	11:59:20 AM	Bypass valve opened
8/22/2011	11:59:20 AM	Helium MFC set to  0.000000
8/22/2011	11:59:20 AM	H2 MFC set to  0.000000
8/22/2011	11:59:20 AM	BCl3 MFC set to  0.000000
8/22/2011	11:59:20 AM	PHl3 MFC set to  0.000000
8/22/2011	11:59:20 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:59:20 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:59:20 AM	Tube furnace set to 0
8/22/2011	11:59:20 AM	Helium valve closed
8/22/2011	11:59:20 AM	H2 valve closed
8/22/2011	11:59:20 AM	BCl3 valve closed
8/22/2011	11:59:20 AM	PH3 valve closed
8/22/2011	11:59:20 AM	SiCl4 pre valve closed
8/22/2011	11:59:20 AM	SiCl4 post valve closed
8/22/2011	11:59:20 AM	Main Vac valve closed
8/22/2011	11:59:20 AM	Bubbler valve closed
8/22/2011	11:59:20 AM	Bypass valve opened
8/22/2011	11:59:20 AM	Helium MFC set to  0.000000
8/22/2011	11:59:20 AM	H2 MFC set to  0.000000
8/22/2011	11:59:20 AM	BCl3 MFC set to  0.000000
8/22/2011	11:59:20 AM	PHl3 MFC set to  0.000000
8/22/2011	11:59:20 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:59:20 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:59:20 AM	Tube furnace set to 0
8/22/2011	11:59:40 AM	Helium valve closed
8/22/2011	11:59:40 AM	H2 valve closed
8/22/2011	11:59:40 AM	BCl3 valve closed
8/22/2011	11:59:40 AM	PH3 valve closed
8/22/2011	11:59:40 AM	SiCl4 pre valve closed
8/22/2011	11:59:40 AM	SiCl4 post valve closed
8/22/2011	11:59:40 AM	Bypass valve closed
8/22/2011	11:59:40 AM	Bubbler valve closed
8/22/2011	11:59:40 AM	Main Vac valve opened
8/22/2011	11:59:40 AM	Helium MFC set to  0.000000
8/22/2011	11:59:40 AM	H2 MFC set to  0.000000
8/22/2011	11:59:40 AM	BCl3 MFC set to  0.000000
8/22/2011	11:59:40 AM	PHl3 MFC set to  0.000000
8/22/2011	11:59:40 AM	SiCl4 MFC set to  0.000000
8/22/2011	11:59:40 AM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:59:40 AM	Tube furnace set to 0
8/22/2011	12:00:10 PM	H2 valve closed
8/22/2011	12:00:10 PM	BCl3 valve closed
8/22/2011	12:00:10 PM	PH3 valve closed
8/22/2011	12:00:10 PM	SiCl4 pre valve closed
8/22/2011	12:00:10 PM	SiCl4 post valve closed
8/22/2011	12:00:10 PM	Bypass valve closed
8/22/2011	12:00:10 PM	Bubbler valve closed
8/22/2011	12:00:10 PM	Helium valve opened
8/22/2011	12:00:10 PM	Main Vac valve opened
8/22/2011	12:00:10 PM	Helium MFC set to  20.000000
8/22/2011	12:00:10 PM	H2 MFC set to  0.000000
8/22/2011	12:00:10 PM	BCl3 MFC set to  0.000000
8/22/2011	12:00:10 PM	PHl3 MFC set to  0.000000
8/22/2011	12:00:10 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:00:10 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:00:11 PM	Tube furnace set to 0
8/22/2011	12:00:41 PM	Helium valve closed
8/22/2011	12:00:41 PM	H2 valve closed
8/22/2011	12:00:41 PM	BCl3 valve closed
8/22/2011	12:00:41 PM	PH3 valve closed
8/22/2011	12:00:41 PM	SiCl4 pre valve closed
8/22/2011	12:00:41 PM	SiCl4 post valve closed
8/22/2011	12:00:41 PM	Bypass valve closed
8/22/2011	12:00:41 PM	Bubbler valve closed
8/22/2011	12:00:41 PM	Main Vac valve opened
8/22/2011	12:00:41 PM	Helium MFC set to  0.000000
8/22/2011	12:00:41 PM	H2 MFC set to  0.000000
8/22/2011	12:00:41 PM	BCl3 MFC set to  0.000000
8/22/2011	12:00:41 PM	PHl3 MFC set to  0.000000
8/22/2011	12:00:41 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:00:41 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:00:41 PM	Tube furnace set to 0
8/22/2011	12:01:11 PM	H2 valve closed
8/22/2011	12:01:11 PM	BCl3 valve closed
8/22/2011	12:01:11 PM	PH3 valve closed
8/22/2011	12:01:11 PM	SiCl4 pre valve closed
8/22/2011	12:01:11 PM	SiCl4 post valve closed
8/22/2011	12:01:11 PM	Bypass valve closed
8/22/2011	12:01:11 PM	Bubbler valve closed
8/22/2011	12:01:11 PM	Helium valve opened
8/22/2011	12:01:11 PM	Main Vac valve opened
8/22/2011	12:01:11 PM	Helium MFC set to  20.000000
8/22/2011	12:01:11 PM	H2 MFC set to  0.000000
8/22/2011	12:01:11 PM	BCl3 MFC set to  0.000000
8/22/2011	12:01:11 PM	PHl3 MFC set to  0.000000
8/22/2011	12:01:11 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:01:11 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:01:11 PM	Tube furnace set to 0
8/22/2011	12:01:41 PM	Helium valve closed
8/22/2011	12:01:41 PM	H2 valve closed
8/22/2011	12:01:41 PM	BCl3 valve closed
8/22/2011	12:01:41 PM	PH3 valve closed
8/22/2011	12:01:41 PM	SiCl4 pre valve closed
8/22/2011	12:01:41 PM	SiCl4 post valve closed
8/22/2011	12:01:41 PM	Bypass valve closed
8/22/2011	12:01:41 PM	Bubbler valve closed
8/22/2011	12:01:41 PM	Main Vac valve opened
8/22/2011	12:01:41 PM	Helium MFC set to  0.000000
8/22/2011	12:01:41 PM	H2 MFC set to  0.000000
8/22/2011	12:01:41 PM	BCl3 MFC set to  0.000000
8/22/2011	12:01:41 PM	PHl3 MFC set to  0.000000
8/22/2011	12:01:41 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:01:41 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:01:41 PM	Tube furnace set to 0
8/22/2011	12:02:11 PM	H2 valve closed
8/22/2011	12:02:11 PM	BCl3 valve closed
8/22/2011	12:02:11 PM	PH3 valve closed
8/22/2011	12:02:11 PM	SiCl4 pre valve closed
8/22/2011	12:02:11 PM	SiCl4 post valve closed
8/22/2011	12:02:11 PM	Bypass valve closed
8/22/2011	12:02:11 PM	Bubbler valve closed
8/22/2011	12:02:11 PM	Helium valve opened
8/22/2011	12:02:11 PM	Main Vac valve opened
8/22/2011	12:02:11 PM	Helium MFC set to  20.000000
8/22/2011	12:02:11 PM	H2 MFC set to  0.000000
8/22/2011	12:02:11 PM	BCl3 MFC set to  0.000000
8/22/2011	12:02:11 PM	PHl3 MFC set to  0.000000
8/22/2011	12:02:11 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:02:11 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:02:11 PM	Tube furnace set to 0
8/22/2011	12:02:42 PM	Helium valve closed
8/22/2011	12:02:42 PM	H2 valve closed
8/22/2011	12:02:42 PM	BCl3 valve closed
8/22/2011	12:02:42 PM	PH3 valve closed
8/22/2011	12:02:42 PM	SiCl4 pre valve closed
8/22/2011	12:02:42 PM	SiCl4 post valve closed
8/22/2011	12:02:42 PM	Bypass valve closed
8/22/2011	12:02:42 PM	Bubbler valve closed
8/22/2011	12:02:42 PM	Main Vac valve opened
8/22/2011	12:02:42 PM	Helium MFC set to  0.000000
8/22/2011	12:02:42 PM	H2 MFC set to  0.000000
8/22/2011	12:02:42 PM	BCl3 MFC set to  0.000000
8/22/2011	12:02:42 PM	PHl3 MFC set to  0.000000
8/22/2011	12:02:42 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:02:42 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:02:42 PM	Tube furnace set to 0
8/22/2011	12:03:12 PM	H2 valve closed
8/22/2011	12:03:12 PM	BCl3 valve closed
8/22/2011	12:03:12 PM	PH3 valve closed
8/22/2011	12:03:12 PM	SiCl4 pre valve closed
8/22/2011	12:03:12 PM	SiCl4 post valve closed
8/22/2011	12:03:12 PM	Bypass valve closed
8/22/2011	12:03:12 PM	Bubbler valve closed
8/22/2011	12:03:12 PM	Helium valve opened
8/22/2011	12:03:12 PM	Main Vac valve opened
8/22/2011	12:03:12 PM	Helium MFC set to  20.000000
8/22/2011	12:03:12 PM	H2 MFC set to  0.000000
8/22/2011	12:03:12 PM	BCl3 MFC set to  0.000000
8/22/2011	12:03:12 PM	PHl3 MFC set to  0.000000
8/22/2011	12:03:12 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:03:12 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:03:12 PM	Tube furnace set to 0
8/22/2011	12:03:42 PM	Helium valve closed
8/22/2011	12:03:42 PM	H2 valve closed
8/22/2011	12:03:42 PM	BCl3 valve closed
8/22/2011	12:03:42 PM	PH3 valve closed
8/22/2011	12:03:42 PM	SiCl4 pre valve closed
8/22/2011	12:03:42 PM	SiCl4 post valve closed
8/22/2011	12:03:42 PM	Bypass valve closed
8/22/2011	12:03:42 PM	Bubbler valve closed
8/22/2011	12:03:42 PM	Main Vac valve opened
8/22/2011	12:03:42 PM	Helium MFC set to  0.000000
8/22/2011	12:03:42 PM	H2 MFC set to  0.000000
8/22/2011	12:03:42 PM	BCl3 MFC set to  0.000000
8/22/2011	12:03:42 PM	PHl3 MFC set to  0.000000
8/22/2011	12:03:42 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:03:42 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:03:42 PM	Tube furnace set to 0
8/22/2011	12:04:12 PM	H2 valve closed
8/22/2011	12:04:12 PM	BCl3 valve closed
8/22/2011	12:04:12 PM	PH3 valve closed
8/22/2011	12:04:12 PM	SiCl4 pre valve closed
8/22/2011	12:04:12 PM	SiCl4 post valve closed
8/22/2011	12:04:12 PM	Bypass valve closed
8/22/2011	12:04:12 PM	Bubbler valve closed
8/22/2011	12:04:12 PM	Helium valve opened
8/22/2011	12:04:12 PM	Main Vac valve opened
8/22/2011	12:04:12 PM	Helium MFC set to  20.000000
8/22/2011	12:04:12 PM	H2 MFC set to  0.000000
8/22/2011	12:04:12 PM	BCl3 MFC set to  0.000000
8/22/2011	12:04:12 PM	PHl3 MFC set to  0.000000
8/22/2011	12:04:12 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:04:12 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:04:12 PM	Tube furnace set to 0
8/22/2011	12:04:42 PM	Helium valve closed
8/22/2011	12:04:42 PM	H2 valve closed
8/22/2011	12:04:42 PM	BCl3 valve closed
8/22/2011	12:04:42 PM	PH3 valve closed
8/22/2011	12:04:42 PM	SiCl4 pre valve closed
8/22/2011	12:04:42 PM	SiCl4 post valve closed
8/22/2011	12:04:42 PM	Bypass valve closed
8/22/2011	12:04:42 PM	Bubbler valve closed
8/22/2011	12:04:42 PM	Main Vac valve opened
8/22/2011	12:04:42 PM	Helium MFC set to  0.000000
8/22/2011	12:04:42 PM	H2 MFC set to  0.000000
8/22/2011	12:04:42 PM	BCl3 MFC set to  0.000000
8/22/2011	12:04:42 PM	PHl3 MFC set to  0.000000
8/22/2011	12:04:42 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:04:42 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:04:43 PM	Tube furnace set to 0
8/22/2011	12:05:13 PM	H2 valve closed
8/22/2011	12:05:13 PM	BCl3 valve closed
8/22/2011	12:05:13 PM	PH3 valve closed
8/22/2011	12:05:13 PM	SiCl4 pre valve closed
8/22/2011	12:05:13 PM	SiCl4 post valve closed
8/22/2011	12:05:13 PM	Bypass valve closed
8/22/2011	12:05:13 PM	Bubbler valve closed
8/22/2011	12:05:13 PM	Helium valve opened
8/22/2011	12:05:13 PM	Main Vac valve opened
8/22/2011	12:05:13 PM	Helium MFC set to  20.000000
8/22/2011	12:05:13 PM	H2 MFC set to  0.000000
8/22/2011	12:05:13 PM	BCl3 MFC set to  0.000000
8/22/2011	12:05:13 PM	PHl3 MFC set to  0.000000
8/22/2011	12:05:13 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:05:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:05:13 PM	Tube furnace set to 0
8/22/2011	12:05:43 PM	Helium valve closed
8/22/2011	12:05:43 PM	H2 valve closed
8/22/2011	12:05:43 PM	BCl3 valve closed
8/22/2011	12:05:43 PM	PH3 valve closed
8/22/2011	12:05:43 PM	SiCl4 pre valve closed
8/22/2011	12:05:43 PM	SiCl4 post valve closed
8/22/2011	12:05:43 PM	Bypass valve closed
8/22/2011	12:05:43 PM	Bubbler valve closed
8/22/2011	12:05:43 PM	Main Vac valve opened
8/22/2011	12:05:43 PM	Helium MFC set to  0.000000
8/22/2011	12:05:43 PM	H2 MFC set to  0.000000
8/22/2011	12:05:43 PM	BCl3 MFC set to  0.000000
8/22/2011	12:05:43 PM	PHl3 MFC set to  0.000000
8/22/2011	12:05:43 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:05:43 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:05:43 PM	Tube furnace set to 0
8/22/2011	12:06:13 PM	H2 valve closed
8/22/2011	12:06:13 PM	BCl3 valve closed
8/22/2011	12:06:13 PM	PH3 valve closed
8/22/2011	12:06:13 PM	SiCl4 pre valve closed
8/22/2011	12:06:13 PM	SiCl4 post valve closed
8/22/2011	12:06:13 PM	Bypass valve closed
8/22/2011	12:06:13 PM	Bubbler valve closed
8/22/2011	12:06:13 PM	Helium valve opened
8/22/2011	12:06:13 PM	Main Vac valve opened
8/22/2011	12:06:13 PM	Helium MFC set to  20.000000
8/22/2011	12:06:13 PM	H2 MFC set to  0.000000
8/22/2011	12:06:13 PM	BCl3 MFC set to  0.000000
8/22/2011	12:06:13 PM	PHl3 MFC set to  0.000000
8/22/2011	12:06:13 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:06:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:06:13 PM	Tube furnace set to 0
8/22/2011	12:06:43 PM	Helium valve closed
8/22/2011	12:06:43 PM	H2 valve closed
8/22/2011	12:06:43 PM	BCl3 valve closed
8/22/2011	12:06:43 PM	PH3 valve closed
8/22/2011	12:06:43 PM	SiCl4 pre valve closed
8/22/2011	12:06:43 PM	SiCl4 post valve closed
8/22/2011	12:06:43 PM	Bypass valve closed
8/22/2011	12:06:43 PM	Bubbler valve closed
8/22/2011	12:06:43 PM	Main Vac valve opened
8/22/2011	12:06:43 PM	Helium MFC set to  0.000000
8/22/2011	12:06:43 PM	H2 MFC set to  0.000000
8/22/2011	12:06:43 PM	BCl3 MFC set to  0.000000
8/22/2011	12:06:43 PM	PHl3 MFC set to  0.000000
8/22/2011	12:06:43 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:06:43 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:06:43 PM	Tube furnace set to 0
8/22/2011	12:07:13 PM	H2 valve closed
8/22/2011	12:07:13 PM	BCl3 valve closed
8/22/2011	12:07:13 PM	PH3 valve closed
8/22/2011	12:07:13 PM	SiCl4 pre valve closed
8/22/2011	12:07:13 PM	SiCl4 post valve closed
8/22/2011	12:07:13 PM	Bypass valve closed
8/22/2011	12:07:13 PM	Bubbler valve closed
8/22/2011	12:07:13 PM	Helium valve opened
8/22/2011	12:07:13 PM	Main Vac valve opened
8/22/2011	12:07:13 PM	Helium MFC set to  20.000000
8/22/2011	12:07:13 PM	H2 MFC set to  0.000000
8/22/2011	12:07:13 PM	BCl3 MFC set to  0.000000
8/22/2011	12:07:13 PM	PHl3 MFC set to  0.000000
8/22/2011	12:07:13 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:07:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:07:14 PM	Tube furnace set to 0
8/22/2011	12:07:44 PM	Helium valve closed
8/22/2011	12:07:44 PM	H2 valve closed
8/22/2011	12:07:44 PM	BCl3 valve closed
8/22/2011	12:07:44 PM	PH3 valve closed
8/22/2011	12:07:44 PM	SiCl4 pre valve closed
8/22/2011	12:07:44 PM	SiCl4 post valve closed
8/22/2011	12:07:44 PM	Bypass valve closed
8/22/2011	12:07:44 PM	Bubbler valve closed
8/22/2011	12:07:44 PM	Main Vac valve opened
8/22/2011	12:07:44 PM	Helium MFC set to  0.000000
8/22/2011	12:07:44 PM	H2 MFC set to  0.000000
8/22/2011	12:07:44 PM	BCl3 MFC set to  0.000000
8/22/2011	12:07:44 PM	PHl3 MFC set to  0.000000
8/22/2011	12:07:44 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:07:44 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:07:44 PM	Tube furnace set to 0
8/22/2011	12:08:14 PM	H2 valve closed
8/22/2011	12:08:14 PM	BCl3 valve closed
8/22/2011	12:08:14 PM	PH3 valve closed
8/22/2011	12:08:14 PM	SiCl4 pre valve closed
8/22/2011	12:08:14 PM	SiCl4 post valve closed
8/22/2011	12:08:14 PM	Bypass valve closed
8/22/2011	12:08:14 PM	Bubbler valve closed
8/22/2011	12:08:14 PM	Helium valve opened
8/22/2011	12:08:14 PM	Main Vac valve opened
8/22/2011	12:08:14 PM	Helium MFC set to  20.000000
8/22/2011	12:08:14 PM	H2 MFC set to  0.000000
8/22/2011	12:08:14 PM	BCl3 MFC set to  0.000000
8/22/2011	12:08:14 PM	PHl3 MFC set to  0.000000
8/22/2011	12:08:14 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:08:14 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:08:14 PM	Tube furnace set to 0
8/22/2011	12:08:44 PM	Helium valve closed
8/22/2011	12:08:44 PM	H2 valve closed
8/22/2011	12:08:44 PM	BCl3 valve closed
8/22/2011	12:08:44 PM	PH3 valve closed
8/22/2011	12:08:44 PM	SiCl4 pre valve closed
8/22/2011	12:08:44 PM	SiCl4 post valve closed
8/22/2011	12:08:44 PM	Bypass valve closed
8/22/2011	12:08:44 PM	Bubbler valve closed
8/22/2011	12:08:44 PM	Main Vac valve opened
8/22/2011	12:08:44 PM	Helium MFC set to  0.000000
8/22/2011	12:08:44 PM	H2 MFC set to  0.000000
8/22/2011	12:08:44 PM	BCl3 MFC set to  0.000000
8/22/2011	12:08:44 PM	PHl3 MFC set to  0.000000
8/22/2011	12:08:44 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:08:44 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:08:44 PM	Tube furnace set to 0
8/22/2011	12:09:14 PM	H2 valve closed
8/22/2011	12:09:14 PM	BCl3 valve closed
8/22/2011	12:09:14 PM	PH3 valve closed
8/22/2011	12:09:14 PM	SiCl4 pre valve closed
8/22/2011	12:09:14 PM	SiCl4 post valve closed
8/22/2011	12:09:14 PM	Bypass valve closed
8/22/2011	12:09:14 PM	Bubbler valve closed
8/22/2011	12:09:14 PM	Helium valve opened
8/22/2011	12:09:14 PM	Main Vac valve opened
8/22/2011	12:09:14 PM	Helium MFC set to  20.000000
8/22/2011	12:09:14 PM	H2 MFC set to  0.000000
8/22/2011	12:09:14 PM	BCl3 MFC set to  0.000000
8/22/2011	12:09:14 PM	PHl3 MFC set to  0.000000
8/22/2011	12:09:14 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:09:14 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:09:15 PM	Tube furnace set to 0
8/22/2011	12:09:45 PM	Helium valve closed
8/22/2011	12:09:45 PM	H2 valve closed
8/22/2011	12:09:45 PM	BCl3 valve closed
8/22/2011	12:09:45 PM	PH3 valve closed
8/22/2011	12:09:45 PM	SiCl4 pre valve closed
8/22/2011	12:09:45 PM	SiCl4 post valve closed
8/22/2011	12:09:45 PM	Bypass valve closed
8/22/2011	12:09:45 PM	Bubbler valve closed
8/22/2011	12:09:45 PM	Main Vac valve opened
8/22/2011	12:09:45 PM	Helium MFC set to  0.000000
8/22/2011	12:09:45 PM	H2 MFC set to  0.000000
8/22/2011	12:09:45 PM	BCl3 MFC set to  0.000000
8/22/2011	12:09:45 PM	PHl3 MFC set to  0.000000
8/22/2011	12:09:45 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:09:45 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:09:45 PM	Tube furnace set to 0
8/22/2011	12:09:46 PM	Run finished at 12:09 PM
8/22/2011	12:09:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	12:38:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/22/2011	12:38:30 PM	Recipe started at 12:38 PM
8/22/2011	12:38:30 PM	Helium valve closed
8/22/2011	12:38:30 PM	H2 valve closed
8/22/2011	12:38:30 PM	BCl3 valve closed
8/22/2011	12:38:30 PM	PH3 valve closed
8/22/2011	12:38:30 PM	SiCl4 pre valve closed
8/22/2011	12:38:30 PM	SiCl4 post valve closed
8/22/2011	12:38:30 PM	Main Vac valve closed
8/22/2011	12:38:30 PM	Bypass valve closed
8/22/2011	12:38:30 PM	Bubbler valve closed
8/22/2011	12:38:30 PM	Helium MFC set to  0.000000
8/22/2011	12:38:30 PM	H2 MFC set to  0.000000
8/22/2011	12:38:30 PM	BCl3 MFC set to  0.000000
8/22/2011	12:38:30 PM	PHl3 MFC set to  0.000000
8/22/2011	12:38:30 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:38:30 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:38:30 PM	Tube furnace set to 0
8/22/2011	12:38:31 PM	Run finished at 12:38 PM
8/22/2011	12:38:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/22/2011	12:38:49 PM	Main Vac valve opened
8/22/2011	12:42:57 PM	Recipe started at 12:42 PM
8/22/2011	12:42:57 PM	Helium valve closed
8/22/2011	12:42:57 PM	H2 valve closed
8/22/2011	12:42:57 PM	BCl3 valve closed
8/22/2011	12:42:57 PM	PH3 valve closed
8/22/2011	12:42:57 PM	SiCl4 pre valve closed
8/22/2011	12:42:57 PM	SiCl4 post valve closed
8/22/2011	12:42:57 PM	Main Vac valve closed
8/22/2011	12:42:57 PM	Bypass valve closed
8/22/2011	12:42:57 PM	Bubbler valve closed
8/22/2011	12:42:57 PM	Helium MFC set to  0.000000
8/22/2011	12:42:57 PM	H2 MFC set to  0.000000
8/22/2011	12:42:57 PM	BCl3 MFC set to  0.000000
8/22/2011	12:42:57 PM	PHl3 MFC set to  0.000000
8/22/2011	12:42:57 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:42:57 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:42:57 PM	Tube furnace set to 0
8/22/2011	12:43:00 PM	Helium valve closed
8/22/2011	12:43:00 PM	BCl3 valve closed
8/22/2011	12:43:00 PM	PH3 valve closed
8/22/2011	12:43:00 PM	SiCl4 pre valve closed
8/22/2011	12:43:00 PM	SiCl4 post valve closed
8/22/2011	12:43:00 PM	Main Vac valve closed
8/22/2011	12:43:00 PM	Bypass valve closed
8/22/2011	12:43:00 PM	Bubbler valve closed
8/22/2011	12:43:00 PM	H2 valve opened
8/22/2011	12:43:00 PM	Helium MFC set to  0.000000
8/22/2011	12:43:00 PM	H2 MFC set to  500.000000
8/22/2011	12:43:00 PM	BCl3 MFC set to  0.000000
8/22/2011	12:43:00 PM	PHl3 MFC set to  0.000000
8/22/2011	12:43:00 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:43:00 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:43:00 PM	Tube furnace set to 0
8/22/2011	12:44:09 PM	Helium valve closed
8/22/2011	12:44:09 PM	BCl3 valve closed
8/22/2011	12:44:09 PM	PH3 valve closed
8/22/2011	12:44:09 PM	SiCl4 pre valve closed
8/22/2011	12:44:09 PM	SiCl4 post valve closed
8/22/2011	12:44:09 PM	Main Vac valve closed
8/22/2011	12:44:09 PM	Bypass valve closed
8/22/2011	12:44:09 PM	H2 valve opened
8/22/2011	12:44:09 PM	Bubbler valve opened
8/22/2011	12:44:09 PM	Helium MFC set to  0.000000
8/22/2011	12:44:09 PM	H2 MFC set to  500.000000
8/22/2011	12:44:09 PM	BCl3 MFC set to  0.000000
8/22/2011	12:44:09 PM	PHl3 MFC set to  0.000000
8/22/2011	12:44:09 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:44:09 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:44:09 PM	Tube furnace set to 0
8/22/2011	12:44:10 PM	Helium valve closed
8/22/2011	12:44:10 PM	BCl3 valve closed
8/22/2011	12:44:10 PM	PH3 valve closed
8/22/2011	12:44:10 PM	SiCl4 pre valve closed
8/22/2011	12:44:10 PM	SiCl4 post valve closed
8/22/2011	12:44:10 PM	Main Vac valve closed
8/22/2011	12:44:10 PM	Bypass valve closed
8/22/2011	12:44:10 PM	H2 valve opened
8/22/2011	12:44:10 PM	Bubbler valve opened
8/22/2011	12:44:10 PM	Helium MFC set to  0.000000
8/22/2011	12:44:10 PM	H2 MFC set to  500.000000
8/22/2011	12:44:10 PM	BCl3 MFC set to  0.000000
8/22/2011	12:44:10 PM	PHl3 MFC set to  0.000000
8/22/2011	12:44:10 PM	SiCl4 MFC set to  0.000000
8/22/2011	12:44:10 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	12:44:10 PM	Tube furnace set to 1000
8/22/2011	1:04:10 PM	Helium valve closed
8/22/2011	1:04:10 PM	PH3 valve closed
8/22/2011	1:04:10 PM	Main Vac valve closed
8/22/2011	1:04:10 PM	Bypass valve closed
8/22/2011	1:04:10 PM	H2 valve opened
8/22/2011	1:04:10 PM	BCl3 valve opened
8/22/2011	1:04:10 PM	SiCl4 pre valve opened
8/22/2011	1:04:10 PM	SiCl4 post valve opened
8/22/2011	1:04:10 PM	Bubbler valve opened
8/22/2011	1:04:10 PM	Helium MFC set to  0.000000
8/22/2011	1:04:10 PM	H2 MFC set to  500.000000
8/22/2011	1:04:10 PM	BCl3 MFC set to  2.500000
8/22/2011	1:04:10 PM	PHl3 MFC set to  0.000000
8/22/2011	1:04:10 PM	SiCl4 MFC set to  50.000000
8/22/2011	1:04:10 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	1:04:10 PM	Tube furnace set to 1000
8/22/2011	1:14:10 PM	Helium valve closed
8/22/2011	1:14:10 PM	BCl3 valve closed
8/22/2011	1:14:10 PM	PH3 valve closed
8/22/2011	1:14:10 PM	SiCl4 pre valve closed
8/22/2011	1:14:10 PM	SiCl4 post valve closed
8/22/2011	1:14:10 PM	Main Vac valve closed
8/22/2011	1:14:10 PM	Bypass valve closed
8/22/2011	1:14:10 PM	H2 valve opened
8/22/2011	1:14:10 PM	Bubbler valve opened
8/22/2011	1:14:10 PM	Helium MFC set to  0.000000
8/22/2011	1:14:10 PM	H2 MFC set to  500.000000
8/22/2011	1:14:10 PM	BCl3 MFC set to  0.000000
8/22/2011	1:14:10 PM	PHl3 MFC set to  0.000000
8/22/2011	1:14:10 PM	SiCl4 MFC set to  0.000000
8/22/2011	1:14:10 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	1:14:10 PM	Tube furnace set to 750
8/22/2011	1:19:10 PM	H2 valve closed
8/22/2011	1:19:10 PM	BCl3 valve closed
8/22/2011	1:19:10 PM	PH3 valve closed
8/22/2011	1:19:10 PM	SiCl4 pre valve closed
8/22/2011	1:19:10 PM	SiCl4 post valve closed
8/22/2011	1:19:10 PM	Main Vac valve closed
8/22/2011	1:19:10 PM	Bypass valve closed
8/22/2011	1:19:10 PM	Helium valve opened
8/22/2011	1:19:10 PM	Bubbler valve opened
8/22/2011	1:19:10 PM	Helium MFC set to  500.000000
8/22/2011	1:19:10 PM	H2 MFC set to  0.000000
8/22/2011	1:19:10 PM	BCl3 MFC set to  0.000000
8/22/2011	1:19:10 PM	PHl3 MFC set to  0.000000
8/22/2011	1:19:10 PM	SiCl4 MFC set to  0.000000
8/22/2011	1:19:10 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	1:19:11 PM	Tube furnace set to 0
8/22/2011	1:52:31 PM	Helium valve closed
8/22/2011	1:52:31 PM	H2 valve closed
8/22/2011	1:52:31 PM	BCl3 valve closed
8/22/2011	1:52:31 PM	PH3 valve closed
8/22/2011	1:52:31 PM	SiCl4 pre valve closed
8/22/2011	1:52:31 PM	SiCl4 post valve closed
8/22/2011	1:52:31 PM	Main Vac valve closed
8/22/2011	1:52:31 PM	Bypass valve closed
8/22/2011	1:52:31 PM	Bubbler valve closed
8/22/2011	1:52:31 PM	Helium MFC set to  0.000000
8/22/2011	1:52:31 PM	H2 MFC set to  0.000000
8/22/2011	1:52:31 PM	BCl3 MFC set to  0.000000
8/22/2011	1:52:31 PM	PHl3 MFC set to  0.000000
8/22/2011	1:52:31 PM	SiCl4 MFC set to  0.000000
8/22/2011	1:52:31 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	1:52:31 PM	Tube furnace set to 0
8/22/2011	1:52:32 PM	Run finished at 1:52 PM
8/22/2011	2:28:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	2:28:32 PM	Recipe started at 2:28 PM
8/22/2011	2:28:32 PM	Helium valve closed
8/22/2011	2:28:32 PM	H2 valve closed
8/22/2011	2:28:32 PM	BCl3 valve closed
8/22/2011	2:28:32 PM	PH3 valve closed
8/22/2011	2:28:32 PM	SiCl4 pre valve closed
8/22/2011	2:28:32 PM	SiCl4 post valve closed
8/22/2011	2:28:32 PM	Main Vac valve closed
8/22/2011	2:28:32 PM	Bubbler valve closed
8/22/2011	2:28:32 PM	Bypass valve opened
8/22/2011	2:28:32 PM	Helium MFC set to  0.000000
8/22/2011	2:28:32 PM	H2 MFC set to  0.000000
8/22/2011	2:28:32 PM	BCl3 MFC set to  0.000000
8/22/2011	2:28:32 PM	PHl3 MFC set to  0.000000
8/22/2011	2:28:32 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:28:32 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:28:32 PM	Tube furnace set to 0
8/22/2011	2:29:46 PM	Helium valve closed
8/22/2011	2:29:46 PM	H2 valve closed
8/22/2011	2:29:46 PM	BCl3 valve closed
8/22/2011	2:29:46 PM	PH3 valve closed
8/22/2011	2:29:46 PM	SiCl4 pre valve closed
8/22/2011	2:29:46 PM	SiCl4 post valve closed
8/22/2011	2:29:46 PM	Main Vac valve closed
8/22/2011	2:29:46 PM	Bubbler valve closed
8/22/2011	2:29:46 PM	Bypass valve opened
8/22/2011	2:29:46 PM	Helium MFC set to  0.000000
8/22/2011	2:29:46 PM	H2 MFC set to  0.000000
8/22/2011	2:29:46 PM	BCl3 MFC set to  0.000000
8/22/2011	2:29:46 PM	PHl3 MFC set to  0.000000
8/22/2011	2:29:46 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:29:46 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:29:46 PM	Tube furnace set to 0
8/22/2011	2:30:46 PM	Helium valve closed
8/22/2011	2:30:46 PM	H2 valve closed
8/22/2011	2:30:46 PM	BCl3 valve closed
8/22/2011	2:30:46 PM	PH3 valve closed
8/22/2011	2:30:46 PM	SiCl4 pre valve closed
8/22/2011	2:30:46 PM	SiCl4 post valve closed
8/22/2011	2:30:46 PM	Bypass valve closed
8/22/2011	2:30:46 PM	Bubbler valve closed
8/22/2011	2:30:46 PM	Main Vac valve opened
8/22/2011	2:30:46 PM	Helium MFC set to  0.000000
8/22/2011	2:30:46 PM	H2 MFC set to  0.000000
8/22/2011	2:30:46 PM	BCl3 MFC set to  0.000000
8/22/2011	2:30:46 PM	PHl3 MFC set to  0.000000
8/22/2011	2:30:46 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:30:46 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:30:46 PM	Tube furnace set to 0
8/22/2011	2:30:47 PM	Run finished at 2:30 PM
8/22/2011	2:30:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	2:45:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	2:45:48 PM	Recipe started at 2:45 PM
8/22/2011	2:45:48 PM	Helium valve closed
8/22/2011	2:45:48 PM	H2 valve closed
8/22/2011	2:45:48 PM	BCl3 valve closed
8/22/2011	2:45:48 PM	PH3 valve closed
8/22/2011	2:45:48 PM	SiCl4 pre valve closed
8/22/2011	2:45:48 PM	SiCl4 post valve closed
8/22/2011	2:45:48 PM	Main Vac valve closed
8/22/2011	2:45:48 PM	Bubbler valve closed
8/22/2011	2:45:48 PM	Bypass valve opened
8/22/2011	2:45:48 PM	Helium MFC set to  0.000000
8/22/2011	2:45:48 PM	H2 MFC set to  0.000000
8/22/2011	2:45:48 PM	BCl3 MFC set to  0.000000
8/22/2011	2:45:48 PM	PHl3 MFC set to  0.000000
8/22/2011	2:45:48 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:45:48 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:45:48 PM	Tube furnace set to 0
8/22/2011	2:45:48 PM	Helium valve closed
8/22/2011	2:45:48 PM	H2 valve closed
8/22/2011	2:45:48 PM	BCl3 valve closed
8/22/2011	2:45:48 PM	PH3 valve closed
8/22/2011	2:45:48 PM	SiCl4 pre valve closed
8/22/2011	2:45:48 PM	SiCl4 post valve closed
8/22/2011	2:45:48 PM	Main Vac valve closed
8/22/2011	2:45:48 PM	Bubbler valve closed
8/22/2011	2:45:48 PM	Bypass valve opened
8/22/2011	2:45:48 PM	Helium MFC set to  0.000000
8/22/2011	2:45:49 PM	H2 MFC set to  0.000000
8/22/2011	2:45:49 PM	BCl3 MFC set to  0.000000
8/22/2011	2:45:49 PM	PHl3 MFC set to  0.000000
8/22/2011	2:45:49 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:45:49 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:45:49 PM	Tube furnace set to 0
8/22/2011	2:46:19 PM	Helium valve closed
8/22/2011	2:46:19 PM	H2 valve closed
8/22/2011	2:46:19 PM	BCl3 valve closed
8/22/2011	2:46:19 PM	PH3 valve closed
8/22/2011	2:46:19 PM	SiCl4 pre valve closed
8/22/2011	2:46:19 PM	SiCl4 post valve closed
8/22/2011	2:46:19 PM	Bypass valve closed
8/22/2011	2:46:19 PM	Bubbler valve closed
8/22/2011	2:46:19 PM	Main Vac valve opened
8/22/2011	2:46:19 PM	Helium MFC set to  0.000000
8/22/2011	2:46:19 PM	H2 MFC set to  0.000000
8/22/2011	2:46:19 PM	BCl3 MFC set to  0.000000
8/22/2011	2:46:19 PM	PHl3 MFC set to  0.000000
8/22/2011	2:46:19 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:46:19 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:46:19 PM	Tube furnace set to 0
8/22/2011	2:46:49 PM	H2 valve closed
8/22/2011	2:46:49 PM	BCl3 valve closed
8/22/2011	2:46:49 PM	PH3 valve closed
8/22/2011	2:46:49 PM	SiCl4 pre valve closed
8/22/2011	2:46:49 PM	SiCl4 post valve closed
8/22/2011	2:46:49 PM	Bypass valve closed
8/22/2011	2:46:49 PM	Bubbler valve closed
8/22/2011	2:46:49 PM	Helium valve opened
8/22/2011	2:46:49 PM	Main Vac valve opened
8/22/2011	2:46:49 PM	Helium MFC set to  20.000000
8/22/2011	2:46:49 PM	H2 MFC set to  0.000000
8/22/2011	2:46:49 PM	BCl3 MFC set to  0.000000
8/22/2011	2:46:49 PM	PHl3 MFC set to  0.000000
8/22/2011	2:46:49 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:46:49 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:46:49 PM	Tube furnace set to 0
8/22/2011	2:47:19 PM	Helium valve closed
8/22/2011	2:47:19 PM	H2 valve closed
8/22/2011	2:47:19 PM	BCl3 valve closed
8/22/2011	2:47:19 PM	PH3 valve closed
8/22/2011	2:47:19 PM	SiCl4 pre valve closed
8/22/2011	2:47:19 PM	SiCl4 post valve closed
8/22/2011	2:47:19 PM	Bypass valve closed
8/22/2011	2:47:19 PM	Bubbler valve closed
8/22/2011	2:47:19 PM	Main Vac valve opened
8/22/2011	2:47:19 PM	Helium MFC set to  0.000000
8/22/2011	2:47:19 PM	H2 MFC set to  0.000000
8/22/2011	2:47:19 PM	BCl3 MFC set to  0.000000
8/22/2011	2:47:19 PM	PHl3 MFC set to  0.000000
8/22/2011	2:47:19 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:47:19 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:47:19 PM	Tube furnace set to 0
8/22/2011	2:47:49 PM	H2 valve closed
8/22/2011	2:47:49 PM	BCl3 valve closed
8/22/2011	2:47:49 PM	PH3 valve closed
8/22/2011	2:47:49 PM	SiCl4 pre valve closed
8/22/2011	2:47:49 PM	SiCl4 post valve closed
8/22/2011	2:47:49 PM	Bypass valve closed
8/22/2011	2:47:49 PM	Bubbler valve closed
8/22/2011	2:47:49 PM	Helium valve opened
8/22/2011	2:47:49 PM	Main Vac valve opened
8/22/2011	2:47:49 PM	Helium MFC set to  20.000000
8/22/2011	2:47:49 PM	H2 MFC set to  0.000000
8/22/2011	2:47:49 PM	BCl3 MFC set to  0.000000
8/22/2011	2:47:49 PM	PHl3 MFC set to  0.000000
8/22/2011	2:47:49 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:47:49 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:47:49 PM	Tube furnace set to 0
8/22/2011	2:48:19 PM	Helium valve closed
8/22/2011	2:48:19 PM	H2 valve closed
8/22/2011	2:48:19 PM	BCl3 valve closed
8/22/2011	2:48:19 PM	PH3 valve closed
8/22/2011	2:48:19 PM	SiCl4 pre valve closed
8/22/2011	2:48:19 PM	SiCl4 post valve closed
8/22/2011	2:48:19 PM	Bypass valve closed
8/22/2011	2:48:19 PM	Bubbler valve closed
8/22/2011	2:48:19 PM	Main Vac valve opened
8/22/2011	2:48:19 PM	Helium MFC set to  0.000000
8/22/2011	2:48:19 PM	H2 MFC set to  0.000000
8/22/2011	2:48:19 PM	BCl3 MFC set to  0.000000
8/22/2011	2:48:19 PM	PHl3 MFC set to  0.000000
8/22/2011	2:48:20 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:48:20 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:48:20 PM	Tube furnace set to 0
8/22/2011	2:48:50 PM	H2 valve closed
8/22/2011	2:48:50 PM	BCl3 valve closed
8/22/2011	2:48:50 PM	PH3 valve closed
8/22/2011	2:48:50 PM	SiCl4 pre valve closed
8/22/2011	2:48:50 PM	SiCl4 post valve closed
8/22/2011	2:48:50 PM	Bypass valve closed
8/22/2011	2:48:50 PM	Bubbler valve closed
8/22/2011	2:48:50 PM	Helium valve opened
8/22/2011	2:48:50 PM	Main Vac valve opened
8/22/2011	2:48:50 PM	Helium MFC set to  20.000000
8/22/2011	2:48:50 PM	H2 MFC set to  0.000000
8/22/2011	2:48:50 PM	BCl3 MFC set to  0.000000
8/22/2011	2:48:50 PM	PHl3 MFC set to  0.000000
8/22/2011	2:48:50 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:48:50 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:48:50 PM	Tube furnace set to 0
8/22/2011	2:49:20 PM	Helium valve closed
8/22/2011	2:49:20 PM	H2 valve closed
8/22/2011	2:49:20 PM	BCl3 valve closed
8/22/2011	2:49:20 PM	PH3 valve closed
8/22/2011	2:49:20 PM	SiCl4 pre valve closed
8/22/2011	2:49:20 PM	SiCl4 post valve closed
8/22/2011	2:49:20 PM	Bypass valve closed
8/22/2011	2:49:20 PM	Bubbler valve closed
8/22/2011	2:49:20 PM	Main Vac valve opened
8/22/2011	2:49:20 PM	Helium MFC set to  0.000000
8/22/2011	2:49:20 PM	H2 MFC set to  0.000000
8/22/2011	2:49:20 PM	BCl3 MFC set to  0.000000
8/22/2011	2:49:20 PM	PHl3 MFC set to  0.000000
8/22/2011	2:49:20 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:49:20 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:49:20 PM	Tube furnace set to 0
8/22/2011	2:49:50 PM	H2 valve closed
8/22/2011	2:49:50 PM	BCl3 valve closed
8/22/2011	2:49:50 PM	PH3 valve closed
8/22/2011	2:49:50 PM	SiCl4 pre valve closed
8/22/2011	2:49:50 PM	SiCl4 post valve closed
8/22/2011	2:49:50 PM	Bypass valve closed
8/22/2011	2:49:50 PM	Bubbler valve closed
8/22/2011	2:49:50 PM	Helium valve opened
8/22/2011	2:49:50 PM	Main Vac valve opened
8/22/2011	2:49:50 PM	Helium MFC set to  20.000000
8/22/2011	2:49:50 PM	H2 MFC set to  0.000000
8/22/2011	2:49:50 PM	BCl3 MFC set to  0.000000
8/22/2011	2:49:50 PM	PHl3 MFC set to  0.000000
8/22/2011	2:49:50 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:49:50 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:49:50 PM	Tube furnace set to 0
8/22/2011	2:50:20 PM	Helium valve closed
8/22/2011	2:50:20 PM	H2 valve closed
8/22/2011	2:50:20 PM	BCl3 valve closed
8/22/2011	2:50:20 PM	PH3 valve closed
8/22/2011	2:50:20 PM	SiCl4 pre valve closed
8/22/2011	2:50:20 PM	SiCl4 post valve closed
8/22/2011	2:50:20 PM	Bypass valve closed
8/22/2011	2:50:20 PM	Bubbler valve closed
8/22/2011	2:50:20 PM	Main Vac valve opened
8/22/2011	2:50:20 PM	Helium MFC set to  0.000000
8/22/2011	2:50:20 PM	H2 MFC set to  0.000000
8/22/2011	2:50:20 PM	BCl3 MFC set to  0.000000
8/22/2011	2:50:20 PM	PHl3 MFC set to  0.000000
8/22/2011	2:50:20 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:50:20 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:50:20 PM	Tube furnace set to 0
8/22/2011	2:50:50 PM	H2 valve closed
8/22/2011	2:50:50 PM	BCl3 valve closed
8/22/2011	2:50:50 PM	PH3 valve closed
8/22/2011	2:50:50 PM	SiCl4 pre valve closed
8/22/2011	2:50:50 PM	SiCl4 post valve closed
8/22/2011	2:50:50 PM	Bypass valve closed
8/22/2011	2:50:50 PM	Bubbler valve closed
8/22/2011	2:50:50 PM	Helium valve opened
8/22/2011	2:50:50 PM	Main Vac valve opened
8/22/2011	2:50:50 PM	Helium MFC set to  20.000000
8/22/2011	2:50:50 PM	H2 MFC set to  0.000000
8/22/2011	2:50:50 PM	BCl3 MFC set to  0.000000
8/22/2011	2:50:50 PM	PHl3 MFC set to  0.000000
8/22/2011	2:50:50 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:50:50 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:50:51 PM	Tube furnace set to 0
8/22/2011	2:51:21 PM	Helium valve closed
8/22/2011	2:51:21 PM	H2 valve closed
8/22/2011	2:51:21 PM	BCl3 valve closed
8/22/2011	2:51:21 PM	PH3 valve closed
8/22/2011	2:51:21 PM	SiCl4 pre valve closed
8/22/2011	2:51:21 PM	SiCl4 post valve closed
8/22/2011	2:51:21 PM	Bypass valve closed
8/22/2011	2:51:21 PM	Bubbler valve closed
8/22/2011	2:51:21 PM	Main Vac valve opened
8/22/2011	2:51:21 PM	Helium MFC set to  0.000000
8/22/2011	2:51:21 PM	H2 MFC set to  0.000000
8/22/2011	2:51:21 PM	BCl3 MFC set to  0.000000
8/22/2011	2:51:21 PM	PHl3 MFC set to  0.000000
8/22/2011	2:51:21 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:51:21 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:51:21 PM	Tube furnace set to 0
8/22/2011	2:51:51 PM	H2 valve closed
8/22/2011	2:51:51 PM	BCl3 valve closed
8/22/2011	2:51:51 PM	PH3 valve closed
8/22/2011	2:51:51 PM	SiCl4 pre valve closed
8/22/2011	2:51:51 PM	SiCl4 post valve closed
8/22/2011	2:51:51 PM	Bypass valve closed
8/22/2011	2:51:51 PM	Bubbler valve closed
8/22/2011	2:51:51 PM	Helium valve opened
8/22/2011	2:51:51 PM	Main Vac valve opened
8/22/2011	2:51:51 PM	Helium MFC set to  20.000000
8/22/2011	2:51:51 PM	H2 MFC set to  0.000000
8/22/2011	2:51:51 PM	BCl3 MFC set to  0.000000
8/22/2011	2:51:51 PM	PHl3 MFC set to  0.000000
8/22/2011	2:51:51 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:51:51 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:51:51 PM	Tube furnace set to 0
8/22/2011	2:52:21 PM	Helium valve closed
8/22/2011	2:52:21 PM	H2 valve closed
8/22/2011	2:52:21 PM	BCl3 valve closed
8/22/2011	2:52:21 PM	PH3 valve closed
8/22/2011	2:52:21 PM	SiCl4 pre valve closed
8/22/2011	2:52:21 PM	SiCl4 post valve closed
8/22/2011	2:52:21 PM	Bypass valve closed
8/22/2011	2:52:21 PM	Bubbler valve closed
8/22/2011	2:52:21 PM	Main Vac valve opened
8/22/2011	2:52:21 PM	Helium MFC set to  0.000000
8/22/2011	2:52:21 PM	H2 MFC set to  0.000000
8/22/2011	2:52:21 PM	BCl3 MFC set to  0.000000
8/22/2011	2:52:21 PM	PHl3 MFC set to  0.000000
8/22/2011	2:52:21 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:52:21 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:52:21 PM	Tube furnace set to 0
8/22/2011	2:52:51 PM	H2 valve closed
8/22/2011	2:52:51 PM	BCl3 valve closed
8/22/2011	2:52:51 PM	PH3 valve closed
8/22/2011	2:52:51 PM	SiCl4 pre valve closed
8/22/2011	2:52:51 PM	SiCl4 post valve closed
8/22/2011	2:52:51 PM	Bypass valve closed
8/22/2011	2:52:51 PM	Bubbler valve closed
8/22/2011	2:52:51 PM	Helium valve opened
8/22/2011	2:52:51 PM	Main Vac valve opened
8/22/2011	2:52:51 PM	Helium MFC set to  20.000000
8/22/2011	2:52:51 PM	H2 MFC set to  0.000000
8/22/2011	2:52:51 PM	BCl3 MFC set to  0.000000
8/22/2011	2:52:51 PM	PHl3 MFC set to  0.000000
8/22/2011	2:52:51 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:52:51 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:52:51 PM	Tube furnace set to 0
8/22/2011	2:53:21 PM	Helium valve closed
8/22/2011	2:53:21 PM	H2 valve closed
8/22/2011	2:53:21 PM	BCl3 valve closed
8/22/2011	2:53:21 PM	PH3 valve closed
8/22/2011	2:53:21 PM	SiCl4 pre valve closed
8/22/2011	2:53:21 PM	SiCl4 post valve closed
8/22/2011	2:53:21 PM	Bypass valve closed
8/22/2011	2:53:21 PM	Bubbler valve closed
8/22/2011	2:53:21 PM	Main Vac valve opened
8/22/2011	2:53:21 PM	Helium MFC set to  0.000000
8/22/2011	2:53:21 PM	H2 MFC set to  0.000000
8/22/2011	2:53:21 PM	BCl3 MFC set to  0.000000
8/22/2011	2:53:21 PM	PHl3 MFC set to  0.000000
8/22/2011	2:53:21 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:53:21 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:53:22 PM	Tube furnace set to 0
8/22/2011	2:53:52 PM	H2 valve closed
8/22/2011	2:53:52 PM	BCl3 valve closed
8/22/2011	2:53:52 PM	PH3 valve closed
8/22/2011	2:53:52 PM	SiCl4 pre valve closed
8/22/2011	2:53:52 PM	SiCl4 post valve closed
8/22/2011	2:53:52 PM	Bypass valve closed
8/22/2011	2:53:52 PM	Bubbler valve closed
8/22/2011	2:53:52 PM	Helium valve opened
8/22/2011	2:53:52 PM	Main Vac valve opened
8/22/2011	2:53:52 PM	Helium MFC set to  20.000000
8/22/2011	2:53:52 PM	H2 MFC set to  0.000000
8/22/2011	2:53:52 PM	BCl3 MFC set to  0.000000
8/22/2011	2:53:52 PM	PHl3 MFC set to  0.000000
8/22/2011	2:53:52 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:53:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:53:52 PM	Tube furnace set to 0
8/22/2011	2:54:22 PM	Helium valve closed
8/22/2011	2:54:22 PM	H2 valve closed
8/22/2011	2:54:22 PM	BCl3 valve closed
8/22/2011	2:54:22 PM	PH3 valve closed
8/22/2011	2:54:22 PM	SiCl4 pre valve closed
8/22/2011	2:54:22 PM	SiCl4 post valve closed
8/22/2011	2:54:22 PM	Bypass valve closed
8/22/2011	2:54:22 PM	Bubbler valve closed
8/22/2011	2:54:22 PM	Main Vac valve opened
8/22/2011	2:54:22 PM	Helium MFC set to  0.000000
8/22/2011	2:54:22 PM	H2 MFC set to  0.000000
8/22/2011	2:54:22 PM	BCl3 MFC set to  0.000000
8/22/2011	2:54:22 PM	PHl3 MFC set to  0.000000
8/22/2011	2:54:22 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:54:22 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:54:22 PM	Tube furnace set to 0
8/22/2011	2:54:52 PM	H2 valve closed
8/22/2011	2:54:52 PM	BCl3 valve closed
8/22/2011	2:54:52 PM	PH3 valve closed
8/22/2011	2:54:52 PM	SiCl4 pre valve closed
8/22/2011	2:54:52 PM	SiCl4 post valve closed
8/22/2011	2:54:52 PM	Bypass valve closed
8/22/2011	2:54:52 PM	Bubbler valve closed
8/22/2011	2:54:52 PM	Helium valve opened
8/22/2011	2:54:52 PM	Main Vac valve opened
8/22/2011	2:54:52 PM	Helium MFC set to  20.000000
8/22/2011	2:54:52 PM	H2 MFC set to  0.000000
8/22/2011	2:54:52 PM	BCl3 MFC set to  0.000000
8/22/2011	2:54:52 PM	PHl3 MFC set to  0.000000
8/22/2011	2:54:52 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:54:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:54:52 PM	Tube furnace set to 0
8/22/2011	2:55:22 PM	Helium valve closed
8/22/2011	2:55:22 PM	H2 valve closed
8/22/2011	2:55:22 PM	BCl3 valve closed
8/22/2011	2:55:22 PM	PH3 valve closed
8/22/2011	2:55:22 PM	SiCl4 pre valve closed
8/22/2011	2:55:22 PM	SiCl4 post valve closed
8/22/2011	2:55:22 PM	Bypass valve closed
8/22/2011	2:55:22 PM	Bubbler valve closed
8/22/2011	2:55:22 PM	Main Vac valve opened
8/22/2011	2:55:22 PM	Helium MFC set to  0.000000
8/22/2011	2:55:22 PM	H2 MFC set to  0.000000
8/22/2011	2:55:22 PM	BCl3 MFC set to  0.000000
8/22/2011	2:55:22 PM	PHl3 MFC set to  0.000000
8/22/2011	2:55:22 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:55:22 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:55:22 PM	Tube furnace set to 0
8/22/2011	2:55:52 PM	H2 valve closed
8/22/2011	2:55:52 PM	BCl3 valve closed
8/22/2011	2:55:52 PM	PH3 valve closed
8/22/2011	2:55:52 PM	SiCl4 pre valve closed
8/22/2011	2:55:52 PM	SiCl4 post valve closed
8/22/2011	2:55:52 PM	Bypass valve closed
8/22/2011	2:55:52 PM	Bubbler valve closed
8/22/2011	2:55:52 PM	Helium valve opened
8/22/2011	2:55:52 PM	Main Vac valve opened
8/22/2011	2:55:52 PM	Helium MFC set to  20.000000
8/22/2011	2:55:52 PM	H2 MFC set to  0.000000
8/22/2011	2:55:52 PM	BCl3 MFC set to  0.000000
8/22/2011	2:55:52 PM	PHl3 MFC set to  0.000000
8/22/2011	2:55:52 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:55:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:55:53 PM	Tube furnace set to 0
8/22/2011	2:56:23 PM	Helium valve closed
8/22/2011	2:56:23 PM	H2 valve closed
8/22/2011	2:56:23 PM	BCl3 valve closed
8/22/2011	2:56:23 PM	PH3 valve closed
8/22/2011	2:56:23 PM	SiCl4 pre valve closed
8/22/2011	2:56:23 PM	SiCl4 post valve closed
8/22/2011	2:56:23 PM	Bypass valve closed
8/22/2011	2:56:23 PM	Bubbler valve closed
8/22/2011	2:56:23 PM	Main Vac valve opened
8/22/2011	2:56:23 PM	Helium MFC set to  0.000000
8/22/2011	2:56:23 PM	H2 MFC set to  0.000000
8/22/2011	2:56:23 PM	BCl3 MFC set to  0.000000
8/22/2011	2:56:23 PM	PHl3 MFC set to  0.000000
8/22/2011	2:56:23 PM	SiCl4 MFC set to  0.000000
8/22/2011	2:56:23 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	2:56:23 PM	Tube furnace set to 0
8/22/2011	2:56:24 PM	Run finished at 2:56 PM
8/22/2011	2:56:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	3:08:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/22/2011	3:08:41 PM	Recipe started at 3:08 PM
8/22/2011	3:08:41 PM	Helium valve closed
8/22/2011	3:08:41 PM	H2 valve closed
8/22/2011	3:08:41 PM	BCl3 valve closed
8/22/2011	3:08:41 PM	PH3 valve closed
8/22/2011	3:08:41 PM	SiCl4 pre valve closed
8/22/2011	3:08:41 PM	SiCl4 post valve closed
8/22/2011	3:08:41 PM	Main Vac valve closed
8/22/2011	3:08:41 PM	Bypass valve closed
8/22/2011	3:08:41 PM	Bubbler valve closed
8/22/2011	3:08:41 PM	Helium MFC set to  0.000000
8/22/2011	3:08:41 PM	H2 MFC set to  0.000000
8/22/2011	3:08:41 PM	BCl3 MFC set to  0.000000
8/22/2011	3:08:41 PM	PHl3 MFC set to  0.000000
8/22/2011	3:08:41 PM	SiCl4 MFC set to  0.000000
8/22/2011	3:08:41 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	3:08:41 PM	Tube furnace set to 0
8/22/2011	3:08:41 PM	Run finished at 3:08 PM
8/22/2011	3:08:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/22/2011	3:09:07 PM	Main Vac valve opened
8/22/2011	3:12:40 PM	Recipe started at 3:12 PM
8/22/2011	3:12:40 PM	Helium valve closed
8/22/2011	3:12:40 PM	H2 valve closed
8/22/2011	3:12:40 PM	BCl3 valve closed
8/22/2011	3:12:40 PM	PH3 valve closed
8/22/2011	3:12:40 PM	SiCl4 pre valve closed
8/22/2011	3:12:40 PM	SiCl4 post valve closed
8/22/2011	3:12:40 PM	Main Vac valve closed
8/22/2011	3:12:40 PM	Bypass valve closed
8/22/2011	3:12:40 PM	Bubbler valve closed
8/22/2011	3:12:40 PM	Helium MFC set to  0.000000
8/22/2011	3:12:40 PM	H2 MFC set to  0.000000
8/22/2011	3:12:40 PM	BCl3 MFC set to  0.000000
8/22/2011	3:12:40 PM	PHl3 MFC set to  0.000000
8/22/2011	3:12:40 PM	SiCl4 MFC set to  0.000000
8/22/2011	3:12:40 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	3:12:41 PM	Tube furnace set to 0
8/22/2011	3:12:44 PM	Helium valve closed
8/22/2011	3:12:44 PM	BCl3 valve closed
8/22/2011	3:12:44 PM	PH3 valve closed
8/22/2011	3:12:44 PM	SiCl4 pre valve closed
8/22/2011	3:12:44 PM	SiCl4 post valve closed
8/22/2011	3:12:44 PM	Main Vac valve closed
8/22/2011	3:12:44 PM	Bypass valve closed
8/22/2011	3:12:44 PM	Bubbler valve closed
8/22/2011	3:12:44 PM	H2 valve opened
8/22/2011	3:12:44 PM	Helium MFC set to  0.000000
8/22/2011	3:12:44 PM	H2 MFC set to  500.000000
8/22/2011	3:12:44 PM	BCl3 MFC set to  0.000000
8/22/2011	3:12:44 PM	PHl3 MFC set to  0.000000
8/22/2011	3:12:44 PM	SiCl4 MFC set to  0.000000
8/22/2011	3:12:44 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	3:12:44 PM	Tube furnace set to 0
8/22/2011	3:13:51 PM	Helium valve closed
8/22/2011	3:13:51 PM	BCl3 valve closed
8/22/2011	3:13:51 PM	PH3 valve closed
8/22/2011	3:13:51 PM	SiCl4 pre valve closed
8/22/2011	3:13:51 PM	SiCl4 post valve closed
8/22/2011	3:13:51 PM	Main Vac valve closed
8/22/2011	3:13:51 PM	Bypass valve closed
8/22/2011	3:13:51 PM	H2 valve opened
8/22/2011	3:13:51 PM	Bubbler valve opened
8/22/2011	3:13:51 PM	Helium MFC set to  0.000000
8/22/2011	3:13:51 PM	H2 MFC set to  500.000000
8/22/2011	3:13:51 PM	BCl3 MFC set to  0.000000
8/22/2011	3:13:51 PM	PHl3 MFC set to  0.000000
8/22/2011	3:13:51 PM	SiCl4 MFC set to  0.000000
8/22/2011	3:13:51 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	3:13:51 PM	Tube furnace set to 0
8/22/2011	3:13:52 PM	Helium valve closed
8/22/2011	3:13:52 PM	BCl3 valve closed
8/22/2011	3:13:52 PM	PH3 valve closed
8/22/2011	3:13:52 PM	SiCl4 pre valve closed
8/22/2011	3:13:52 PM	SiCl4 post valve closed
8/22/2011	3:13:52 PM	Main Vac valve closed
8/22/2011	3:13:52 PM	Bypass valve closed
8/22/2011	3:13:52 PM	H2 valve opened
8/22/2011	3:13:52 PM	Bubbler valve opened
8/22/2011	3:13:52 PM	Helium MFC set to  0.000000
8/22/2011	3:13:52 PM	H2 MFC set to  500.000000
8/22/2011	3:13:52 PM	BCl3 MFC set to  0.000000
8/22/2011	3:13:52 PM	PHl3 MFC set to  0.000000
8/22/2011	3:13:52 PM	SiCl4 MFC set to  0.000000
8/22/2011	3:13:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	3:13:52 PM	Tube furnace set to 1000
8/22/2011	3:33:52 PM	Helium valve closed
8/22/2011	3:33:52 PM	PH3 valve closed
8/22/2011	3:33:52 PM	Main Vac valve closed
8/22/2011	3:33:52 PM	Bypass valve closed
8/22/2011	3:33:52 PM	H2 valve opened
8/22/2011	3:33:52 PM	BCl3 valve opened
8/22/2011	3:33:52 PM	SiCl4 pre valve opened
8/22/2011	3:33:52 PM	SiCl4 post valve opened
8/22/2011	3:33:52 PM	Bubbler valve opened
8/22/2011	3:33:52 PM	Helium MFC set to  0.000000
8/22/2011	3:33:52 PM	H2 MFC set to  500.000000
8/22/2011	3:33:52 PM	BCl3 MFC set to  2.500000
8/22/2011	3:33:52 PM	PHl3 MFC set to  0.000000
8/22/2011	3:33:52 PM	SiCl4 MFC set to  50.000000
8/22/2011	3:33:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	3:33:52 PM	Tube furnace set to 1000
8/22/2011	3:38:52 PM	Helium valve closed
8/22/2011	3:38:52 PM	BCl3 valve closed
8/22/2011	3:38:52 PM	PH3 valve closed
8/22/2011	3:38:52 PM	SiCl4 pre valve closed
8/22/2011	3:38:52 PM	SiCl4 post valve closed
8/22/2011	3:38:52 PM	Main Vac valve closed
8/22/2011	3:38:52 PM	Bypass valve closed
8/22/2011	3:38:52 PM	H2 valve opened
8/22/2011	3:38:52 PM	Bubbler valve opened
8/22/2011	3:38:52 PM	Helium MFC set to  0.000000
8/22/2011	3:38:52 PM	H2 MFC set to  500.000000
8/22/2011	3:38:52 PM	BCl3 MFC set to  0.000000
8/22/2011	3:38:52 PM	PHl3 MFC set to  0.000000
8/22/2011	3:38:52 PM	SiCl4 MFC set to  0.000000
8/22/2011	3:38:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	3:38:52 PM	Tube furnace set to 750
8/22/2011	3:43:52 PM	H2 valve closed
8/22/2011	3:43:52 PM	BCl3 valve closed
8/22/2011	3:43:52 PM	PH3 valve closed
8/22/2011	3:43:52 PM	SiCl4 pre valve closed
8/22/2011	3:43:52 PM	SiCl4 post valve closed
8/22/2011	3:43:52 PM	Main Vac valve closed
8/22/2011	3:43:52 PM	Bypass valve closed
8/22/2011	3:43:52 PM	Helium valve opened
8/22/2011	3:43:52 PM	Bubbler valve opened
8/22/2011	3:43:52 PM	Helium MFC set to  500.000000
8/22/2011	3:43:52 PM	H2 MFC set to  0.000000
8/22/2011	3:43:52 PM	BCl3 MFC set to  0.000000
8/22/2011	3:43:52 PM	PHl3 MFC set to  0.000000
8/22/2011	3:43:52 PM	SiCl4 MFC set to  0.000000
8/22/2011	3:43:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	3:43:53 PM	Tube furnace set to 0
8/22/2011	4:17:13 PM	Helium valve closed
8/22/2011	4:17:13 PM	H2 valve closed
8/22/2011	4:17:13 PM	BCl3 valve closed
8/22/2011	4:17:13 PM	PH3 valve closed
8/22/2011	4:17:13 PM	SiCl4 pre valve closed
8/22/2011	4:17:13 PM	SiCl4 post valve closed
8/22/2011	4:17:13 PM	Main Vac valve closed
8/22/2011	4:17:13 PM	Bypass valve closed
8/22/2011	4:17:13 PM	Bubbler valve closed
8/22/2011	4:17:13 PM	Helium MFC set to  0.000000
8/22/2011	4:17:13 PM	H2 MFC set to  0.000000
8/22/2011	4:17:13 PM	BCl3 MFC set to  0.000000
8/22/2011	4:17:13 PM	PHl3 MFC set to  0.000000
8/22/2011	4:17:13 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:17:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:17:13 PM	Tube furnace set to 0
8/22/2011	4:17:14 PM	Run finished at 4:17 PM
8/22/2011	4:32:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	4:32:46 PM	Recipe started at 4:32 PM
8/22/2011	4:32:46 PM	Helium valve closed
8/22/2011	4:32:46 PM	H2 valve closed
8/22/2011	4:32:46 PM	BCl3 valve closed
8/22/2011	4:32:46 PM	PH3 valve closed
8/22/2011	4:32:46 PM	SiCl4 pre valve closed
8/22/2011	4:32:46 PM	SiCl4 post valve closed
8/22/2011	4:32:46 PM	Main Vac valve closed
8/22/2011	4:32:46 PM	Bubbler valve closed
8/22/2011	4:32:46 PM	Bypass valve opened
8/22/2011	4:32:46 PM	Helium MFC set to  0.000000
8/22/2011	4:32:46 PM	H2 MFC set to  0.000000
8/22/2011	4:32:46 PM	BCl3 MFC set to  0.000000
8/22/2011	4:32:46 PM	PHl3 MFC set to  0.000000
8/22/2011	4:32:46 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:32:46 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:32:46 PM	Tube furnace set to 0
8/22/2011	4:33:54 PM	Helium valve closed
8/22/2011	4:33:54 PM	H2 valve closed
8/22/2011	4:33:54 PM	BCl3 valve closed
8/22/2011	4:33:54 PM	PH3 valve closed
8/22/2011	4:33:54 PM	SiCl4 pre valve closed
8/22/2011	4:33:54 PM	SiCl4 post valve closed
8/22/2011	4:33:54 PM	Main Vac valve closed
8/22/2011	4:33:54 PM	Bubbler valve closed
8/22/2011	4:33:54 PM	Bypass valve opened
8/22/2011	4:33:54 PM	Helium MFC set to  0.000000
8/22/2011	4:33:54 PM	H2 MFC set to  0.000000
8/22/2011	4:33:54 PM	BCl3 MFC set to  0.000000
8/22/2011	4:33:54 PM	PHl3 MFC set to  0.000000
8/22/2011	4:33:54 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:33:54 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:33:54 PM	Tube furnace set to 0
8/22/2011	4:34:54 PM	Helium valve closed
8/22/2011	4:34:54 PM	H2 valve closed
8/22/2011	4:34:54 PM	BCl3 valve closed
8/22/2011	4:34:54 PM	PH3 valve closed
8/22/2011	4:34:54 PM	SiCl4 pre valve closed
8/22/2011	4:34:54 PM	SiCl4 post valve closed
8/22/2011	4:34:54 PM	Bypass valve closed
8/22/2011	4:34:54 PM	Bubbler valve closed
8/22/2011	4:34:54 PM	Main Vac valve opened
8/22/2011	4:34:54 PM	Helium MFC set to  0.000000
8/22/2011	4:34:54 PM	H2 MFC set to  0.000000
8/22/2011	4:34:54 PM	BCl3 MFC set to  0.000000
8/22/2011	4:34:54 PM	PHl3 MFC set to  0.000000
8/22/2011	4:34:54 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:34:54 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:34:54 PM	Tube furnace set to 0
8/22/2011	4:34:55 PM	Run finished at 4:34 PM
8/22/2011	4:34:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	4:35:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	4:35:48 PM	Recipe started at 4:35 PM
8/22/2011	4:35:48 PM	Helium valve closed
8/22/2011	4:35:48 PM	H2 valve closed
8/22/2011	4:35:48 PM	BCl3 valve closed
8/22/2011	4:35:48 PM	PH3 valve closed
8/22/2011	4:35:48 PM	SiCl4 pre valve closed
8/22/2011	4:35:48 PM	SiCl4 post valve closed
8/22/2011	4:35:48 PM	Main Vac valve closed
8/22/2011	4:35:48 PM	Bubbler valve closed
8/22/2011	4:35:48 PM	Bypass valve opened
8/22/2011	4:35:48 PM	Helium MFC set to  0.000000
8/22/2011	4:35:48 PM	H2 MFC set to  0.000000
8/22/2011	4:35:48 PM	BCl3 MFC set to  0.000000
8/22/2011	4:35:48 PM	PHl3 MFC set to  0.000000
8/22/2011	4:35:48 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:35:48 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:35:48 PM	Tube furnace set to 0
8/22/2011	4:35:49 PM	Helium valve closed
8/22/2011	4:35:49 PM	H2 valve closed
8/22/2011	4:35:49 PM	BCl3 valve closed
8/22/2011	4:35:49 PM	PH3 valve closed
8/22/2011	4:35:49 PM	SiCl4 pre valve closed
8/22/2011	4:35:49 PM	SiCl4 post valve closed
8/22/2011	4:35:49 PM	Main Vac valve closed
8/22/2011	4:35:49 PM	Bubbler valve closed
8/22/2011	4:35:49 PM	Bypass valve opened
8/22/2011	4:35:49 PM	Helium MFC set to  0.000000
8/22/2011	4:35:49 PM	H2 MFC set to  0.000000
8/22/2011	4:35:49 PM	BCl3 MFC set to  0.000000
8/22/2011	4:35:49 PM	PHl3 MFC set to  0.000000
8/22/2011	4:35:49 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:35:49 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:35:49 PM	Tube furnace set to 0
8/22/2011	4:36:19 PM	Helium valve closed
8/22/2011	4:36:19 PM	H2 valve closed
8/22/2011	4:36:19 PM	BCl3 valve closed
8/22/2011	4:36:19 PM	PH3 valve closed
8/22/2011	4:36:19 PM	SiCl4 pre valve closed
8/22/2011	4:36:19 PM	SiCl4 post valve closed
8/22/2011	4:36:19 PM	Bypass valve closed
8/22/2011	4:36:19 PM	Bubbler valve closed
8/22/2011	4:36:19 PM	Main Vac valve opened
8/22/2011	4:36:19 PM	Helium MFC set to  0.000000
8/22/2011	4:36:19 PM	H2 MFC set to  0.000000
8/22/2011	4:36:19 PM	BCl3 MFC set to  0.000000
8/22/2011	4:36:19 PM	PHl3 MFC set to  0.000000
8/22/2011	4:36:19 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:36:19 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:36:19 PM	Tube furnace set to 0
8/22/2011	4:36:49 PM	H2 valve closed
8/22/2011	4:36:49 PM	BCl3 valve closed
8/22/2011	4:36:49 PM	PH3 valve closed
8/22/2011	4:36:49 PM	SiCl4 pre valve closed
8/22/2011	4:36:49 PM	SiCl4 post valve closed
8/22/2011	4:36:49 PM	Bypass valve closed
8/22/2011	4:36:49 PM	Bubbler valve closed
8/22/2011	4:36:49 PM	Helium valve opened
8/22/2011	4:36:49 PM	Main Vac valve opened
8/22/2011	4:36:49 PM	Helium MFC set to  20.000000
8/22/2011	4:36:49 PM	H2 MFC set to  0.000000
8/22/2011	4:36:49 PM	BCl3 MFC set to  0.000000
8/22/2011	4:36:49 PM	PHl3 MFC set to  0.000000
8/22/2011	4:36:49 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:36:49 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:36:49 PM	Tube furnace set to 0
8/22/2011	4:37:19 PM	Helium valve closed
8/22/2011	4:37:19 PM	H2 valve closed
8/22/2011	4:37:19 PM	BCl3 valve closed
8/22/2011	4:37:19 PM	PH3 valve closed
8/22/2011	4:37:19 PM	SiCl4 pre valve closed
8/22/2011	4:37:19 PM	SiCl4 post valve closed
8/22/2011	4:37:19 PM	Bypass valve closed
8/22/2011	4:37:19 PM	Bubbler valve closed
8/22/2011	4:37:19 PM	Main Vac valve opened
8/22/2011	4:37:19 PM	Helium MFC set to  0.000000
8/22/2011	4:37:19 PM	H2 MFC set to  0.000000
8/22/2011	4:37:19 PM	BCl3 MFC set to  0.000000
8/22/2011	4:37:19 PM	PHl3 MFC set to  0.000000
8/22/2011	4:37:19 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:37:19 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:37:19 PM	Tube furnace set to 0
8/22/2011	4:37:49 PM	H2 valve closed
8/22/2011	4:37:49 PM	BCl3 valve closed
8/22/2011	4:37:49 PM	PH3 valve closed
8/22/2011	4:37:49 PM	SiCl4 pre valve closed
8/22/2011	4:37:49 PM	SiCl4 post valve closed
8/22/2011	4:37:49 PM	Bypass valve closed
8/22/2011	4:37:49 PM	Bubbler valve closed
8/22/2011	4:37:49 PM	Helium valve opened
8/22/2011	4:37:49 PM	Main Vac valve opened
8/22/2011	4:37:49 PM	Helium MFC set to  20.000000
8/22/2011	4:37:49 PM	H2 MFC set to  0.000000
8/22/2011	4:37:49 PM	BCl3 MFC set to  0.000000
8/22/2011	4:37:49 PM	PHl3 MFC set to  0.000000
8/22/2011	4:37:49 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:37:49 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:37:50 PM	Tube furnace set to 0
8/22/2011	4:38:20 PM	Helium valve closed
8/22/2011	4:38:20 PM	H2 valve closed
8/22/2011	4:38:20 PM	BCl3 valve closed
8/22/2011	4:38:20 PM	PH3 valve closed
8/22/2011	4:38:20 PM	SiCl4 pre valve closed
8/22/2011	4:38:20 PM	SiCl4 post valve closed
8/22/2011	4:38:20 PM	Bypass valve closed
8/22/2011	4:38:20 PM	Bubbler valve closed
8/22/2011	4:38:20 PM	Main Vac valve opened
8/22/2011	4:38:20 PM	Helium MFC set to  0.000000
8/22/2011	4:38:20 PM	H2 MFC set to  0.000000
8/22/2011	4:38:20 PM	BCl3 MFC set to  0.000000
8/22/2011	4:38:20 PM	PHl3 MFC set to  0.000000
8/22/2011	4:38:20 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:38:20 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:38:20 PM	Tube furnace set to 0
8/22/2011	4:38:50 PM	H2 valve closed
8/22/2011	4:38:50 PM	BCl3 valve closed
8/22/2011	4:38:50 PM	PH3 valve closed
8/22/2011	4:38:50 PM	SiCl4 pre valve closed
8/22/2011	4:38:50 PM	SiCl4 post valve closed
8/22/2011	4:38:50 PM	Bypass valve closed
8/22/2011	4:38:50 PM	Bubbler valve closed
8/22/2011	4:38:50 PM	Helium valve opened
8/22/2011	4:38:50 PM	Main Vac valve opened
8/22/2011	4:38:50 PM	Helium MFC set to  20.000000
8/22/2011	4:38:50 PM	H2 MFC set to  0.000000
8/22/2011	4:38:50 PM	BCl3 MFC set to  0.000000
8/22/2011	4:38:50 PM	PHl3 MFC set to  0.000000
8/22/2011	4:38:50 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:38:50 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:38:50 PM	Tube furnace set to 0
8/22/2011	4:39:20 PM	Helium valve closed
8/22/2011	4:39:20 PM	H2 valve closed
8/22/2011	4:39:20 PM	BCl3 valve closed
8/22/2011	4:39:20 PM	PH3 valve closed
8/22/2011	4:39:20 PM	SiCl4 pre valve closed
8/22/2011	4:39:20 PM	SiCl4 post valve closed
8/22/2011	4:39:20 PM	Bypass valve closed
8/22/2011	4:39:20 PM	Bubbler valve closed
8/22/2011	4:39:20 PM	Main Vac valve opened
8/22/2011	4:39:20 PM	Helium MFC set to  0.000000
8/22/2011	4:39:20 PM	H2 MFC set to  0.000000
8/22/2011	4:39:20 PM	BCl3 MFC set to  0.000000
8/22/2011	4:39:20 PM	PHl3 MFC set to  0.000000
8/22/2011	4:39:20 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:39:20 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:39:20 PM	Tube furnace set to 0
8/22/2011	4:39:50 PM	H2 valve closed
8/22/2011	4:39:50 PM	BCl3 valve closed
8/22/2011	4:39:50 PM	PH3 valve closed
8/22/2011	4:39:50 PM	SiCl4 pre valve closed
8/22/2011	4:39:50 PM	SiCl4 post valve closed
8/22/2011	4:39:50 PM	Bypass valve closed
8/22/2011	4:39:50 PM	Bubbler valve closed
8/22/2011	4:39:50 PM	Helium valve opened
8/22/2011	4:39:50 PM	Main Vac valve opened
8/22/2011	4:39:50 PM	Helium MFC set to  20.000000
8/22/2011	4:39:50 PM	H2 MFC set to  0.000000
8/22/2011	4:39:50 PM	BCl3 MFC set to  0.000000
8/22/2011	4:39:50 PM	PHl3 MFC set to  0.000000
8/22/2011	4:39:50 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:39:50 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:39:50 PM	Tube furnace set to 0
8/22/2011	4:40:20 PM	Helium valve closed
8/22/2011	4:40:20 PM	H2 valve closed
8/22/2011	4:40:20 PM	BCl3 valve closed
8/22/2011	4:40:20 PM	PH3 valve closed
8/22/2011	4:40:20 PM	SiCl4 pre valve closed
8/22/2011	4:40:20 PM	SiCl4 post valve closed
8/22/2011	4:40:20 PM	Bypass valve closed
8/22/2011	4:40:20 PM	Bubbler valve closed
8/22/2011	4:40:20 PM	Main Vac valve opened
8/22/2011	4:40:20 PM	Helium MFC set to  0.000000
8/22/2011	4:40:20 PM	H2 MFC set to  0.000000
8/22/2011	4:40:21 PM	BCl3 MFC set to  0.000000
8/22/2011	4:40:21 PM	PHl3 MFC set to  0.000000
8/22/2011	4:40:21 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:40:21 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:40:21 PM	Tube furnace set to 0
8/22/2011	4:40:51 PM	H2 valve closed
8/22/2011	4:40:51 PM	BCl3 valve closed
8/22/2011	4:40:51 PM	PH3 valve closed
8/22/2011	4:40:51 PM	SiCl4 pre valve closed
8/22/2011	4:40:51 PM	SiCl4 post valve closed
8/22/2011	4:40:51 PM	Bypass valve closed
8/22/2011	4:40:51 PM	Bubbler valve closed
8/22/2011	4:40:51 PM	Helium valve opened
8/22/2011	4:40:51 PM	Main Vac valve opened
8/22/2011	4:40:51 PM	Helium MFC set to  20.000000
8/22/2011	4:40:51 PM	H2 MFC set to  0.000000
8/22/2011	4:40:51 PM	BCl3 MFC set to  0.000000
8/22/2011	4:40:51 PM	PHl3 MFC set to  0.000000
8/22/2011	4:40:51 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:40:51 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:40:51 PM	Tube furnace set to 0
8/22/2011	4:41:21 PM	Helium valve closed
8/22/2011	4:41:21 PM	H2 valve closed
8/22/2011	4:41:21 PM	BCl3 valve closed
8/22/2011	4:41:21 PM	PH3 valve closed
8/22/2011	4:41:21 PM	SiCl4 pre valve closed
8/22/2011	4:41:21 PM	SiCl4 post valve closed
8/22/2011	4:41:21 PM	Bypass valve closed
8/22/2011	4:41:21 PM	Bubbler valve closed
8/22/2011	4:41:21 PM	Main Vac valve opened
8/22/2011	4:41:21 PM	Helium MFC set to  0.000000
8/22/2011	4:41:21 PM	H2 MFC set to  0.000000
8/22/2011	4:41:21 PM	BCl3 MFC set to  0.000000
8/22/2011	4:41:21 PM	PHl3 MFC set to  0.000000
8/22/2011	4:41:21 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:41:21 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:41:21 PM	Tube furnace set to 0
8/22/2011	4:41:51 PM	H2 valve closed
8/22/2011	4:41:51 PM	BCl3 valve closed
8/22/2011	4:41:51 PM	PH3 valve closed
8/22/2011	4:41:51 PM	SiCl4 pre valve closed
8/22/2011	4:41:51 PM	SiCl4 post valve closed
8/22/2011	4:41:51 PM	Bypass valve closed
8/22/2011	4:41:51 PM	Bubbler valve closed
8/22/2011	4:41:51 PM	Helium valve opened
8/22/2011	4:41:51 PM	Main Vac valve opened
8/22/2011	4:41:51 PM	Helium MFC set to  20.000000
8/22/2011	4:41:51 PM	H2 MFC set to  0.000000
8/22/2011	4:41:51 PM	BCl3 MFC set to  0.000000
8/22/2011	4:41:51 PM	PHl3 MFC set to  0.000000
8/22/2011	4:41:51 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:41:51 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:41:51 PM	Tube furnace set to 0
8/22/2011	4:42:21 PM	Helium valve closed
8/22/2011	4:42:21 PM	H2 valve closed
8/22/2011	4:42:21 PM	BCl3 valve closed
8/22/2011	4:42:21 PM	PH3 valve closed
8/22/2011	4:42:21 PM	SiCl4 pre valve closed
8/22/2011	4:42:21 PM	SiCl4 post valve closed
8/22/2011	4:42:21 PM	Bypass valve closed
8/22/2011	4:42:21 PM	Bubbler valve closed
8/22/2011	4:42:21 PM	Main Vac valve opened
8/22/2011	4:42:21 PM	Helium MFC set to  0.000000
8/22/2011	4:42:21 PM	H2 MFC set to  0.000000
8/22/2011	4:42:21 PM	BCl3 MFC set to  0.000000
8/22/2011	4:42:21 PM	PHl3 MFC set to  0.000000
8/22/2011	4:42:21 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:42:21 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:42:22 PM	Tube furnace set to 0
8/22/2011	4:42:52 PM	H2 valve closed
8/22/2011	4:42:52 PM	BCl3 valve closed
8/22/2011	4:42:52 PM	PH3 valve closed
8/22/2011	4:42:52 PM	SiCl4 pre valve closed
8/22/2011	4:42:52 PM	SiCl4 post valve closed
8/22/2011	4:42:52 PM	Bypass valve closed
8/22/2011	4:42:52 PM	Bubbler valve closed
8/22/2011	4:42:52 PM	Helium valve opened
8/22/2011	4:42:52 PM	Main Vac valve opened
8/22/2011	4:42:52 PM	Helium MFC set to  20.000000
8/22/2011	4:42:52 PM	H2 MFC set to  0.000000
8/22/2011	4:42:52 PM	BCl3 MFC set to  0.000000
8/22/2011	4:42:52 PM	PHl3 MFC set to  0.000000
8/22/2011	4:42:52 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:42:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:42:52 PM	Tube furnace set to 0
8/22/2011	4:43:22 PM	Helium valve closed
8/22/2011	4:43:22 PM	H2 valve closed
8/22/2011	4:43:22 PM	BCl3 valve closed
8/22/2011	4:43:22 PM	PH3 valve closed
8/22/2011	4:43:22 PM	SiCl4 pre valve closed
8/22/2011	4:43:22 PM	SiCl4 post valve closed
8/22/2011	4:43:22 PM	Bypass valve closed
8/22/2011	4:43:22 PM	Bubbler valve closed
8/22/2011	4:43:22 PM	Main Vac valve opened
8/22/2011	4:43:22 PM	Helium MFC set to  0.000000
8/22/2011	4:43:22 PM	H2 MFC set to  0.000000
8/22/2011	4:43:22 PM	BCl3 MFC set to  0.000000
8/22/2011	4:43:22 PM	PHl3 MFC set to  0.000000
8/22/2011	4:43:22 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:43:22 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:43:22 PM	Tube furnace set to 0
8/22/2011	4:43:52 PM	H2 valve closed
8/22/2011	4:43:52 PM	BCl3 valve closed
8/22/2011	4:43:52 PM	PH3 valve closed
8/22/2011	4:43:52 PM	SiCl4 pre valve closed
8/22/2011	4:43:52 PM	SiCl4 post valve closed
8/22/2011	4:43:52 PM	Bypass valve closed
8/22/2011	4:43:52 PM	Bubbler valve closed
8/22/2011	4:43:52 PM	Helium valve opened
8/22/2011	4:43:52 PM	Main Vac valve opened
8/22/2011	4:43:52 PM	Helium MFC set to  20.000000
8/22/2011	4:43:52 PM	H2 MFC set to  0.000000
8/22/2011	4:43:52 PM	BCl3 MFC set to  0.000000
8/22/2011	4:43:52 PM	PHl3 MFC set to  0.000000
8/22/2011	4:43:52 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:43:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:43:52 PM	Tube furnace set to 0
8/22/2011	4:44:22 PM	Helium valve closed
8/22/2011	4:44:22 PM	H2 valve closed
8/22/2011	4:44:22 PM	BCl3 valve closed
8/22/2011	4:44:22 PM	PH3 valve closed
8/22/2011	4:44:22 PM	SiCl4 pre valve closed
8/22/2011	4:44:22 PM	SiCl4 post valve closed
8/22/2011	4:44:22 PM	Bypass valve closed
8/22/2011	4:44:22 PM	Bubbler valve closed
8/22/2011	4:44:22 PM	Main Vac valve opened
8/22/2011	4:44:22 PM	Helium MFC set to  0.000000
8/22/2011	4:44:22 PM	H2 MFC set to  0.000000
8/22/2011	4:44:22 PM	BCl3 MFC set to  0.000000
8/22/2011	4:44:22 PM	PHl3 MFC set to  0.000000
8/22/2011	4:44:22 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:44:22 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:44:22 PM	Tube furnace set to 0
8/22/2011	4:44:52 PM	H2 valve closed
8/22/2011	4:44:52 PM	BCl3 valve closed
8/22/2011	4:44:52 PM	PH3 valve closed
8/22/2011	4:44:52 PM	SiCl4 pre valve closed
8/22/2011	4:44:52 PM	SiCl4 post valve closed
8/22/2011	4:44:52 PM	Bypass valve closed
8/22/2011	4:44:52 PM	Bubbler valve closed
8/22/2011	4:44:52 PM	Helium valve opened
8/22/2011	4:44:52 PM	Main Vac valve opened
8/22/2011	4:44:52 PM	Helium MFC set to  20.000000
8/22/2011	4:44:52 PM	H2 MFC set to  0.000000
8/22/2011	4:44:52 PM	BCl3 MFC set to  0.000000
8/22/2011	4:44:52 PM	PHl3 MFC set to  0.000000
8/22/2011	4:44:52 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:44:52 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:44:53 PM	Tube furnace set to 0
8/22/2011	4:45:23 PM	Helium valve closed
8/22/2011	4:45:23 PM	H2 valve closed
8/22/2011	4:45:23 PM	BCl3 valve closed
8/22/2011	4:45:23 PM	PH3 valve closed
8/22/2011	4:45:23 PM	SiCl4 pre valve closed
8/22/2011	4:45:23 PM	SiCl4 post valve closed
8/22/2011	4:45:23 PM	Bypass valve closed
8/22/2011	4:45:23 PM	Bubbler valve closed
8/22/2011	4:45:23 PM	Main Vac valve opened
8/22/2011	4:45:23 PM	Helium MFC set to  0.000000
8/22/2011	4:45:23 PM	H2 MFC set to  0.000000
8/22/2011	4:45:23 PM	BCl3 MFC set to  0.000000
8/22/2011	4:45:23 PM	PHl3 MFC set to  0.000000
8/22/2011	4:45:23 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:45:23 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:45:23 PM	Tube furnace set to 0
8/22/2011	4:45:53 PM	H2 valve closed
8/22/2011	4:45:53 PM	BCl3 valve closed
8/22/2011	4:45:53 PM	PH3 valve closed
8/22/2011	4:45:53 PM	SiCl4 pre valve closed
8/22/2011	4:45:53 PM	SiCl4 post valve closed
8/22/2011	4:45:53 PM	Bypass valve closed
8/22/2011	4:45:53 PM	Bubbler valve closed
8/22/2011	4:45:53 PM	Helium valve opened
8/22/2011	4:45:53 PM	Main Vac valve opened
8/22/2011	4:45:53 PM	Helium MFC set to  20.000000
8/22/2011	4:45:53 PM	H2 MFC set to  0.000000
8/22/2011	4:45:53 PM	BCl3 MFC set to  0.000000
8/22/2011	4:45:53 PM	PHl3 MFC set to  0.000000
8/22/2011	4:45:53 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:45:53 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:45:53 PM	Tube furnace set to 0
8/22/2011	4:46:23 PM	Helium valve closed
8/22/2011	4:46:23 PM	H2 valve closed
8/22/2011	4:46:23 PM	BCl3 valve closed
8/22/2011	4:46:23 PM	PH3 valve closed
8/22/2011	4:46:23 PM	SiCl4 pre valve closed
8/22/2011	4:46:23 PM	SiCl4 post valve closed
8/22/2011	4:46:23 PM	Bypass valve closed
8/22/2011	4:46:23 PM	Bubbler valve closed
8/22/2011	4:46:23 PM	Main Vac valve opened
8/22/2011	4:46:23 PM	Helium MFC set to  0.000000
8/22/2011	4:46:23 PM	H2 MFC set to  0.000000
8/22/2011	4:46:23 PM	BCl3 MFC set to  0.000000
8/22/2011	4:46:23 PM	PHl3 MFC set to  0.000000
8/22/2011	4:46:23 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:46:23 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:46:23 PM	Tube furnace set to 0
8/22/2011	4:46:24 PM	Run finished at 4:46 PM
8/22/2011	4:46:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	4:59:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/22/2011	4:59:54 PM	Recipe started at 4:59 PM
8/22/2011	4:59:54 PM	Helium valve closed
8/22/2011	4:59:55 PM	H2 valve closed
8/22/2011	4:59:55 PM	BCl3 valve closed
8/22/2011	4:59:55 PM	PH3 valve closed
8/22/2011	4:59:55 PM	SiCl4 pre valve closed
8/22/2011	4:59:55 PM	SiCl4 post valve closed
8/22/2011	4:59:55 PM	Main Vac valve closed
8/22/2011	4:59:55 PM	Bypass valve closed
8/22/2011	4:59:55 PM	Bubbler valve closed
8/22/2011	4:59:55 PM	Helium MFC set to  0.000000
8/22/2011	4:59:55 PM	H2 MFC set to  0.000000
8/22/2011	4:59:55 PM	BCl3 MFC set to  0.000000
8/22/2011	4:59:55 PM	PHl3 MFC set to  0.000000
8/22/2011	4:59:55 PM	SiCl4 MFC set to  0.000000
8/22/2011	4:59:55 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	4:59:55 PM	Tube furnace set to 0
8/22/2011	4:59:55 PM	Run finished at 4:59 PM
8/22/2011	4:59:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/22/2011	5:00:35 PM	Main Vac valve opened
8/22/2011	5:05:53 PM	Recipe started at 5:05 PM
8/22/2011	5:05:53 PM	Helium valve closed
8/22/2011	5:05:53 PM	H2 valve closed
8/22/2011	5:05:54 PM	BCl3 valve closed
8/22/2011	5:05:54 PM	PH3 valve closed
8/22/2011	5:05:54 PM	SiCl4 pre valve closed
8/22/2011	5:05:54 PM	SiCl4 post valve closed
8/22/2011	5:05:54 PM	Main Vac valve closed
8/22/2011	5:05:54 PM	Bypass valve closed
8/22/2011	5:05:54 PM	Bubbler valve closed
8/22/2011	5:05:54 PM	Helium MFC set to  0.000000
8/22/2011	5:05:54 PM	H2 MFC set to  0.000000
8/22/2011	5:05:54 PM	BCl3 MFC set to  0.000000
8/22/2011	5:05:54 PM	PHl3 MFC set to  0.000000
8/22/2011	5:05:54 PM	SiCl4 MFC set to  0.000000
8/22/2011	5:05:54 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	5:05:54 PM	Tube furnace set to 0
8/22/2011	5:05:57 PM	Helium valve closed
8/22/2011	5:05:57 PM	BCl3 valve closed
8/22/2011	5:05:57 PM	PH3 valve closed
8/22/2011	5:05:57 PM	SiCl4 pre valve closed
8/22/2011	5:05:57 PM	SiCl4 post valve closed
8/22/2011	5:05:57 PM	Main Vac valve closed
8/22/2011	5:05:57 PM	Bypass valve closed
8/22/2011	5:05:57 PM	Bubbler valve closed
8/22/2011	5:05:57 PM	H2 valve opened
8/22/2011	5:05:57 PM	Helium MFC set to  0.000000
8/22/2011	5:05:57 PM	H2 MFC set to  500.000000
8/22/2011	5:05:57 PM	BCl3 MFC set to  0.000000
8/22/2011	5:05:57 PM	PHl3 MFC set to  0.000000
8/22/2011	5:05:57 PM	SiCl4 MFC set to  0.000000
8/22/2011	5:05:57 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	5:05:57 PM	Tube furnace set to 0
8/22/2011	5:07:01 PM	Helium valve closed
8/22/2011	5:07:01 PM	BCl3 valve closed
8/22/2011	5:07:01 PM	PH3 valve closed
8/22/2011	5:07:01 PM	SiCl4 pre valve closed
8/22/2011	5:07:01 PM	SiCl4 post valve closed
8/22/2011	5:07:01 PM	Main Vac valve closed
8/22/2011	5:07:01 PM	Bypass valve closed
8/22/2011	5:07:01 PM	H2 valve opened
8/22/2011	5:07:01 PM	Bubbler valve opened
8/22/2011	5:07:01 PM	Helium MFC set to  0.000000
8/22/2011	5:07:01 PM	H2 MFC set to  500.000000
8/22/2011	5:07:01 PM	BCl3 MFC set to  0.000000
8/22/2011	5:07:01 PM	PHl3 MFC set to  0.000000
8/22/2011	5:07:01 PM	SiCl4 MFC set to  0.000000
8/22/2011	5:07:01 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	5:07:01 PM	Tube furnace set to 0
8/22/2011	5:07:02 PM	Helium valve closed
8/22/2011	5:07:02 PM	BCl3 valve closed
8/22/2011	5:07:02 PM	PH3 valve closed
8/22/2011	5:07:02 PM	SiCl4 pre valve closed
8/22/2011	5:07:02 PM	SiCl4 post valve closed
8/22/2011	5:07:02 PM	Main Vac valve closed
8/22/2011	5:07:02 PM	Bypass valve closed
8/22/2011	5:07:02 PM	H2 valve opened
8/22/2011	5:07:02 PM	Bubbler valve opened
8/22/2011	5:07:02 PM	Helium MFC set to  0.000000
8/22/2011	5:07:02 PM	H2 MFC set to  500.000000
8/22/2011	5:07:02 PM	BCl3 MFC set to  0.000000
8/22/2011	5:07:02 PM	PHl3 MFC set to  0.000000
8/22/2011	5:07:02 PM	SiCl4 MFC set to  0.000000
8/22/2011	5:07:02 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	5:07:03 PM	Tube furnace set to 1000
8/22/2011	5:27:03 PM	Helium valve closed
8/22/2011	5:27:03 PM	PH3 valve closed
8/22/2011	5:27:03 PM	Main Vac valve closed
8/22/2011	5:27:03 PM	Bypass valve closed
8/22/2011	5:27:03 PM	H2 valve opened
8/22/2011	5:27:03 PM	BCl3 valve opened
8/22/2011	5:27:03 PM	SiCl4 pre valve opened
8/22/2011	5:27:03 PM	SiCl4 post valve opened
8/22/2011	5:27:03 PM	Bubbler valve opened
8/22/2011	5:27:03 PM	Helium MFC set to  0.000000
8/22/2011	5:27:03 PM	H2 MFC set to  500.000000
8/22/2011	5:27:03 PM	BCl3 MFC set to  2.500000
8/22/2011	5:27:03 PM	PHl3 MFC set to  0.000000
8/22/2011	5:27:03 PM	SiCl4 MFC set to  50.000000
8/22/2011	5:27:03 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	5:27:03 PM	Tube furnace set to 1000
8/22/2011	5:29:33 PM	Helium valve closed
8/22/2011	5:29:33 PM	BCl3 valve closed
8/22/2011	5:29:33 PM	PH3 valve closed
8/22/2011	5:29:33 PM	SiCl4 pre valve closed
8/22/2011	5:29:33 PM	SiCl4 post valve closed
8/22/2011	5:29:33 PM	Main Vac valve closed
8/22/2011	5:29:33 PM	Bypass valve closed
8/22/2011	5:29:33 PM	H2 valve opened
8/22/2011	5:29:33 PM	Bubbler valve opened
8/22/2011	5:29:33 PM	Helium MFC set to  0.000000
8/22/2011	5:29:33 PM	H2 MFC set to  500.000000
8/22/2011	5:29:33 PM	BCl3 MFC set to  0.000000
8/22/2011	5:29:33 PM	PHl3 MFC set to  0.000000
8/22/2011	5:29:33 PM	SiCl4 MFC set to  0.000000
8/22/2011	5:29:33 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	5:29:33 PM	Tube furnace set to 750
8/22/2011	5:34:33 PM	H2 valve closed
8/22/2011	5:34:33 PM	BCl3 valve closed
8/22/2011	5:34:33 PM	PH3 valve closed
8/22/2011	5:34:33 PM	SiCl4 pre valve closed
8/22/2011	5:34:33 PM	SiCl4 post valve closed
8/22/2011	5:34:33 PM	Main Vac valve closed
8/22/2011	5:34:33 PM	Bypass valve closed
8/22/2011	5:34:33 PM	Helium valve opened
8/22/2011	5:34:33 PM	Bubbler valve opened
8/22/2011	5:34:33 PM	Helium MFC set to  500.000000
8/22/2011	5:34:33 PM	H2 MFC set to  0.000000
8/22/2011	5:34:33 PM	BCl3 MFC set to  0.000000
8/22/2011	5:34:33 PM	PHl3 MFC set to  0.000000
8/22/2011	5:34:33 PM	SiCl4 MFC set to  0.000000
8/22/2011	5:34:33 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	5:34:33 PM	Tube furnace set to 0
8/22/2011	6:07:53 PM	Helium valve closed
8/22/2011	6:07:53 PM	H2 valve closed
8/22/2011	6:07:53 PM	BCl3 valve closed
8/22/2011	6:07:53 PM	PH3 valve closed
8/22/2011	6:07:53 PM	SiCl4 pre valve closed
8/22/2011	6:07:53 PM	SiCl4 post valve closed
8/22/2011	6:07:53 PM	Main Vac valve closed
8/22/2011	6:07:53 PM	Bypass valve closed
8/22/2011	6:07:53 PM	Bubbler valve closed
8/22/2011	6:07:53 PM	Helium MFC set to  0.000000
8/22/2011	6:07:53 PM	H2 MFC set to  0.000000
8/22/2011	6:07:53 PM	BCl3 MFC set to  0.000000
8/22/2011	6:07:53 PM	PHl3 MFC set to  0.000000
8/22/2011	6:07:53 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:07:53 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:07:53 PM	Tube furnace set to 0
8/22/2011	6:07:54 PM	Run finished at 6:07 PM
8/22/2011	6:18:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	6:18:42 PM	Recipe started at 6:18 PM
8/22/2011	6:18:42 PM	Helium valve closed
8/22/2011	6:18:42 PM	H2 valve closed
8/22/2011	6:18:42 PM	BCl3 valve closed
8/22/2011	6:18:42 PM	PH3 valve closed
8/22/2011	6:18:42 PM	SiCl4 pre valve closed
8/22/2011	6:18:42 PM	SiCl4 post valve closed
8/22/2011	6:18:42 PM	Main Vac valve closed
8/22/2011	6:18:42 PM	Bubbler valve closed
8/22/2011	6:18:42 PM	Bypass valve opened
8/22/2011	6:18:42 PM	Helium MFC set to  0.000000
8/22/2011	6:18:42 PM	H2 MFC set to  0.000000
8/22/2011	6:18:42 PM	BCl3 MFC set to  0.000000
8/22/2011	6:18:42 PM	PHl3 MFC set to  0.000000
8/22/2011	6:18:42 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:18:42 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:18:42 PM	Tube furnace set to 0
8/22/2011	6:19:46 PM	Helium valve closed
8/22/2011	6:19:46 PM	H2 valve closed
8/22/2011	6:19:46 PM	BCl3 valve closed
8/22/2011	6:19:46 PM	PH3 valve closed
8/22/2011	6:19:46 PM	SiCl4 pre valve closed
8/22/2011	6:19:46 PM	SiCl4 post valve closed
8/22/2011	6:19:46 PM	Main Vac valve closed
8/22/2011	6:19:46 PM	Bubbler valve closed
8/22/2011	6:19:46 PM	Bypass valve opened
8/22/2011	6:19:46 PM	Helium MFC set to  0.000000
8/22/2011	6:19:46 PM	H2 MFC set to  0.000000
8/22/2011	6:19:46 PM	BCl3 MFC set to  0.000000
8/22/2011	6:19:46 PM	PHl3 MFC set to  0.000000
8/22/2011	6:19:46 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:19:46 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:19:46 PM	Tube furnace set to 0
8/22/2011	6:20:46 PM	Helium valve closed
8/22/2011	6:20:46 PM	H2 valve closed
8/22/2011	6:20:46 PM	BCl3 valve closed
8/22/2011	6:20:46 PM	PH3 valve closed
8/22/2011	6:20:46 PM	SiCl4 pre valve closed
8/22/2011	6:20:46 PM	SiCl4 post valve closed
8/22/2011	6:20:46 PM	Bypass valve closed
8/22/2011	6:20:46 PM	Bubbler valve closed
8/22/2011	6:20:46 PM	Main Vac valve opened
8/22/2011	6:20:46 PM	Helium MFC set to  0.000000
8/22/2011	6:20:46 PM	H2 MFC set to  0.000000
8/22/2011	6:20:46 PM	BCl3 MFC set to  0.000000
8/22/2011	6:20:46 PM	PHl3 MFC set to  0.000000
8/22/2011	6:20:46 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:20:46 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:20:46 PM	Tube furnace set to 0
8/22/2011	6:20:47 PM	Run finished at 6:20 PM
8/22/2011	6:20:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	6:21:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	6:21:29 PM	Recipe started at 6:21 PM
8/22/2011	6:21:29 PM	Helium valve closed
8/22/2011	6:21:29 PM	H2 valve closed
8/22/2011	6:21:29 PM	BCl3 valve closed
8/22/2011	6:21:29 PM	PH3 valve closed
8/22/2011	6:21:29 PM	SiCl4 pre valve closed
8/22/2011	6:21:29 PM	SiCl4 post valve closed
8/22/2011	6:21:29 PM	Main Vac valve closed
8/22/2011	6:21:29 PM	Bubbler valve closed
8/22/2011	6:21:29 PM	Bypass valve opened
8/22/2011	6:21:29 PM	Helium MFC set to  0.000000
8/22/2011	6:21:29 PM	H2 MFC set to  0.000000
8/22/2011	6:21:29 PM	BCl3 MFC set to  0.000000
8/22/2011	6:21:29 PM	PHl3 MFC set to  0.000000
8/22/2011	6:21:29 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:21:29 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:21:29 PM	Tube furnace set to 0
8/22/2011	6:21:29 PM	Helium valve closed
8/22/2011	6:21:29 PM	H2 valve closed
8/22/2011	6:21:29 PM	BCl3 valve closed
8/22/2011	6:21:29 PM	PH3 valve closed
8/22/2011	6:21:29 PM	SiCl4 pre valve closed
8/22/2011	6:21:29 PM	SiCl4 post valve closed
8/22/2011	6:21:29 PM	Main Vac valve closed
8/22/2011	6:21:29 PM	Bubbler valve closed
8/22/2011	6:21:29 PM	Bypass valve opened
8/22/2011	6:21:29 PM	Helium MFC set to  0.000000
8/22/2011	6:21:29 PM	H2 MFC set to  0.000000
8/22/2011	6:21:29 PM	BCl3 MFC set to  0.000000
8/22/2011	6:21:29 PM	PHl3 MFC set to  0.000000
8/22/2011	6:21:29 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:21:29 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:21:30 PM	Tube furnace set to 0
8/22/2011	6:22:00 PM	Helium valve closed
8/22/2011	6:22:00 PM	H2 valve closed
8/22/2011	6:22:00 PM	BCl3 valve closed
8/22/2011	6:22:00 PM	PH3 valve closed
8/22/2011	6:22:00 PM	SiCl4 pre valve closed
8/22/2011	6:22:00 PM	SiCl4 post valve closed
8/22/2011	6:22:00 PM	Bypass valve closed
8/22/2011	6:22:00 PM	Bubbler valve closed
8/22/2011	6:22:00 PM	Main Vac valve opened
8/22/2011	6:22:00 PM	Helium MFC set to  0.000000
8/22/2011	6:22:00 PM	H2 MFC set to  0.000000
8/22/2011	6:22:00 PM	BCl3 MFC set to  0.000000
8/22/2011	6:22:00 PM	PHl3 MFC set to  0.000000
8/22/2011	6:22:00 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:22:00 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:22:00 PM	Tube furnace set to 0
8/22/2011	6:22:30 PM	H2 valve closed
8/22/2011	6:22:30 PM	BCl3 valve closed
8/22/2011	6:22:30 PM	PH3 valve closed
8/22/2011	6:22:30 PM	SiCl4 pre valve closed
8/22/2011	6:22:30 PM	SiCl4 post valve closed
8/22/2011	6:22:30 PM	Bypass valve closed
8/22/2011	6:22:30 PM	Bubbler valve closed
8/22/2011	6:22:30 PM	Helium valve opened
8/22/2011	6:22:30 PM	Main Vac valve opened
8/22/2011	6:22:30 PM	Helium MFC set to  20.000000
8/22/2011	6:22:30 PM	H2 MFC set to  0.000000
8/22/2011	6:22:30 PM	BCl3 MFC set to  0.000000
8/22/2011	6:22:30 PM	PHl3 MFC set to  0.000000
8/22/2011	6:22:30 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:22:30 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:22:30 PM	Tube furnace set to 0
8/22/2011	6:23:00 PM	Helium valve closed
8/22/2011	6:23:00 PM	H2 valve closed
8/22/2011	6:23:00 PM	BCl3 valve closed
8/22/2011	6:23:00 PM	PH3 valve closed
8/22/2011	6:23:00 PM	SiCl4 pre valve closed
8/22/2011	6:23:00 PM	SiCl4 post valve closed
8/22/2011	6:23:00 PM	Bypass valve closed
8/22/2011	6:23:00 PM	Bubbler valve closed
8/22/2011	6:23:00 PM	Main Vac valve opened
8/22/2011	6:23:00 PM	Helium MFC set to  0.000000
8/22/2011	6:23:00 PM	H2 MFC set to  0.000000
8/22/2011	6:23:00 PM	BCl3 MFC set to  0.000000
8/22/2011	6:23:00 PM	PHl3 MFC set to  0.000000
8/22/2011	6:23:00 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:23:00 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:23:00 PM	Tube furnace set to 0
8/22/2011	6:23:30 PM	H2 valve closed
8/22/2011	6:23:30 PM	BCl3 valve closed
8/22/2011	6:23:30 PM	PH3 valve closed
8/22/2011	6:23:30 PM	SiCl4 pre valve closed
8/22/2011	6:23:30 PM	SiCl4 post valve closed
8/22/2011	6:23:30 PM	Bypass valve closed
8/22/2011	6:23:30 PM	Bubbler valve closed
8/22/2011	6:23:30 PM	Helium valve opened
8/22/2011	6:23:30 PM	Main Vac valve opened
8/22/2011	6:23:30 PM	Helium MFC set to  20.000000
8/22/2011	6:23:30 PM	H2 MFC set to  0.000000
8/22/2011	6:23:30 PM	BCl3 MFC set to  0.000000
8/22/2011	6:23:30 PM	PHl3 MFC set to  0.000000
8/22/2011	6:23:30 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:23:30 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:23:30 PM	Tube furnace set to 0
8/22/2011	6:24:00 PM	Helium valve closed
8/22/2011	6:24:00 PM	H2 valve closed
8/22/2011	6:24:00 PM	BCl3 valve closed
8/22/2011	6:24:00 PM	PH3 valve closed
8/22/2011	6:24:00 PM	SiCl4 pre valve closed
8/22/2011	6:24:00 PM	SiCl4 post valve closed
8/22/2011	6:24:00 PM	Bypass valve closed
8/22/2011	6:24:00 PM	Bubbler valve closed
8/22/2011	6:24:00 PM	Main Vac valve opened
8/22/2011	6:24:00 PM	Helium MFC set to  0.000000
8/22/2011	6:24:00 PM	H2 MFC set to  0.000000
8/22/2011	6:24:00 PM	BCl3 MFC set to  0.000000
8/22/2011	6:24:00 PM	PHl3 MFC set to  0.000000
8/22/2011	6:24:00 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:24:00 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:24:01 PM	Tube furnace set to 0
8/22/2011	6:24:31 PM	H2 valve closed
8/22/2011	6:24:31 PM	BCl3 valve closed
8/22/2011	6:24:31 PM	PH3 valve closed
8/22/2011	6:24:31 PM	SiCl4 pre valve closed
8/22/2011	6:24:31 PM	SiCl4 post valve closed
8/22/2011	6:24:31 PM	Bypass valve closed
8/22/2011	6:24:31 PM	Bubbler valve closed
8/22/2011	6:24:31 PM	Helium valve opened
8/22/2011	6:24:31 PM	Main Vac valve opened
8/22/2011	6:24:31 PM	Helium MFC set to  20.000000
8/22/2011	6:24:31 PM	H2 MFC set to  0.000000
8/22/2011	6:24:31 PM	BCl3 MFC set to  0.000000
8/22/2011	6:24:31 PM	PHl3 MFC set to  0.000000
8/22/2011	6:24:31 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:24:31 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:24:31 PM	Tube furnace set to 0
8/22/2011	6:25:01 PM	Helium valve closed
8/22/2011	6:25:01 PM	H2 valve closed
8/22/2011	6:25:01 PM	BCl3 valve closed
8/22/2011	6:25:01 PM	PH3 valve closed
8/22/2011	6:25:01 PM	SiCl4 pre valve closed
8/22/2011	6:25:01 PM	SiCl4 post valve closed
8/22/2011	6:25:01 PM	Bypass valve closed
8/22/2011	6:25:01 PM	Bubbler valve closed
8/22/2011	6:25:01 PM	Main Vac valve opened
8/22/2011	6:25:01 PM	Helium MFC set to  0.000000
8/22/2011	6:25:01 PM	H2 MFC set to  0.000000
8/22/2011	6:25:01 PM	BCl3 MFC set to  0.000000
8/22/2011	6:25:01 PM	PHl3 MFC set to  0.000000
8/22/2011	6:25:01 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:25:01 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:25:01 PM	Tube furnace set to 0
8/22/2011	6:25:31 PM	H2 valve closed
8/22/2011	6:25:31 PM	BCl3 valve closed
8/22/2011	6:25:31 PM	PH3 valve closed
8/22/2011	6:25:31 PM	SiCl4 pre valve closed
8/22/2011	6:25:31 PM	SiCl4 post valve closed
8/22/2011	6:25:31 PM	Bypass valve closed
8/22/2011	6:25:31 PM	Bubbler valve closed
8/22/2011	6:25:31 PM	Helium valve opened
8/22/2011	6:25:31 PM	Main Vac valve opened
8/22/2011	6:25:31 PM	Helium MFC set to  20.000000
8/22/2011	6:25:31 PM	H2 MFC set to  0.000000
8/22/2011	6:25:31 PM	BCl3 MFC set to  0.000000
8/22/2011	6:25:31 PM	PHl3 MFC set to  0.000000
8/22/2011	6:25:31 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:25:31 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:25:31 PM	Tube furnace set to 0
8/22/2011	6:26:01 PM	Helium valve closed
8/22/2011	6:26:01 PM	H2 valve closed
8/22/2011	6:26:01 PM	BCl3 valve closed
8/22/2011	6:26:01 PM	PH3 valve closed
8/22/2011	6:26:01 PM	SiCl4 pre valve closed
8/22/2011	6:26:01 PM	SiCl4 post valve closed
8/22/2011	6:26:01 PM	Bypass valve closed
8/22/2011	6:26:01 PM	Bubbler valve closed
8/22/2011	6:26:01 PM	Main Vac valve opened
8/22/2011	6:26:01 PM	Helium MFC set to  0.000000
8/22/2011	6:26:01 PM	H2 MFC set to  0.000000
8/22/2011	6:26:01 PM	BCl3 MFC set to  0.000000
8/22/2011	6:26:01 PM	PHl3 MFC set to  0.000000
8/22/2011	6:26:01 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:26:01 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:26:01 PM	Tube furnace set to 0
8/22/2011	6:26:31 PM	H2 valve closed
8/22/2011	6:26:31 PM	BCl3 valve closed
8/22/2011	6:26:31 PM	PH3 valve closed
8/22/2011	6:26:31 PM	SiCl4 pre valve closed
8/22/2011	6:26:31 PM	SiCl4 post valve closed
8/22/2011	6:26:31 PM	Bypass valve closed
8/22/2011	6:26:31 PM	Bubbler valve closed
8/22/2011	6:26:31 PM	Helium valve opened
8/22/2011	6:26:31 PM	Main Vac valve opened
8/22/2011	6:26:31 PM	Helium MFC set to  20.000000
8/22/2011	6:26:31 PM	H2 MFC set to  0.000000
8/22/2011	6:26:31 PM	BCl3 MFC set to  0.000000
8/22/2011	6:26:31 PM	PHl3 MFC set to  0.000000
8/22/2011	6:26:31 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:26:31 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:26:32 PM	Tube furnace set to 0
8/22/2011	6:27:02 PM	Helium valve closed
8/22/2011	6:27:02 PM	H2 valve closed
8/22/2011	6:27:02 PM	BCl3 valve closed
8/22/2011	6:27:02 PM	PH3 valve closed
8/22/2011	6:27:02 PM	SiCl4 pre valve closed
8/22/2011	6:27:02 PM	SiCl4 post valve closed
8/22/2011	6:27:02 PM	Bypass valve closed
8/22/2011	6:27:02 PM	Bubbler valve closed
8/22/2011	6:27:02 PM	Main Vac valve opened
8/22/2011	6:27:02 PM	Helium MFC set to  0.000000
8/22/2011	6:27:02 PM	H2 MFC set to  0.000000
8/22/2011	6:27:02 PM	BCl3 MFC set to  0.000000
8/22/2011	6:27:02 PM	PHl3 MFC set to  0.000000
8/22/2011	6:27:02 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:27:02 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:27:02 PM	Tube furnace set to 0
8/22/2011	6:27:32 PM	H2 valve closed
8/22/2011	6:27:32 PM	BCl3 valve closed
8/22/2011	6:27:32 PM	PH3 valve closed
8/22/2011	6:27:32 PM	SiCl4 pre valve closed
8/22/2011	6:27:32 PM	SiCl4 post valve closed
8/22/2011	6:27:32 PM	Bypass valve closed
8/22/2011	6:27:32 PM	Bubbler valve closed
8/22/2011	6:27:32 PM	Helium valve opened
8/22/2011	6:27:32 PM	Main Vac valve opened
8/22/2011	6:27:32 PM	Helium MFC set to  20.000000
8/22/2011	6:27:32 PM	H2 MFC set to  0.000000
8/22/2011	6:27:32 PM	BCl3 MFC set to  0.000000
8/22/2011	6:27:32 PM	PHl3 MFC set to  0.000000
8/22/2011	6:27:32 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:27:32 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:27:32 PM	Tube furnace set to 0
8/22/2011	6:28:02 PM	Helium valve closed
8/22/2011	6:28:02 PM	H2 valve closed
8/22/2011	6:28:02 PM	BCl3 valve closed
8/22/2011	6:28:02 PM	PH3 valve closed
8/22/2011	6:28:02 PM	SiCl4 pre valve closed
8/22/2011	6:28:02 PM	SiCl4 post valve closed
8/22/2011	6:28:02 PM	Bypass valve closed
8/22/2011	6:28:02 PM	Bubbler valve closed
8/22/2011	6:28:02 PM	Main Vac valve opened
8/22/2011	6:28:02 PM	Helium MFC set to  0.000000
8/22/2011	6:28:02 PM	H2 MFC set to  0.000000
8/22/2011	6:28:02 PM	BCl3 MFC set to  0.000000
8/22/2011	6:28:02 PM	PHl3 MFC set to  0.000000
8/22/2011	6:28:02 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:28:02 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:28:02 PM	Tube furnace set to 0
8/22/2011	6:28:32 PM	H2 valve closed
8/22/2011	6:28:32 PM	BCl3 valve closed
8/22/2011	6:28:32 PM	PH3 valve closed
8/22/2011	6:28:32 PM	SiCl4 pre valve closed
8/22/2011	6:28:32 PM	SiCl4 post valve closed
8/22/2011	6:28:32 PM	Bypass valve closed
8/22/2011	6:28:32 PM	Bubbler valve closed
8/22/2011	6:28:32 PM	Helium valve opened
8/22/2011	6:28:32 PM	Main Vac valve opened
8/22/2011	6:28:32 PM	Helium MFC set to  20.000000
8/22/2011	6:28:32 PM	H2 MFC set to  0.000000
8/22/2011	6:28:32 PM	BCl3 MFC set to  0.000000
8/22/2011	6:28:32 PM	PHl3 MFC set to  0.000000
8/22/2011	6:28:32 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:28:32 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:28:32 PM	Tube furnace set to 0
8/22/2011	6:29:02 PM	Helium valve closed
8/22/2011	6:29:02 PM	H2 valve closed
8/22/2011	6:29:02 PM	BCl3 valve closed
8/22/2011	6:29:02 PM	PH3 valve closed
8/22/2011	6:29:02 PM	SiCl4 pre valve closed
8/22/2011	6:29:02 PM	SiCl4 post valve closed
8/22/2011	6:29:02 PM	Bypass valve closed
8/22/2011	6:29:02 PM	Bubbler valve closed
8/22/2011	6:29:02 PM	Main Vac valve opened
8/22/2011	6:29:02 PM	Helium MFC set to  0.000000
8/22/2011	6:29:02 PM	H2 MFC set to  0.000000
8/22/2011	6:29:02 PM	BCl3 MFC set to  0.000000
8/22/2011	6:29:02 PM	PHl3 MFC set to  0.000000
8/22/2011	6:29:02 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:29:02 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:29:03 PM	Tube furnace set to 0
8/22/2011	6:29:33 PM	H2 valve closed
8/22/2011	6:29:33 PM	BCl3 valve closed
8/22/2011	6:29:33 PM	PH3 valve closed
8/22/2011	6:29:33 PM	SiCl4 pre valve closed
8/22/2011	6:29:33 PM	SiCl4 post valve closed
8/22/2011	6:29:33 PM	Bypass valve closed
8/22/2011	6:29:33 PM	Bubbler valve closed
8/22/2011	6:29:33 PM	Helium valve opened
8/22/2011	6:29:33 PM	Main Vac valve opened
8/22/2011	6:29:33 PM	Helium MFC set to  20.000000
8/22/2011	6:29:33 PM	H2 MFC set to  0.000000
8/22/2011	6:29:33 PM	BCl3 MFC set to  0.000000
8/22/2011	6:29:33 PM	PHl3 MFC set to  0.000000
8/22/2011	6:29:33 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:29:33 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:29:33 PM	Tube furnace set to 0
8/22/2011	6:30:03 PM	Helium valve closed
8/22/2011	6:30:03 PM	H2 valve closed
8/22/2011	6:30:03 PM	BCl3 valve closed
8/22/2011	6:30:03 PM	PH3 valve closed
8/22/2011	6:30:03 PM	SiCl4 pre valve closed
8/22/2011	6:30:03 PM	SiCl4 post valve closed
8/22/2011	6:30:03 PM	Bypass valve closed
8/22/2011	6:30:03 PM	Bubbler valve closed
8/22/2011	6:30:03 PM	Main Vac valve opened
8/22/2011	6:30:03 PM	Helium MFC set to  0.000000
8/22/2011	6:30:03 PM	H2 MFC set to  0.000000
8/22/2011	6:30:03 PM	BCl3 MFC set to  0.000000
8/22/2011	6:30:03 PM	PHl3 MFC set to  0.000000
8/22/2011	6:30:03 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:30:03 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:30:03 PM	Tube furnace set to 0
8/22/2011	6:30:33 PM	H2 valve closed
8/22/2011	6:30:33 PM	BCl3 valve closed
8/22/2011	6:30:33 PM	PH3 valve closed
8/22/2011	6:30:33 PM	SiCl4 pre valve closed
8/22/2011	6:30:33 PM	SiCl4 post valve closed
8/22/2011	6:30:33 PM	Bypass valve closed
8/22/2011	6:30:33 PM	Bubbler valve closed
8/22/2011	6:30:33 PM	Helium valve opened
8/22/2011	6:30:33 PM	Main Vac valve opened
8/22/2011	6:30:33 PM	Helium MFC set to  20.000000
8/22/2011	6:30:33 PM	H2 MFC set to  0.000000
8/22/2011	6:30:33 PM	BCl3 MFC set to  0.000000
8/22/2011	6:30:33 PM	PHl3 MFC set to  0.000000
8/22/2011	6:30:33 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:30:33 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:30:33 PM	Tube furnace set to 0
8/22/2011	6:31:03 PM	Helium valve closed
8/22/2011	6:31:03 PM	H2 valve closed
8/22/2011	6:31:03 PM	BCl3 valve closed
8/22/2011	6:31:03 PM	PH3 valve closed
8/22/2011	6:31:03 PM	SiCl4 pre valve closed
8/22/2011	6:31:03 PM	SiCl4 post valve closed
8/22/2011	6:31:03 PM	Bypass valve closed
8/22/2011	6:31:03 PM	Bubbler valve closed
8/22/2011	6:31:03 PM	Main Vac valve opened
8/22/2011	6:31:03 PM	Helium MFC set to  0.000000
8/22/2011	6:31:03 PM	H2 MFC set to  0.000000
8/22/2011	6:31:03 PM	BCl3 MFC set to  0.000000
8/22/2011	6:31:03 PM	PHl3 MFC set to  0.000000
8/22/2011	6:31:03 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:31:03 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:31:03 PM	Tube furnace set to 0
8/22/2011	6:31:33 PM	H2 valve closed
8/22/2011	6:31:33 PM	BCl3 valve closed
8/22/2011	6:31:33 PM	PH3 valve closed
8/22/2011	6:31:33 PM	SiCl4 pre valve closed
8/22/2011	6:31:33 PM	SiCl4 post valve closed
8/22/2011	6:31:33 PM	Bypass valve closed
8/22/2011	6:31:33 PM	Bubbler valve closed
8/22/2011	6:31:33 PM	Helium valve opened
8/22/2011	6:31:33 PM	Main Vac valve opened
8/22/2011	6:31:33 PM	Helium MFC set to  20.000000
8/22/2011	6:31:33 PM	H2 MFC set to  0.000000
8/22/2011	6:31:33 PM	BCl3 MFC set to  0.000000
8/22/2011	6:31:33 PM	PHl3 MFC set to  0.000000
8/22/2011	6:31:33 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:31:33 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:31:34 PM	Tube furnace set to 0
8/22/2011	6:32:04 PM	Helium valve closed
8/22/2011	6:32:04 PM	H2 valve closed
8/22/2011	6:32:04 PM	BCl3 valve closed
8/22/2011	6:32:04 PM	PH3 valve closed
8/22/2011	6:32:04 PM	SiCl4 pre valve closed
8/22/2011	6:32:04 PM	SiCl4 post valve closed
8/22/2011	6:32:04 PM	Bypass valve closed
8/22/2011	6:32:04 PM	Bubbler valve closed
8/22/2011	6:32:04 PM	Main Vac valve opened
8/22/2011	6:32:04 PM	Helium MFC set to  0.000000
8/22/2011	6:32:04 PM	H2 MFC set to  0.000000
8/22/2011	6:32:04 PM	BCl3 MFC set to  0.000000
8/22/2011	6:32:04 PM	PHl3 MFC set to  0.000000
8/22/2011	6:32:04 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:32:04 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:32:04 PM	Tube furnace set to 0
8/22/2011	6:32:05 PM	Run finished at 6:32 PM
8/22/2011	6:32:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	6:38:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	6:39:09 PM	Recipe started at 6:39 PM
8/22/2011	6:39:09 PM	Helium valve closed
8/22/2011	6:39:09 PM	H2 valve closed
8/22/2011	6:39:09 PM	BCl3 valve closed
8/22/2011	6:39:09 PM	PH3 valve closed
8/22/2011	6:39:09 PM	SiCl4 pre valve closed
8/22/2011	6:39:09 PM	SiCl4 post valve closed
8/22/2011	6:39:09 PM	Main Vac valve closed
8/22/2011	6:39:09 PM	Bubbler valve closed
8/22/2011	6:39:09 PM	Bypass valve opened
8/22/2011	6:39:09 PM	Helium MFC set to  0.000000
8/22/2011	6:39:09 PM	H2 MFC set to  0.000000
8/22/2011	6:39:09 PM	BCl3 MFC set to  0.000000
8/22/2011	6:39:09 PM	PHl3 MFC set to  0.000000
8/22/2011	6:39:09 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:39:09 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:39:09 PM	Tube furnace set to 0
8/22/2011	6:39:09 PM	Helium valve closed
8/22/2011	6:39:09 PM	H2 valve closed
8/22/2011	6:39:09 PM	BCl3 valve closed
8/22/2011	6:39:09 PM	PH3 valve closed
8/22/2011	6:39:09 PM	SiCl4 pre valve closed
8/22/2011	6:39:09 PM	SiCl4 post valve closed
8/22/2011	6:39:09 PM	Main Vac valve closed
8/22/2011	6:39:09 PM	Bubbler valve closed
8/22/2011	6:39:09 PM	Bypass valve opened
8/22/2011	6:39:09 PM	Helium MFC set to  0.000000
8/22/2011	6:39:09 PM	H2 MFC set to  0.000000
8/22/2011	6:39:09 PM	BCl3 MFC set to  0.000000
8/22/2011	6:39:09 PM	PHl3 MFC set to  0.000000
8/22/2011	6:39:09 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:39:09 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:39:10 PM	Tube furnace set to 0
8/22/2011	6:39:40 PM	Helium valve closed
8/22/2011	6:39:40 PM	H2 valve closed
8/22/2011	6:39:40 PM	BCl3 valve closed
8/22/2011	6:39:40 PM	PH3 valve closed
8/22/2011	6:39:40 PM	SiCl4 pre valve closed
8/22/2011	6:39:40 PM	SiCl4 post valve closed
8/22/2011	6:39:40 PM	Bypass valve closed
8/22/2011	6:39:40 PM	Bubbler valve closed
8/22/2011	6:39:40 PM	Main Vac valve opened
8/22/2011	6:39:40 PM	Helium MFC set to  0.000000
8/22/2011	6:39:40 PM	H2 MFC set to  0.000000
8/22/2011	6:39:40 PM	BCl3 MFC set to  0.000000
8/22/2011	6:39:40 PM	PHl3 MFC set to  0.000000
8/22/2011	6:39:40 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:39:40 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:39:40 PM	Tube furnace set to 0
8/22/2011	6:40:10 PM	H2 valve closed
8/22/2011	6:40:10 PM	BCl3 valve closed
8/22/2011	6:40:10 PM	PH3 valve closed
8/22/2011	6:40:10 PM	SiCl4 pre valve closed
8/22/2011	6:40:10 PM	SiCl4 post valve closed
8/22/2011	6:40:10 PM	Bypass valve closed
8/22/2011	6:40:10 PM	Bubbler valve closed
8/22/2011	6:40:10 PM	Helium valve opened
8/22/2011	6:40:10 PM	Main Vac valve opened
8/22/2011	6:40:10 PM	Helium MFC set to  20.000000
8/22/2011	6:40:10 PM	H2 MFC set to  0.000000
8/22/2011	6:40:10 PM	BCl3 MFC set to  0.000000
8/22/2011	6:40:10 PM	PHl3 MFC set to  0.000000
8/22/2011	6:40:10 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:40:10 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:40:10 PM	Tube furnace set to 0
8/22/2011	6:40:40 PM	Helium valve closed
8/22/2011	6:40:40 PM	H2 valve closed
8/22/2011	6:40:40 PM	BCl3 valve closed
8/22/2011	6:40:40 PM	PH3 valve closed
8/22/2011	6:40:40 PM	SiCl4 pre valve closed
8/22/2011	6:40:40 PM	SiCl4 post valve closed
8/22/2011	6:40:40 PM	Bypass valve closed
8/22/2011	6:40:40 PM	Bubbler valve closed
8/22/2011	6:40:40 PM	Main Vac valve opened
8/22/2011	6:40:40 PM	Helium MFC set to  0.000000
8/22/2011	6:40:40 PM	H2 MFC set to  0.000000
8/22/2011	6:40:40 PM	BCl3 MFC set to  0.000000
8/22/2011	6:40:40 PM	PHl3 MFC set to  0.000000
8/22/2011	6:40:40 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:40:40 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:40:40 PM	Tube furnace set to 0
8/22/2011	6:41:10 PM	H2 valve closed
8/22/2011	6:41:10 PM	BCl3 valve closed
8/22/2011	6:41:10 PM	PH3 valve closed
8/22/2011	6:41:10 PM	SiCl4 pre valve closed
8/22/2011	6:41:10 PM	SiCl4 post valve closed
8/22/2011	6:41:10 PM	Bypass valve closed
8/22/2011	6:41:10 PM	Bubbler valve closed
8/22/2011	6:41:10 PM	Helium valve opened
8/22/2011	6:41:10 PM	Main Vac valve opened
8/22/2011	6:41:10 PM	Helium MFC set to  20.000000
8/22/2011	6:41:10 PM	H2 MFC set to  0.000000
8/22/2011	6:41:10 PM	BCl3 MFC set to  0.000000
8/22/2011	6:41:10 PM	PHl3 MFC set to  0.000000
8/22/2011	6:41:10 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:41:10 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:41:10 PM	Tube furnace set to 0
8/22/2011	6:41:40 PM	Helium valve closed
8/22/2011	6:41:40 PM	H2 valve closed
8/22/2011	6:41:40 PM	BCl3 valve closed
8/22/2011	6:41:40 PM	PH3 valve closed
8/22/2011	6:41:40 PM	SiCl4 pre valve closed
8/22/2011	6:41:40 PM	SiCl4 post valve closed
8/22/2011	6:41:40 PM	Bypass valve closed
8/22/2011	6:41:40 PM	Bubbler valve closed
8/22/2011	6:41:40 PM	Main Vac valve opened
8/22/2011	6:41:40 PM	Helium MFC set to  0.000000
8/22/2011	6:41:40 PM	H2 MFC set to  0.000000
8/22/2011	6:41:40 PM	BCl3 MFC set to  0.000000
8/22/2011	6:41:40 PM	PHl3 MFC set to  0.000000
8/22/2011	6:41:40 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:41:40 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:41:41 PM	Tube furnace set to 0
8/22/2011	6:42:11 PM	H2 valve closed
8/22/2011	6:42:11 PM	BCl3 valve closed
8/22/2011	6:42:11 PM	PH3 valve closed
8/22/2011	6:42:11 PM	SiCl4 pre valve closed
8/22/2011	6:42:11 PM	SiCl4 post valve closed
8/22/2011	6:42:11 PM	Bypass valve closed
8/22/2011	6:42:11 PM	Bubbler valve closed
8/22/2011	6:42:11 PM	Helium valve opened
8/22/2011	6:42:11 PM	Main Vac valve opened
8/22/2011	6:42:11 PM	Helium MFC set to  20.000000
8/22/2011	6:42:11 PM	H2 MFC set to  0.000000
8/22/2011	6:42:11 PM	BCl3 MFC set to  0.000000
8/22/2011	6:42:11 PM	PHl3 MFC set to  0.000000
8/22/2011	6:42:11 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:42:11 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:42:11 PM	Tube furnace set to 0
8/22/2011	6:42:41 PM	Helium valve closed
8/22/2011	6:42:41 PM	H2 valve closed
8/22/2011	6:42:41 PM	BCl3 valve closed
8/22/2011	6:42:41 PM	PH3 valve closed
8/22/2011	6:42:41 PM	SiCl4 pre valve closed
8/22/2011	6:42:41 PM	SiCl4 post valve closed
8/22/2011	6:42:41 PM	Bypass valve closed
8/22/2011	6:42:41 PM	Bubbler valve closed
8/22/2011	6:42:41 PM	Main Vac valve opened
8/22/2011	6:42:41 PM	Helium MFC set to  0.000000
8/22/2011	6:42:41 PM	H2 MFC set to  0.000000
8/22/2011	6:42:41 PM	BCl3 MFC set to  0.000000
8/22/2011	6:42:41 PM	PHl3 MFC set to  0.000000
8/22/2011	6:42:41 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:42:41 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:42:41 PM	Tube furnace set to 0
8/22/2011	6:43:11 PM	H2 valve closed
8/22/2011	6:43:11 PM	BCl3 valve closed
8/22/2011	6:43:11 PM	PH3 valve closed
8/22/2011	6:43:11 PM	SiCl4 pre valve closed
8/22/2011	6:43:11 PM	SiCl4 post valve closed
8/22/2011	6:43:11 PM	Bypass valve closed
8/22/2011	6:43:11 PM	Bubbler valve closed
8/22/2011	6:43:11 PM	Helium valve opened
8/22/2011	6:43:11 PM	Main Vac valve opened
8/22/2011	6:43:11 PM	Helium MFC set to  20.000000
8/22/2011	6:43:11 PM	H2 MFC set to  0.000000
8/22/2011	6:43:11 PM	BCl3 MFC set to  0.000000
8/22/2011	6:43:11 PM	PHl3 MFC set to  0.000000
8/22/2011	6:43:11 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:43:11 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:43:11 PM	Tube furnace set to 0
8/22/2011	6:43:41 PM	Helium valve closed
8/22/2011	6:43:41 PM	H2 valve closed
8/22/2011	6:43:41 PM	BCl3 valve closed
8/22/2011	6:43:41 PM	PH3 valve closed
8/22/2011	6:43:41 PM	SiCl4 pre valve closed
8/22/2011	6:43:41 PM	SiCl4 post valve closed
8/22/2011	6:43:41 PM	Bypass valve closed
8/22/2011	6:43:41 PM	Bubbler valve closed
8/22/2011	6:43:41 PM	Main Vac valve opened
8/22/2011	6:43:41 PM	Helium MFC set to  0.000000
8/22/2011	6:43:41 PM	H2 MFC set to  0.000000
8/22/2011	6:43:41 PM	BCl3 MFC set to  0.000000
8/22/2011	6:43:41 PM	PHl3 MFC set to  0.000000
8/22/2011	6:43:41 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:43:41 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:43:41 PM	Tube furnace set to 0
8/22/2011	6:44:11 PM	H2 valve closed
8/22/2011	6:44:11 PM	BCl3 valve closed
8/22/2011	6:44:11 PM	PH3 valve closed
8/22/2011	6:44:11 PM	SiCl4 pre valve closed
8/22/2011	6:44:11 PM	SiCl4 post valve closed
8/22/2011	6:44:11 PM	Bypass valve closed
8/22/2011	6:44:11 PM	Bubbler valve closed
8/22/2011	6:44:11 PM	Helium valve opened
8/22/2011	6:44:11 PM	Main Vac valve opened
8/22/2011	6:44:11 PM	Helium MFC set to  20.000000
8/22/2011	6:44:11 PM	H2 MFC set to  0.000000
8/22/2011	6:44:11 PM	BCl3 MFC set to  0.000000
8/22/2011	6:44:11 PM	PHl3 MFC set to  0.000000
8/22/2011	6:44:11 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:44:11 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:44:12 PM	Tube furnace set to 0
8/22/2011	6:44:42 PM	Helium valve closed
8/22/2011	6:44:42 PM	H2 valve closed
8/22/2011	6:44:42 PM	BCl3 valve closed
8/22/2011	6:44:42 PM	PH3 valve closed
8/22/2011	6:44:42 PM	SiCl4 pre valve closed
8/22/2011	6:44:42 PM	SiCl4 post valve closed
8/22/2011	6:44:42 PM	Bypass valve closed
8/22/2011	6:44:42 PM	Bubbler valve closed
8/22/2011	6:44:42 PM	Main Vac valve opened
8/22/2011	6:44:42 PM	Helium MFC set to  0.000000
8/22/2011	6:44:42 PM	H2 MFC set to  0.000000
8/22/2011	6:44:42 PM	BCl3 MFC set to  0.000000
8/22/2011	6:44:42 PM	PHl3 MFC set to  0.000000
8/22/2011	6:44:42 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:44:42 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:44:42 PM	Tube furnace set to 0
8/22/2011	6:45:12 PM	H2 valve closed
8/22/2011	6:45:12 PM	BCl3 valve closed
8/22/2011	6:45:12 PM	PH3 valve closed
8/22/2011	6:45:12 PM	SiCl4 pre valve closed
8/22/2011	6:45:12 PM	SiCl4 post valve closed
8/22/2011	6:45:12 PM	Bypass valve closed
8/22/2011	6:45:12 PM	Bubbler valve closed
8/22/2011	6:45:12 PM	Helium valve opened
8/22/2011	6:45:12 PM	Main Vac valve opened
8/22/2011	6:45:12 PM	Helium MFC set to  20.000000
8/22/2011	6:45:12 PM	H2 MFC set to  0.000000
8/22/2011	6:45:12 PM	BCl3 MFC set to  0.000000
8/22/2011	6:45:12 PM	PHl3 MFC set to  0.000000
8/22/2011	6:45:12 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:45:12 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:45:12 PM	Tube furnace set to 0
8/22/2011	6:45:42 PM	Helium valve closed
8/22/2011	6:45:42 PM	H2 valve closed
8/22/2011	6:45:42 PM	BCl3 valve closed
8/22/2011	6:45:42 PM	PH3 valve closed
8/22/2011	6:45:42 PM	SiCl4 pre valve closed
8/22/2011	6:45:42 PM	SiCl4 post valve closed
8/22/2011	6:45:42 PM	Bypass valve closed
8/22/2011	6:45:42 PM	Bubbler valve closed
8/22/2011	6:45:42 PM	Main Vac valve opened
8/22/2011	6:45:42 PM	Helium MFC set to  0.000000
8/22/2011	6:45:42 PM	H2 MFC set to  0.000000
8/22/2011	6:45:42 PM	BCl3 MFC set to  0.000000
8/22/2011	6:45:42 PM	PHl3 MFC set to  0.000000
8/22/2011	6:45:42 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:45:42 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:45:42 PM	Tube furnace set to 0
8/22/2011	6:46:12 PM	H2 valve closed
8/22/2011	6:46:12 PM	BCl3 valve closed
8/22/2011	6:46:12 PM	PH3 valve closed
8/22/2011	6:46:12 PM	SiCl4 pre valve closed
8/22/2011	6:46:12 PM	SiCl4 post valve closed
8/22/2011	6:46:12 PM	Bypass valve closed
8/22/2011	6:46:12 PM	Bubbler valve closed
8/22/2011	6:46:12 PM	Helium valve opened
8/22/2011	6:46:12 PM	Main Vac valve opened
8/22/2011	6:46:12 PM	Helium MFC set to  20.000000
8/22/2011	6:46:12 PM	H2 MFC set to  0.000000
8/22/2011	6:46:12 PM	BCl3 MFC set to  0.000000
8/22/2011	6:46:12 PM	PHl3 MFC set to  0.000000
8/22/2011	6:46:12 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:46:12 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:46:12 PM	Tube furnace set to 0
8/22/2011	6:46:42 PM	Helium valve closed
8/22/2011	6:46:42 PM	H2 valve closed
8/22/2011	6:46:42 PM	BCl3 valve closed
8/22/2011	6:46:42 PM	PH3 valve closed
8/22/2011	6:46:42 PM	SiCl4 pre valve closed
8/22/2011	6:46:42 PM	SiCl4 post valve closed
8/22/2011	6:46:42 PM	Bypass valve closed
8/22/2011	6:46:42 PM	Bubbler valve closed
8/22/2011	6:46:42 PM	Main Vac valve opened
8/22/2011	6:46:42 PM	Helium MFC set to  0.000000
8/22/2011	6:46:42 PM	H2 MFC set to  0.000000
8/22/2011	6:46:42 PM	BCl3 MFC set to  0.000000
8/22/2011	6:46:42 PM	PHl3 MFC set to  0.000000
8/22/2011	6:46:42 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:46:42 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:46:43 PM	Tube furnace set to 0
8/22/2011	6:47:13 PM	H2 valve closed
8/22/2011	6:47:13 PM	BCl3 valve closed
8/22/2011	6:47:13 PM	PH3 valve closed
8/22/2011	6:47:13 PM	SiCl4 pre valve closed
8/22/2011	6:47:13 PM	SiCl4 post valve closed
8/22/2011	6:47:13 PM	Bypass valve closed
8/22/2011	6:47:13 PM	Bubbler valve closed
8/22/2011	6:47:13 PM	Helium valve opened
8/22/2011	6:47:13 PM	Main Vac valve opened
8/22/2011	6:47:13 PM	Helium MFC set to  20.000000
8/22/2011	6:47:13 PM	H2 MFC set to  0.000000
8/22/2011	6:47:13 PM	BCl3 MFC set to  0.000000
8/22/2011	6:47:13 PM	PHl3 MFC set to  0.000000
8/22/2011	6:47:13 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:47:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:47:13 PM	Tube furnace set to 0
8/22/2011	6:47:43 PM	Helium valve closed
8/22/2011	6:47:43 PM	H2 valve closed
8/22/2011	6:47:43 PM	BCl3 valve closed
8/22/2011	6:47:43 PM	PH3 valve closed
8/22/2011	6:47:43 PM	SiCl4 pre valve closed
8/22/2011	6:47:43 PM	SiCl4 post valve closed
8/22/2011	6:47:43 PM	Bypass valve closed
8/22/2011	6:47:43 PM	Bubbler valve closed
8/22/2011	6:47:43 PM	Main Vac valve opened
8/22/2011	6:47:43 PM	Helium MFC set to  0.000000
8/22/2011	6:47:43 PM	H2 MFC set to  0.000000
8/22/2011	6:47:43 PM	BCl3 MFC set to  0.000000
8/22/2011	6:47:43 PM	PHl3 MFC set to  0.000000
8/22/2011	6:47:43 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:47:43 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:47:43 PM	Tube furnace set to 0
8/22/2011	6:48:13 PM	H2 valve closed
8/22/2011	6:48:13 PM	BCl3 valve closed
8/22/2011	6:48:13 PM	PH3 valve closed
8/22/2011	6:48:13 PM	SiCl4 pre valve closed
8/22/2011	6:48:13 PM	SiCl4 post valve closed
8/22/2011	6:48:13 PM	Bypass valve closed
8/22/2011	6:48:13 PM	Bubbler valve closed
8/22/2011	6:48:13 PM	Helium valve opened
8/22/2011	6:48:13 PM	Main Vac valve opened
8/22/2011	6:48:13 PM	Helium MFC set to  20.000000
8/22/2011	6:48:13 PM	H2 MFC set to  0.000000
8/22/2011	6:48:13 PM	BCl3 MFC set to  0.000000
8/22/2011	6:48:13 PM	PHl3 MFC set to  0.000000
8/22/2011	6:48:13 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:48:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:48:13 PM	Tube furnace set to 0
8/22/2011	6:48:43 PM	Helium valve closed
8/22/2011	6:48:43 PM	H2 valve closed
8/22/2011	6:48:43 PM	BCl3 valve closed
8/22/2011	6:48:43 PM	PH3 valve closed
8/22/2011	6:48:43 PM	SiCl4 pre valve closed
8/22/2011	6:48:43 PM	SiCl4 post valve closed
8/22/2011	6:48:43 PM	Bypass valve closed
8/22/2011	6:48:43 PM	Bubbler valve closed
8/22/2011	6:48:43 PM	Main Vac valve opened
8/22/2011	6:48:43 PM	Helium MFC set to  0.000000
8/22/2011	6:48:43 PM	H2 MFC set to  0.000000
8/22/2011	6:48:43 PM	BCl3 MFC set to  0.000000
8/22/2011	6:48:43 PM	PHl3 MFC set to  0.000000
8/22/2011	6:48:43 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:48:43 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:48:43 PM	Tube furnace set to 0
8/22/2011	6:49:13 PM	H2 valve closed
8/22/2011	6:49:13 PM	BCl3 valve closed
8/22/2011	6:49:13 PM	PH3 valve closed
8/22/2011	6:49:13 PM	SiCl4 pre valve closed
8/22/2011	6:49:13 PM	SiCl4 post valve closed
8/22/2011	6:49:13 PM	Bypass valve closed
8/22/2011	6:49:13 PM	Bubbler valve closed
8/22/2011	6:49:13 PM	Helium valve opened
8/22/2011	6:49:13 PM	Main Vac valve opened
8/22/2011	6:49:13 PM	Helium MFC set to  20.000000
8/22/2011	6:49:13 PM	H2 MFC set to  0.000000
8/22/2011	6:49:13 PM	BCl3 MFC set to  0.000000
8/22/2011	6:49:13 PM	PHl3 MFC set to  0.000000
8/22/2011	6:49:13 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:49:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:49:14 PM	Tube furnace set to 0
8/22/2011	6:49:44 PM	Helium valve closed
8/22/2011	6:49:44 PM	H2 valve closed
8/22/2011	6:49:44 PM	BCl3 valve closed
8/22/2011	6:49:44 PM	PH3 valve closed
8/22/2011	6:49:44 PM	SiCl4 pre valve closed
8/22/2011	6:49:44 PM	SiCl4 post valve closed
8/22/2011	6:49:44 PM	Bypass valve closed
8/22/2011	6:49:44 PM	Bubbler valve closed
8/22/2011	6:49:44 PM	Main Vac valve opened
8/22/2011	6:49:44 PM	Helium MFC set to  0.000000
8/22/2011	6:49:44 PM	H2 MFC set to  0.000000
8/22/2011	6:49:44 PM	BCl3 MFC set to  0.000000
8/22/2011	6:49:44 PM	PHl3 MFC set to  0.000000
8/22/2011	6:49:44 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:49:44 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:49:44 PM	Tube furnace set to 0
8/22/2011	6:49:45 PM	Run finished at 6:49 PM
8/22/2011	6:49:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	6:52:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/22/2011	6:52:21 PM	Recipe started at 6:52 PM
8/22/2011	6:52:21 PM	Helium valve closed
8/22/2011	6:52:21 PM	H2 valve closed
8/22/2011	6:52:21 PM	BCl3 valve closed
8/22/2011	6:52:21 PM	PH3 valve closed
8/22/2011	6:52:21 PM	SiCl4 pre valve closed
8/22/2011	6:52:21 PM	SiCl4 post valve closed
8/22/2011	6:52:21 PM	Main Vac valve closed
8/22/2011	6:52:21 PM	Bypass valve closed
8/22/2011	6:52:21 PM	Bubbler valve closed
8/22/2011	6:52:21 PM	Helium MFC set to  0.000000
8/22/2011	6:52:21 PM	H2 MFC set to  0.000000
8/22/2011	6:52:21 PM	BCl3 MFC set to  0.000000
8/22/2011	6:52:21 PM	PHl3 MFC set to  0.000000
8/22/2011	6:52:21 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:52:21 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:52:21 PM	Tube furnace set to 0
8/22/2011	6:52:21 PM	Run finished at 6:52 PM
8/22/2011	6:52:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/22/2011	6:52:55 PM	Main Vac valve opened
8/22/2011	6:53:34 PM	Recipe started at 6:53 PM
8/22/2011	6:53:34 PM	Helium valve closed
8/22/2011	6:53:34 PM	H2 valve closed
8/22/2011	6:53:34 PM	BCl3 valve closed
8/22/2011	6:53:34 PM	PH3 valve closed
8/22/2011	6:53:34 PM	SiCl4 pre valve closed
8/22/2011	6:53:34 PM	SiCl4 post valve closed
8/22/2011	6:53:34 PM	Main Vac valve closed
8/22/2011	6:53:34 PM	Bypass valve closed
8/22/2011	6:53:34 PM	Bubbler valve closed
8/22/2011	6:53:34 PM	Helium MFC set to  0.000000
8/22/2011	6:53:34 PM	H2 MFC set to  0.000000
8/22/2011	6:53:34 PM	BCl3 MFC set to  0.000000
8/22/2011	6:53:34 PM	PHl3 MFC set to  0.000000
8/22/2011	6:53:34 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:53:34 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:53:34 PM	Tube furnace set to 0
8/22/2011	6:53:37 PM	Helium valve closed
8/22/2011	6:53:37 PM	BCl3 valve closed
8/22/2011	6:53:37 PM	PH3 valve closed
8/22/2011	6:53:37 PM	SiCl4 pre valve closed
8/22/2011	6:53:37 PM	SiCl4 post valve closed
8/22/2011	6:53:37 PM	Main Vac valve closed
8/22/2011	6:53:37 PM	Bypass valve closed
8/22/2011	6:53:37 PM	Bubbler valve closed
8/22/2011	6:53:37 PM	H2 valve opened
8/22/2011	6:53:37 PM	Helium MFC set to  0.000000
8/22/2011	6:53:37 PM	H2 MFC set to  500.000000
8/22/2011	6:53:37 PM	BCl3 MFC set to  0.000000
8/22/2011	6:53:37 PM	PHl3 MFC set to  0.000000
8/22/2011	6:53:37 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:53:37 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:53:37 PM	Tube furnace set to 0
8/22/2011	6:54:41 PM	Helium valve closed
8/22/2011	6:54:41 PM	BCl3 valve closed
8/22/2011	6:54:41 PM	PH3 valve closed
8/22/2011	6:54:41 PM	SiCl4 pre valve closed
8/22/2011	6:54:41 PM	SiCl4 post valve closed
8/22/2011	6:54:41 PM	Main Vac valve closed
8/22/2011	6:54:41 PM	Bypass valve closed
8/22/2011	6:54:41 PM	H2 valve opened
8/22/2011	6:54:41 PM	Bubbler valve opened
8/22/2011	6:54:41 PM	Helium MFC set to  0.000000
8/22/2011	6:54:41 PM	H2 MFC set to  500.000000
8/22/2011	6:54:41 PM	BCl3 MFC set to  0.000000
8/22/2011	6:54:41 PM	PHl3 MFC set to  0.000000
8/22/2011	6:54:41 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:54:41 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:54:41 PM	Tube furnace set to 0
8/22/2011	6:54:42 PM	Helium valve closed
8/22/2011	6:54:42 PM	BCl3 valve closed
8/22/2011	6:54:42 PM	PH3 valve closed
8/22/2011	6:54:42 PM	SiCl4 pre valve closed
8/22/2011	6:54:42 PM	SiCl4 post valve closed
8/22/2011	6:54:42 PM	Main Vac valve closed
8/22/2011	6:54:42 PM	Bypass valve closed
8/22/2011	6:54:42 PM	H2 valve opened
8/22/2011	6:54:42 PM	Bubbler valve opened
8/22/2011	6:54:42 PM	Helium MFC set to  0.000000
8/22/2011	6:54:42 PM	H2 MFC set to  500.000000
8/22/2011	6:54:42 PM	BCl3 MFC set to  0.000000
8/22/2011	6:54:42 PM	PHl3 MFC set to  0.000000
8/22/2011	6:54:42 PM	SiCl4 MFC set to  0.000000
8/22/2011	6:54:42 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	6:54:43 PM	Tube furnace set to 1000
8/22/2011	7:14:43 PM	Helium valve closed
8/22/2011	7:14:43 PM	PH3 valve closed
8/22/2011	7:14:43 PM	Main Vac valve closed
8/22/2011	7:14:43 PM	Bypass valve closed
8/22/2011	7:14:43 PM	H2 valve opened
8/22/2011	7:14:43 PM	BCl3 valve opened
8/22/2011	7:14:43 PM	SiCl4 pre valve opened
8/22/2011	7:14:43 PM	SiCl4 post valve opened
8/22/2011	7:14:43 PM	Bubbler valve opened
8/22/2011	7:14:43 PM	Helium MFC set to  0.000000
8/22/2011	7:14:43 PM	H2 MFC set to  500.000000
8/22/2011	7:14:43 PM	BCl3 MFC set to  2.500000
8/22/2011	7:14:43 PM	PHl3 MFC set to  0.000000
8/22/2011	7:14:43 PM	SiCl4 MFC set to  50.000000
8/22/2011	7:14:43 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	7:14:43 PM	Tube furnace set to 1000
8/22/2011	7:18:13 PM	Helium valve closed
8/22/2011	7:18:13 PM	BCl3 valve closed
8/22/2011	7:18:13 PM	PH3 valve closed
8/22/2011	7:18:13 PM	SiCl4 pre valve closed
8/22/2011	7:18:13 PM	SiCl4 post valve closed
8/22/2011	7:18:13 PM	Main Vac valve closed
8/22/2011	7:18:13 PM	Bypass valve closed
8/22/2011	7:18:13 PM	H2 valve opened
8/22/2011	7:18:13 PM	Bubbler valve opened
8/22/2011	7:18:13 PM	Helium MFC set to  0.000000
8/22/2011	7:18:13 PM	H2 MFC set to  500.000000
8/22/2011	7:18:13 PM	BCl3 MFC set to  0.000000
8/22/2011	7:18:13 PM	PHl3 MFC set to  0.000000
8/22/2011	7:18:13 PM	SiCl4 MFC set to  0.000000
8/22/2011	7:18:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	7:18:13 PM	Tube furnace set to 750
8/22/2011	7:23:13 PM	H2 valve closed
8/22/2011	7:23:13 PM	BCl3 valve closed
8/22/2011	7:23:13 PM	PH3 valve closed
8/22/2011	7:23:13 PM	SiCl4 pre valve closed
8/22/2011	7:23:13 PM	SiCl4 post valve closed
8/22/2011	7:23:13 PM	Main Vac valve closed
8/22/2011	7:23:13 PM	Bypass valve closed
8/22/2011	7:23:13 PM	Helium valve opened
8/22/2011	7:23:13 PM	Bubbler valve opened
8/22/2011	7:23:13 PM	Helium MFC set to  500.000000
8/22/2011	7:23:13 PM	H2 MFC set to  0.000000
8/22/2011	7:23:13 PM	BCl3 MFC set to  0.000000
8/22/2011	7:23:13 PM	PHl3 MFC set to  0.000000
8/22/2011	7:23:13 PM	SiCl4 MFC set to  0.000000
8/22/2011	7:23:13 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	7:23:13 PM	Tube furnace set to 0
8/22/2011	7:56:33 PM	Helium valve closed
8/22/2011	7:56:33 PM	H2 valve closed
8/22/2011	7:56:33 PM	BCl3 valve closed
8/22/2011	7:56:33 PM	PH3 valve closed
8/22/2011	7:56:33 PM	SiCl4 pre valve closed
8/22/2011	7:56:33 PM	SiCl4 post valve closed
8/22/2011	7:56:33 PM	Main Vac valve closed
8/22/2011	7:56:33 PM	Bypass valve closed
8/22/2011	7:56:33 PM	Bubbler valve closed
8/22/2011	7:56:33 PM	Helium MFC set to  0.000000
8/22/2011	7:56:33 PM	H2 MFC set to  0.000000
8/22/2011	7:56:33 PM	BCl3 MFC set to  0.000000
8/22/2011	7:56:33 PM	PHl3 MFC set to  0.000000
8/22/2011	7:56:33 PM	SiCl4 MFC set to  0.000000
8/22/2011	7:56:33 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	7:56:33 PM	Tube furnace set to 0
8/22/2011	7:56:34 PM	Run finished at 7:56 PM
8/22/2011	9:51:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	9:51:39 PM	Recipe started at 9:51 PM
8/22/2011	9:51:39 PM	Helium valve closed
8/22/2011	9:51:39 PM	H2 valve closed
8/22/2011	9:51:39 PM	BCl3 valve closed
8/22/2011	9:51:39 PM	PH3 valve closed
8/22/2011	9:51:39 PM	SiCl4 pre valve closed
8/22/2011	9:51:39 PM	SiCl4 post valve closed
8/22/2011	9:51:39 PM	Main Vac valve closed
8/22/2011	9:51:39 PM	Bubbler valve closed
8/22/2011	9:51:39 PM	Bypass valve opened
8/22/2011	9:51:39 PM	Helium MFC set to  0.000000
8/22/2011	9:51:39 PM	H2 MFC set to  0.000000
8/22/2011	9:51:39 PM	BCl3 MFC set to  0.000000
8/22/2011	9:51:39 PM	PHl3 MFC set to  0.000000
8/22/2011	9:51:39 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:51:39 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:51:39 PM	Tube furnace set to 0
8/22/2011	9:52:46 PM	Helium valve closed
8/22/2011	9:52:46 PM	H2 valve closed
8/22/2011	9:52:46 PM	BCl3 valve closed
8/22/2011	9:52:46 PM	PH3 valve closed
8/22/2011	9:52:46 PM	SiCl4 pre valve closed
8/22/2011	9:52:46 PM	SiCl4 post valve closed
8/22/2011	9:52:46 PM	Main Vac valve closed
8/22/2011	9:52:46 PM	Bubbler valve closed
8/22/2011	9:52:46 PM	Bypass valve opened
8/22/2011	9:52:46 PM	Helium MFC set to  0.000000
8/22/2011	9:52:46 PM	H2 MFC set to  0.000000
8/22/2011	9:52:46 PM	BCl3 MFC set to  0.000000
8/22/2011	9:52:46 PM	PHl3 MFC set to  0.000000
8/22/2011	9:52:46 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:52:46 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:52:46 PM	Tube furnace set to 0
8/22/2011	9:53:46 PM	Helium valve closed
8/22/2011	9:53:46 PM	H2 valve closed
8/22/2011	9:53:46 PM	BCl3 valve closed
8/22/2011	9:53:46 PM	PH3 valve closed
8/22/2011	9:53:46 PM	SiCl4 pre valve closed
8/22/2011	9:53:46 PM	SiCl4 post valve closed
8/22/2011	9:53:46 PM	Bypass valve closed
8/22/2011	9:53:46 PM	Bubbler valve closed
8/22/2011	9:53:46 PM	Main Vac valve opened
8/22/2011	9:53:46 PM	Helium MFC set to  0.000000
8/22/2011	9:53:46 PM	H2 MFC set to  0.000000
8/22/2011	9:53:46 PM	BCl3 MFC set to  0.000000
8/22/2011	9:53:46 PM	PHl3 MFC set to  0.000000
8/22/2011	9:53:46 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:53:46 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:53:46 PM	Tube furnace set to 0
8/22/2011	9:53:47 PM	Run finished at 9:53 PM
8/22/2011	9:53:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	9:54:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	9:54:55 PM	Recipe started at 9:54 PM
8/22/2011	9:54:55 PM	Helium valve closed
8/22/2011	9:54:55 PM	H2 valve closed
8/22/2011	9:54:55 PM	BCl3 valve closed
8/22/2011	9:54:55 PM	PH3 valve closed
8/22/2011	9:54:55 PM	SiCl4 pre valve closed
8/22/2011	9:54:55 PM	SiCl4 post valve closed
8/22/2011	9:54:55 PM	Main Vac valve closed
8/22/2011	9:54:55 PM	Bubbler valve closed
8/22/2011	9:54:55 PM	Bypass valve opened
8/22/2011	9:54:55 PM	Helium MFC set to  0.000000
8/22/2011	9:54:55 PM	H2 MFC set to  0.000000
8/22/2011	9:54:55 PM	BCl3 MFC set to  0.000000
8/22/2011	9:54:55 PM	PHl3 MFC set to  0.000000
8/22/2011	9:54:55 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:54:55 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:54:55 PM	Tube furnace set to 0
8/22/2011	9:54:55 PM	Helium valve closed
8/22/2011	9:54:55 PM	H2 valve closed
8/22/2011	9:54:55 PM	BCl3 valve closed
8/22/2011	9:54:55 PM	PH3 valve closed
8/22/2011	9:54:55 PM	SiCl4 pre valve closed
8/22/2011	9:54:55 PM	SiCl4 post valve closed
8/22/2011	9:54:55 PM	Main Vac valve closed
8/22/2011	9:54:55 PM	Bubbler valve closed
8/22/2011	9:54:55 PM	Bypass valve opened
8/22/2011	9:54:55 PM	Helium MFC set to  0.000000
8/22/2011	9:54:55 PM	H2 MFC set to  0.000000
8/22/2011	9:54:55 PM	BCl3 MFC set to  0.000000
8/22/2011	9:54:55 PM	PHl3 MFC set to  0.000000
8/22/2011	9:54:55 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:54:55 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:54:55 PM	Tube furnace set to 0
8/22/2011	9:55:25 PM	Helium valve closed
8/22/2011	9:55:25 PM	H2 valve closed
8/22/2011	9:55:25 PM	BCl3 valve closed
8/22/2011	9:55:25 PM	PH3 valve closed
8/22/2011	9:55:25 PM	SiCl4 pre valve closed
8/22/2011	9:55:25 PM	SiCl4 post valve closed
8/22/2011	9:55:25 PM	Bypass valve closed
8/22/2011	9:55:25 PM	Bubbler valve closed
8/22/2011	9:55:25 PM	Main Vac valve opened
8/22/2011	9:55:25 PM	Helium MFC set to  0.000000
8/22/2011	9:55:25 PM	H2 MFC set to  0.000000
8/22/2011	9:55:25 PM	BCl3 MFC set to  0.000000
8/22/2011	9:55:25 PM	PHl3 MFC set to  0.000000
8/22/2011	9:55:25 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:55:25 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:55:26 PM	Tube furnace set to 0
8/22/2011	9:55:56 PM	H2 valve closed
8/22/2011	9:55:56 PM	BCl3 valve closed
8/22/2011	9:55:56 PM	PH3 valve closed
8/22/2011	9:55:56 PM	SiCl4 pre valve closed
8/22/2011	9:55:56 PM	SiCl4 post valve closed
8/22/2011	9:55:56 PM	Bypass valve closed
8/22/2011	9:55:56 PM	Bubbler valve closed
8/22/2011	9:55:56 PM	Helium valve opened
8/22/2011	9:55:56 PM	Main Vac valve opened
8/22/2011	9:55:56 PM	Helium MFC set to  20.000000
8/22/2011	9:55:56 PM	H2 MFC set to  0.000000
8/22/2011	9:55:56 PM	BCl3 MFC set to  0.000000
8/22/2011	9:55:56 PM	PHl3 MFC set to  0.000000
8/22/2011	9:55:56 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:55:56 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:55:56 PM	Tube furnace set to 0
8/22/2011	9:56:26 PM	Helium valve closed
8/22/2011	9:56:26 PM	H2 valve closed
8/22/2011	9:56:26 PM	BCl3 valve closed
8/22/2011	9:56:26 PM	PH3 valve closed
8/22/2011	9:56:26 PM	SiCl4 pre valve closed
8/22/2011	9:56:26 PM	SiCl4 post valve closed
8/22/2011	9:56:26 PM	Bypass valve closed
8/22/2011	9:56:26 PM	Bubbler valve closed
8/22/2011	9:56:26 PM	Main Vac valve opened
8/22/2011	9:56:26 PM	Helium MFC set to  0.000000
8/22/2011	9:56:26 PM	H2 MFC set to  0.000000
8/22/2011	9:56:26 PM	BCl3 MFC set to  0.000000
8/22/2011	9:56:26 PM	PHl3 MFC set to  0.000000
8/22/2011	9:56:26 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:56:26 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:56:26 PM	Tube furnace set to 0
8/22/2011	9:56:56 PM	H2 valve closed
8/22/2011	9:56:56 PM	BCl3 valve closed
8/22/2011	9:56:56 PM	PH3 valve closed
8/22/2011	9:56:56 PM	SiCl4 pre valve closed
8/22/2011	9:56:56 PM	SiCl4 post valve closed
8/22/2011	9:56:56 PM	Bypass valve closed
8/22/2011	9:56:56 PM	Bubbler valve closed
8/22/2011	9:56:56 PM	Helium valve opened
8/22/2011	9:56:56 PM	Main Vac valve opened
8/22/2011	9:56:56 PM	Helium MFC set to  20.000000
8/22/2011	9:56:56 PM	H2 MFC set to  0.000000
8/22/2011	9:56:56 PM	BCl3 MFC set to  0.000000
8/22/2011	9:56:56 PM	PHl3 MFC set to  0.000000
8/22/2011	9:56:56 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:56:56 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:56:56 PM	Tube furnace set to 0
8/22/2011	9:57:26 PM	Helium valve closed
8/22/2011	9:57:26 PM	H2 valve closed
8/22/2011	9:57:26 PM	BCl3 valve closed
8/22/2011	9:57:26 PM	PH3 valve closed
8/22/2011	9:57:26 PM	SiCl4 pre valve closed
8/22/2011	9:57:26 PM	SiCl4 post valve closed
8/22/2011	9:57:26 PM	Bypass valve closed
8/22/2011	9:57:26 PM	Bubbler valve closed
8/22/2011	9:57:26 PM	Main Vac valve opened
8/22/2011	9:57:26 PM	Helium MFC set to  0.000000
8/22/2011	9:57:26 PM	H2 MFC set to  0.000000
8/22/2011	9:57:26 PM	BCl3 MFC set to  0.000000
8/22/2011	9:57:26 PM	PHl3 MFC set to  0.000000
8/22/2011	9:57:26 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:57:26 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:57:26 PM	Tube furnace set to 0
8/22/2011	9:57:56 PM	H2 valve closed
8/22/2011	9:57:56 PM	BCl3 valve closed
8/22/2011	9:57:56 PM	PH3 valve closed
8/22/2011	9:57:56 PM	SiCl4 pre valve closed
8/22/2011	9:57:56 PM	SiCl4 post valve closed
8/22/2011	9:57:56 PM	Bypass valve closed
8/22/2011	9:57:56 PM	Bubbler valve closed
8/22/2011	9:57:56 PM	Helium valve opened
8/22/2011	9:57:56 PM	Main Vac valve opened
8/22/2011	9:57:56 PM	Helium MFC set to  20.000000
8/22/2011	9:57:56 PM	H2 MFC set to  0.000000
8/22/2011	9:57:56 PM	BCl3 MFC set to  0.000000
8/22/2011	9:57:56 PM	PHl3 MFC set to  0.000000
8/22/2011	9:57:56 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:57:56 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:57:57 PM	Tube furnace set to 0
8/22/2011	9:58:27 PM	Helium valve closed
8/22/2011	9:58:27 PM	H2 valve closed
8/22/2011	9:58:27 PM	BCl3 valve closed
8/22/2011	9:58:27 PM	PH3 valve closed
8/22/2011	9:58:27 PM	SiCl4 pre valve closed
8/22/2011	9:58:27 PM	SiCl4 post valve closed
8/22/2011	9:58:27 PM	Bypass valve closed
8/22/2011	9:58:27 PM	Bubbler valve closed
8/22/2011	9:58:27 PM	Main Vac valve opened
8/22/2011	9:58:27 PM	Helium MFC set to  0.000000
8/22/2011	9:58:27 PM	H2 MFC set to  0.000000
8/22/2011	9:58:27 PM	BCl3 MFC set to  0.000000
8/22/2011	9:58:27 PM	PHl3 MFC set to  0.000000
8/22/2011	9:58:27 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:58:27 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:58:27 PM	Tube furnace set to 0
8/22/2011	9:58:57 PM	H2 valve closed
8/22/2011	9:58:57 PM	BCl3 valve closed
8/22/2011	9:58:57 PM	PH3 valve closed
8/22/2011	9:58:57 PM	SiCl4 pre valve closed
8/22/2011	9:58:57 PM	SiCl4 post valve closed
8/22/2011	9:58:57 PM	Bypass valve closed
8/22/2011	9:58:57 PM	Bubbler valve closed
8/22/2011	9:58:57 PM	Helium valve opened
8/22/2011	9:58:57 PM	Main Vac valve opened
8/22/2011	9:58:57 PM	Helium MFC set to  20.000000
8/22/2011	9:58:57 PM	H2 MFC set to  0.000000
8/22/2011	9:58:57 PM	BCl3 MFC set to  0.000000
8/22/2011	9:58:57 PM	PHl3 MFC set to  0.000000
8/22/2011	9:58:57 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:58:57 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:58:57 PM	Tube furnace set to 0
8/22/2011	9:59:27 PM	Helium valve closed
8/22/2011	9:59:27 PM	H2 valve closed
8/22/2011	9:59:27 PM	BCl3 valve closed
8/22/2011	9:59:27 PM	PH3 valve closed
8/22/2011	9:59:27 PM	SiCl4 pre valve closed
8/22/2011	9:59:27 PM	SiCl4 post valve closed
8/22/2011	9:59:27 PM	Bypass valve closed
8/22/2011	9:59:27 PM	Bubbler valve closed
8/22/2011	9:59:27 PM	Main Vac valve opened
8/22/2011	9:59:27 PM	Helium MFC set to  0.000000
8/22/2011	9:59:27 PM	H2 MFC set to  0.000000
8/22/2011	9:59:27 PM	BCl3 MFC set to  0.000000
8/22/2011	9:59:27 PM	PHl3 MFC set to  0.000000
8/22/2011	9:59:27 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:59:27 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:59:27 PM	Tube furnace set to 0
8/22/2011	9:59:57 PM	H2 valve closed
8/22/2011	9:59:57 PM	BCl3 valve closed
8/22/2011	9:59:57 PM	PH3 valve closed
8/22/2011	9:59:57 PM	SiCl4 pre valve closed
8/22/2011	9:59:57 PM	SiCl4 post valve closed
8/22/2011	9:59:57 PM	Bypass valve closed
8/22/2011	9:59:57 PM	Bubbler valve closed
8/22/2011	9:59:57 PM	Helium valve opened
8/22/2011	9:59:57 PM	Main Vac valve opened
8/22/2011	9:59:57 PM	Helium MFC set to  20.000000
8/22/2011	9:59:57 PM	H2 MFC set to  0.000000
8/22/2011	9:59:57 PM	BCl3 MFC set to  0.000000
8/22/2011	9:59:57 PM	PHl3 MFC set to  0.000000
8/22/2011	9:59:57 PM	SiCl4 MFC set to  0.000000
8/22/2011	9:59:57 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	9:59:57 PM	Tube furnace set to 0
8/22/2011	10:00:27 PM	Helium valve closed
8/22/2011	10:00:27 PM	H2 valve closed
8/22/2011	10:00:27 PM	BCl3 valve closed
8/22/2011	10:00:27 PM	PH3 valve closed
8/22/2011	10:00:27 PM	SiCl4 pre valve closed
8/22/2011	10:00:27 PM	SiCl4 post valve closed
8/22/2011	10:00:27 PM	Bypass valve closed
8/22/2011	10:00:27 PM	Bubbler valve closed
8/22/2011	10:00:27 PM	Main Vac valve opened
8/22/2011	10:00:27 PM	Helium MFC set to  0.000000
8/22/2011	10:00:27 PM	H2 MFC set to  0.000000
8/22/2011	10:00:27 PM	BCl3 MFC set to  0.000000
8/22/2011	10:00:27 PM	PHl3 MFC set to  0.000000
8/22/2011	10:00:27 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:00:27 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:00:28 PM	Tube furnace set to 0
8/22/2011	10:00:58 PM	H2 valve closed
8/22/2011	10:00:58 PM	BCl3 valve closed
8/22/2011	10:00:58 PM	PH3 valve closed
8/22/2011	10:00:58 PM	SiCl4 pre valve closed
8/22/2011	10:00:58 PM	SiCl4 post valve closed
8/22/2011	10:00:58 PM	Bypass valve closed
8/22/2011	10:00:58 PM	Bubbler valve closed
8/22/2011	10:00:58 PM	Helium valve opened
8/22/2011	10:00:58 PM	Main Vac valve opened
8/22/2011	10:00:58 PM	Helium MFC set to  20.000000
8/22/2011	10:00:58 PM	H2 MFC set to  0.000000
8/22/2011	10:00:58 PM	BCl3 MFC set to  0.000000
8/22/2011	10:00:58 PM	PHl3 MFC set to  0.000000
8/22/2011	10:00:58 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:00:58 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:00:58 PM	Tube furnace set to 0
8/22/2011	10:01:28 PM	Helium valve closed
8/22/2011	10:01:28 PM	H2 valve closed
8/22/2011	10:01:28 PM	BCl3 valve closed
8/22/2011	10:01:28 PM	PH3 valve closed
8/22/2011	10:01:28 PM	SiCl4 pre valve closed
8/22/2011	10:01:28 PM	SiCl4 post valve closed
8/22/2011	10:01:28 PM	Bypass valve closed
8/22/2011	10:01:28 PM	Bubbler valve closed
8/22/2011	10:01:28 PM	Main Vac valve opened
8/22/2011	10:01:28 PM	Helium MFC set to  0.000000
8/22/2011	10:01:28 PM	H2 MFC set to  0.000000
8/22/2011	10:01:28 PM	BCl3 MFC set to  0.000000
8/22/2011	10:01:28 PM	PHl3 MFC set to  0.000000
8/22/2011	10:01:28 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:01:28 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:01:28 PM	Tube furnace set to 0
8/22/2011	10:01:58 PM	H2 valve closed
8/22/2011	10:01:58 PM	BCl3 valve closed
8/22/2011	10:01:58 PM	PH3 valve closed
8/22/2011	10:01:58 PM	SiCl4 pre valve closed
8/22/2011	10:01:58 PM	SiCl4 post valve closed
8/22/2011	10:01:58 PM	Bypass valve closed
8/22/2011	10:01:58 PM	Bubbler valve closed
8/22/2011	10:01:58 PM	Helium valve opened
8/22/2011	10:01:58 PM	Main Vac valve opened
8/22/2011	10:01:58 PM	Helium MFC set to  20.000000
8/22/2011	10:01:58 PM	H2 MFC set to  0.000000
8/22/2011	10:01:58 PM	BCl3 MFC set to  0.000000
8/22/2011	10:01:58 PM	PHl3 MFC set to  0.000000
8/22/2011	10:01:58 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:01:58 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:01:58 PM	Tube furnace set to 0
8/22/2011	10:02:28 PM	Helium valve closed
8/22/2011	10:02:28 PM	H2 valve closed
8/22/2011	10:02:28 PM	BCl3 valve closed
8/22/2011	10:02:28 PM	PH3 valve closed
8/22/2011	10:02:28 PM	SiCl4 pre valve closed
8/22/2011	10:02:28 PM	SiCl4 post valve closed
8/22/2011	10:02:28 PM	Bypass valve closed
8/22/2011	10:02:28 PM	Bubbler valve closed
8/22/2011	10:02:28 PM	Main Vac valve opened
8/22/2011	10:02:28 PM	Helium MFC set to  0.000000
8/22/2011	10:02:28 PM	H2 MFC set to  0.000000
8/22/2011	10:02:28 PM	BCl3 MFC set to  0.000000
8/22/2011	10:02:28 PM	PHl3 MFC set to  0.000000
8/22/2011	10:02:28 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:02:28 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:02:28 PM	Tube furnace set to 0
8/22/2011	10:02:58 PM	H2 valve closed
8/22/2011	10:02:58 PM	BCl3 valve closed
8/22/2011	10:02:58 PM	PH3 valve closed
8/22/2011	10:02:58 PM	SiCl4 pre valve closed
8/22/2011	10:02:58 PM	SiCl4 post valve closed
8/22/2011	10:02:58 PM	Bypass valve closed
8/22/2011	10:02:58 PM	Bubbler valve closed
8/22/2011	10:02:58 PM	Helium valve opened
8/22/2011	10:02:58 PM	Main Vac valve opened
8/22/2011	10:02:58 PM	Helium MFC set to  20.000000
8/22/2011	10:02:58 PM	H2 MFC set to  0.000000
8/22/2011	10:02:58 PM	BCl3 MFC set to  0.000000
8/22/2011	10:02:58 PM	PHl3 MFC set to  0.000000
8/22/2011	10:02:58 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:02:58 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:02:59 PM	Tube furnace set to 0
8/22/2011	10:03:29 PM	Helium valve closed
8/22/2011	10:03:29 PM	H2 valve closed
8/22/2011	10:03:29 PM	BCl3 valve closed
8/22/2011	10:03:29 PM	PH3 valve closed
8/22/2011	10:03:29 PM	SiCl4 pre valve closed
8/22/2011	10:03:29 PM	SiCl4 post valve closed
8/22/2011	10:03:29 PM	Bypass valve closed
8/22/2011	10:03:29 PM	Bubbler valve closed
8/22/2011	10:03:29 PM	Main Vac valve opened
8/22/2011	10:03:29 PM	Helium MFC set to  0.000000
8/22/2011	10:03:29 PM	H2 MFC set to  0.000000
8/22/2011	10:03:29 PM	BCl3 MFC set to  0.000000
8/22/2011	10:03:29 PM	PHl3 MFC set to  0.000000
8/22/2011	10:03:29 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:03:29 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:03:29 PM	Tube furnace set to 0
8/22/2011	10:03:59 PM	H2 valve closed
8/22/2011	10:03:59 PM	BCl3 valve closed
8/22/2011	10:03:59 PM	PH3 valve closed
8/22/2011	10:03:59 PM	SiCl4 pre valve closed
8/22/2011	10:03:59 PM	SiCl4 post valve closed
8/22/2011	10:03:59 PM	Bypass valve closed
8/22/2011	10:03:59 PM	Bubbler valve closed
8/22/2011	10:03:59 PM	Helium valve opened
8/22/2011	10:03:59 PM	Main Vac valve opened
8/22/2011	10:03:59 PM	Helium MFC set to  20.000000
8/22/2011	10:03:59 PM	H2 MFC set to  0.000000
8/22/2011	10:03:59 PM	BCl3 MFC set to  0.000000
8/22/2011	10:03:59 PM	PHl3 MFC set to  0.000000
8/22/2011	10:03:59 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:03:59 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:03:59 PM	Tube furnace set to 0
8/22/2011	10:04:29 PM	Helium valve closed
8/22/2011	10:04:29 PM	H2 valve closed
8/22/2011	10:04:29 PM	BCl3 valve closed
8/22/2011	10:04:29 PM	PH3 valve closed
8/22/2011	10:04:29 PM	SiCl4 pre valve closed
8/22/2011	10:04:29 PM	SiCl4 post valve closed
8/22/2011	10:04:29 PM	Bypass valve closed
8/22/2011	10:04:29 PM	Bubbler valve closed
8/22/2011	10:04:29 PM	Main Vac valve opened
8/22/2011	10:04:29 PM	Helium MFC set to  0.000000
8/22/2011	10:04:29 PM	H2 MFC set to  0.000000
8/22/2011	10:04:29 PM	BCl3 MFC set to  0.000000
8/22/2011	10:04:29 PM	PHl3 MFC set to  0.000000
8/22/2011	10:04:29 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:04:29 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:04:29 PM	Tube furnace set to 0
8/22/2011	10:04:59 PM	H2 valve closed
8/22/2011	10:04:59 PM	BCl3 valve closed
8/22/2011	10:04:59 PM	PH3 valve closed
8/22/2011	10:04:59 PM	SiCl4 pre valve closed
8/22/2011	10:04:59 PM	SiCl4 post valve closed
8/22/2011	10:04:59 PM	Bypass valve closed
8/22/2011	10:04:59 PM	Bubbler valve closed
8/22/2011	10:04:59 PM	Helium valve opened
8/22/2011	10:04:59 PM	Main Vac valve opened
8/22/2011	10:04:59 PM	Helium MFC set to  20.000000
8/22/2011	10:04:59 PM	H2 MFC set to  0.000000
8/22/2011	10:04:59 PM	BCl3 MFC set to  0.000000
8/22/2011	10:04:59 PM	PHl3 MFC set to  0.000000
8/22/2011	10:04:59 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:04:59 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:05:00 PM	Tube furnace set to 0
8/22/2011	10:05:30 PM	Helium valve closed
8/22/2011	10:05:30 PM	H2 valve closed
8/22/2011	10:05:30 PM	BCl3 valve closed
8/22/2011	10:05:30 PM	PH3 valve closed
8/22/2011	10:05:30 PM	SiCl4 pre valve closed
8/22/2011	10:05:30 PM	SiCl4 post valve closed
8/22/2011	10:05:30 PM	Bypass valve closed
8/22/2011	10:05:30 PM	Bubbler valve closed
8/22/2011	10:05:30 PM	Main Vac valve opened
8/22/2011	10:05:30 PM	Helium MFC set to  0.000000
8/22/2011	10:05:30 PM	H2 MFC set to  0.000000
8/22/2011	10:05:30 PM	BCl3 MFC set to  0.000000
8/22/2011	10:05:30 PM	PHl3 MFC set to  0.000000
8/22/2011	10:05:30 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:05:30 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:05:30 PM	Tube furnace set to 0
8/22/2011	10:05:31 PM	Run finished at 10:05 PM
8/22/2011	10:05:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	10:12:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/22/2011	10:12:03 PM	Recipe started at 10:12 PM
8/22/2011	10:12:03 PM	Helium valve closed
8/22/2011	10:12:03 PM	H2 valve closed
8/22/2011	10:12:03 PM	BCl3 valve closed
8/22/2011	10:12:03 PM	PH3 valve closed
8/22/2011	10:12:03 PM	SiCl4 pre valve closed
8/22/2011	10:12:03 PM	SiCl4 post valve closed
8/22/2011	10:12:03 PM	Main Vac valve closed
8/22/2011	10:12:03 PM	Bypass valve closed
8/22/2011	10:12:03 PM	Bubbler valve closed
8/22/2011	10:12:03 PM	Helium MFC set to  0.000000
8/22/2011	10:12:03 PM	H2 MFC set to  0.000000
8/22/2011	10:12:03 PM	BCl3 MFC set to  0.000000
8/22/2011	10:12:03 PM	PHl3 MFC set to  0.000000
8/22/2011	10:12:03 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:12:03 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:12:03 PM	Tube furnace set to 0
8/22/2011	10:12:03 PM	Run finished at 10:12 PM
8/22/2011	10:12:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/22/2011	10:12:24 PM	Main Vac valve opened
8/22/2011	10:13:26 PM	Recipe started at 10:13 PM
8/22/2011	10:13:27 PM	Helium valve closed
8/22/2011	10:13:27 PM	H2 valve closed
8/22/2011	10:13:27 PM	BCl3 valve closed
8/22/2011	10:13:27 PM	PH3 valve closed
8/22/2011	10:13:27 PM	SiCl4 pre valve closed
8/22/2011	10:13:27 PM	SiCl4 post valve closed
8/22/2011	10:13:27 PM	Main Vac valve closed
8/22/2011	10:13:27 PM	Bypass valve closed
8/22/2011	10:13:27 PM	Bubbler valve closed
8/22/2011	10:13:27 PM	Helium MFC set to  0.000000
8/22/2011	10:13:27 PM	H2 MFC set to  0.000000
8/22/2011	10:13:27 PM	BCl3 MFC set to  0.000000
8/22/2011	10:13:27 PM	PHl3 MFC set to  0.000000
8/22/2011	10:13:27 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:13:27 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:13:27 PM	Tube furnace set to 0
8/22/2011	10:13:30 PM	Helium valve closed
8/22/2011	10:13:30 PM	BCl3 valve closed
8/22/2011	10:13:30 PM	PH3 valve closed
8/22/2011	10:13:30 PM	SiCl4 pre valve closed
8/22/2011	10:13:30 PM	SiCl4 post valve closed
8/22/2011	10:13:30 PM	Main Vac valve closed
8/22/2011	10:13:30 PM	Bypass valve closed
8/22/2011	10:13:30 PM	Bubbler valve closed
8/22/2011	10:13:30 PM	H2 valve opened
8/22/2011	10:13:30 PM	Helium MFC set to  0.000000
8/22/2011	10:13:30 PM	H2 MFC set to  500.000000
8/22/2011	10:13:30 PM	BCl3 MFC set to  0.000000
8/22/2011	10:13:30 PM	PHl3 MFC set to  0.000000
8/22/2011	10:13:30 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:13:30 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:13:30 PM	Tube furnace set to 0
8/22/2011	10:14:38 PM	Helium valve closed
8/22/2011	10:14:38 PM	BCl3 valve closed
8/22/2011	10:14:38 PM	PH3 valve closed
8/22/2011	10:14:38 PM	SiCl4 pre valve closed
8/22/2011	10:14:38 PM	SiCl4 post valve closed
8/22/2011	10:14:38 PM	Main Vac valve closed
8/22/2011	10:14:38 PM	Bypass valve closed
8/22/2011	10:14:38 PM	H2 valve opened
8/22/2011	10:14:38 PM	Bubbler valve opened
8/22/2011	10:14:38 PM	Helium MFC set to  0.000000
8/22/2011	10:14:38 PM	H2 MFC set to  500.000000
8/22/2011	10:14:38 PM	BCl3 MFC set to  0.000000
8/22/2011	10:14:38 PM	PHl3 MFC set to  0.000000
8/22/2011	10:14:38 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:14:38 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:14:38 PM	Tube furnace set to 0
8/22/2011	10:14:39 PM	Helium valve closed
8/22/2011	10:14:39 PM	BCl3 valve closed
8/22/2011	10:14:39 PM	PH3 valve closed
8/22/2011	10:14:39 PM	SiCl4 pre valve closed
8/22/2011	10:14:39 PM	SiCl4 post valve closed
8/22/2011	10:14:39 PM	Main Vac valve closed
8/22/2011	10:14:39 PM	Bypass valve closed
8/22/2011	10:14:39 PM	H2 valve opened
8/22/2011	10:14:39 PM	Bubbler valve opened
8/22/2011	10:14:39 PM	Helium MFC set to  0.000000
8/22/2011	10:14:39 PM	H2 MFC set to  500.000000
8/22/2011	10:14:39 PM	BCl3 MFC set to  0.000000
8/22/2011	10:14:39 PM	PHl3 MFC set to  0.000000
8/22/2011	10:14:39 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:14:39 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:14:40 PM	Tube furnace set to 1000
8/22/2011	10:34:40 PM	Helium valve closed
8/22/2011	10:34:40 PM	PH3 valve closed
8/22/2011	10:34:40 PM	Main Vac valve closed
8/22/2011	10:34:40 PM	Bypass valve closed
8/22/2011	10:34:40 PM	H2 valve opened
8/22/2011	10:34:40 PM	BCl3 valve opened
8/22/2011	10:34:40 PM	SiCl4 pre valve opened
8/22/2011	10:34:40 PM	SiCl4 post valve opened
8/22/2011	10:34:40 PM	Bubbler valve opened
8/22/2011	10:34:40 PM	Helium MFC set to  0.000000
8/22/2011	10:34:40 PM	H2 MFC set to  500.000000
8/22/2011	10:34:40 PM	BCl3 MFC set to  2.500000
8/22/2011	10:34:40 PM	PHl3 MFC set to  0.000000
8/22/2011	10:34:40 PM	SiCl4 MFC set to  50.000000
8/22/2011	10:34:40 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:34:40 PM	Tube furnace set to 1000
8/22/2011	10:39:40 PM	Helium valve closed
8/22/2011	10:39:40 PM	BCl3 valve closed
8/22/2011	10:39:40 PM	PH3 valve closed
8/22/2011	10:39:40 PM	SiCl4 pre valve closed
8/22/2011	10:39:40 PM	SiCl4 post valve closed
8/22/2011	10:39:40 PM	Main Vac valve closed
8/22/2011	10:39:40 PM	Bypass valve closed
8/22/2011	10:39:40 PM	H2 valve opened
8/22/2011	10:39:40 PM	Bubbler valve opened
8/22/2011	10:39:40 PM	Helium MFC set to  0.000000
8/22/2011	10:39:40 PM	H2 MFC set to  500.000000
8/22/2011	10:39:40 PM	BCl3 MFC set to  0.000000
8/22/2011	10:39:40 PM	PHl3 MFC set to  0.000000
8/22/2011	10:39:40 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:39:40 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:39:40 PM	Tube furnace set to 750
8/22/2011	10:44:40 PM	H2 valve closed
8/22/2011	10:44:40 PM	BCl3 valve closed
8/22/2011	10:44:40 PM	PH3 valve closed
8/22/2011	10:44:40 PM	SiCl4 pre valve closed
8/22/2011	10:44:40 PM	SiCl4 post valve closed
8/22/2011	10:44:40 PM	Main Vac valve closed
8/22/2011	10:44:40 PM	Bypass valve closed
8/22/2011	10:44:40 PM	Helium valve opened
8/22/2011	10:44:40 PM	Bubbler valve opened
8/22/2011	10:44:40 PM	Helium MFC set to  500.000000
8/22/2011	10:44:40 PM	H2 MFC set to  0.000000
8/22/2011	10:44:40 PM	BCl3 MFC set to  0.000000
8/22/2011	10:44:40 PM	PHl3 MFC set to  0.000000
8/22/2011	10:44:40 PM	SiCl4 MFC set to  0.000000
8/22/2011	10:44:40 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	10:44:40 PM	Tube furnace set to 0
8/22/2011	11:18:00 PM	Helium valve closed
8/22/2011	11:18:00 PM	H2 valve closed
8/22/2011	11:18:00 PM	BCl3 valve closed
8/22/2011	11:18:00 PM	PH3 valve closed
8/22/2011	11:18:00 PM	SiCl4 pre valve closed
8/22/2011	11:18:00 PM	SiCl4 post valve closed
8/22/2011	11:18:00 PM	Main Vac valve closed
8/22/2011	11:18:00 PM	Bypass valve closed
8/22/2011	11:18:00 PM	Bubbler valve closed
8/22/2011	11:18:00 PM	Helium MFC set to  0.000000
8/22/2011	11:18:00 PM	H2 MFC set to  0.000000
8/22/2011	11:18:00 PM	BCl3 MFC set to  0.000000
8/22/2011	11:18:00 PM	PHl3 MFC set to  0.000000
8/22/2011	11:18:00 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:18:00 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:18:00 PM	Tube furnace set to 0
8/22/2011	11:18:01 PM	Run finished at 11:18 PM
8/22/2011	11:26:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	11:26:59 PM	Recipe started at 11:26 PM
8/22/2011	11:26:59 PM	Helium valve closed
8/22/2011	11:26:59 PM	H2 valve closed
8/22/2011	11:26:59 PM	BCl3 valve closed
8/22/2011	11:26:59 PM	PH3 valve closed
8/22/2011	11:26:59 PM	SiCl4 pre valve closed
8/22/2011	11:26:59 PM	SiCl4 post valve closed
8/22/2011	11:26:59 PM	Main Vac valve closed
8/22/2011	11:26:59 PM	Bubbler valve closed
8/22/2011	11:26:59 PM	Bypass valve opened
8/22/2011	11:26:59 PM	Helium MFC set to  0.000000
8/22/2011	11:26:59 PM	H2 MFC set to  0.000000
8/22/2011	11:26:59 PM	BCl3 MFC set to  0.000000
8/22/2011	11:26:59 PM	PHl3 MFC set to  0.000000
8/22/2011	11:26:59 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:26:59 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:26:59 PM	Tube furnace set to 0
8/22/2011	11:28:02 PM	Helium valve closed
8/22/2011	11:28:02 PM	H2 valve closed
8/22/2011	11:28:02 PM	BCl3 valve closed
8/22/2011	11:28:02 PM	PH3 valve closed
8/22/2011	11:28:02 PM	SiCl4 pre valve closed
8/22/2011	11:28:02 PM	SiCl4 post valve closed
8/22/2011	11:28:02 PM	Main Vac valve closed
8/22/2011	11:28:02 PM	Bubbler valve closed
8/22/2011	11:28:02 PM	Bypass valve opened
8/22/2011	11:28:02 PM	Helium MFC set to  0.000000
8/22/2011	11:28:02 PM	H2 MFC set to  0.000000
8/22/2011	11:28:02 PM	BCl3 MFC set to  0.000000
8/22/2011	11:28:02 PM	PHl3 MFC set to  0.000000
8/22/2011	11:28:02 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:28:02 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:28:02 PM	Tube furnace set to 0
8/22/2011	11:29:02 PM	Helium valve closed
8/22/2011	11:29:02 PM	H2 valve closed
8/22/2011	11:29:02 PM	BCl3 valve closed
8/22/2011	11:29:02 PM	PH3 valve closed
8/22/2011	11:29:02 PM	SiCl4 pre valve closed
8/22/2011	11:29:02 PM	SiCl4 post valve closed
8/22/2011	11:29:02 PM	Bypass valve closed
8/22/2011	11:29:02 PM	Bubbler valve closed
8/22/2011	11:29:02 PM	Main Vac valve opened
8/22/2011	11:29:02 PM	Helium MFC set to  0.000000
8/22/2011	11:29:02 PM	H2 MFC set to  0.000000
8/22/2011	11:29:02 PM	BCl3 MFC set to  0.000000
8/22/2011	11:29:02 PM	PHl3 MFC set to  0.000000
8/22/2011	11:29:02 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:29:02 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:29:02 PM	Tube furnace set to 0
8/22/2011	11:29:03 PM	Run finished at 11:29 PM
8/22/2011	11:29:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/22/2011	11:33:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/22/2011	11:33:33 PM	Recipe started at 11:33 PM
8/22/2011	11:33:33 PM	Helium valve closed
8/22/2011	11:33:33 PM	H2 valve closed
8/22/2011	11:33:33 PM	BCl3 valve closed
8/22/2011	11:33:33 PM	PH3 valve closed
8/22/2011	11:33:33 PM	SiCl4 pre valve closed
8/22/2011	11:33:33 PM	SiCl4 post valve closed
8/22/2011	11:33:33 PM	Main Vac valve closed
8/22/2011	11:33:33 PM	Bubbler valve closed
8/22/2011	11:33:33 PM	Bypass valve opened
8/22/2011	11:33:33 PM	Helium MFC set to  0.000000
8/22/2011	11:33:33 PM	H2 MFC set to  0.000000
8/22/2011	11:33:33 PM	BCl3 MFC set to  0.000000
8/22/2011	11:33:33 PM	PHl3 MFC set to  0.000000
8/22/2011	11:33:33 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:33:33 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:33:33 PM	Tube furnace set to 0
8/22/2011	11:33:33 PM	Helium valve closed
8/22/2011	11:33:33 PM	H2 valve closed
8/22/2011	11:33:33 PM	BCl3 valve closed
8/22/2011	11:33:33 PM	PH3 valve closed
8/22/2011	11:33:33 PM	SiCl4 pre valve closed
8/22/2011	11:33:33 PM	SiCl4 post valve closed
8/22/2011	11:33:33 PM	Main Vac valve closed
8/22/2011	11:33:33 PM	Bubbler valve closed
8/22/2011	11:33:33 PM	Bypass valve opened
8/22/2011	11:33:33 PM	Helium MFC set to  0.000000
8/22/2011	11:33:33 PM	H2 MFC set to  0.000000
8/22/2011	11:33:33 PM	BCl3 MFC set to  0.000000
8/22/2011	11:33:33 PM	PHl3 MFC set to  0.000000
8/22/2011	11:33:34 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:33:34 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:33:34 PM	Tube furnace set to 0
8/22/2011	11:34:04 PM	Helium valve closed
8/22/2011	11:34:04 PM	H2 valve closed
8/22/2011	11:34:04 PM	BCl3 valve closed
8/22/2011	11:34:04 PM	PH3 valve closed
8/22/2011	11:34:04 PM	SiCl4 pre valve closed
8/22/2011	11:34:04 PM	SiCl4 post valve closed
8/22/2011	11:34:04 PM	Bypass valve closed
8/22/2011	11:34:04 PM	Bubbler valve closed
8/22/2011	11:34:04 PM	Main Vac valve opened
8/22/2011	11:34:04 PM	Helium MFC set to  0.000000
8/22/2011	11:34:04 PM	H2 MFC set to  0.000000
8/22/2011	11:34:04 PM	BCl3 MFC set to  0.000000
8/22/2011	11:34:04 PM	PHl3 MFC set to  0.000000
8/22/2011	11:34:04 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:34:04 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:34:04 PM	Tube furnace set to 0
8/22/2011	11:34:34 PM	H2 valve closed
8/22/2011	11:34:34 PM	BCl3 valve closed
8/22/2011	11:34:34 PM	PH3 valve closed
8/22/2011	11:34:34 PM	SiCl4 pre valve closed
8/22/2011	11:34:34 PM	SiCl4 post valve closed
8/22/2011	11:34:34 PM	Bypass valve closed
8/22/2011	11:34:34 PM	Bubbler valve closed
8/22/2011	11:34:34 PM	Helium valve opened
8/22/2011	11:34:34 PM	Main Vac valve opened
8/22/2011	11:34:34 PM	Helium MFC set to  20.000000
8/22/2011	11:34:34 PM	H2 MFC set to  0.000000
8/22/2011	11:34:34 PM	BCl3 MFC set to  0.000000
8/22/2011	11:34:34 PM	PHl3 MFC set to  0.000000
8/22/2011	11:34:34 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:34:34 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:34:34 PM	Tube furnace set to 0
8/22/2011	11:35:04 PM	Helium valve closed
8/22/2011	11:35:04 PM	H2 valve closed
8/22/2011	11:35:04 PM	BCl3 valve closed
8/22/2011	11:35:04 PM	PH3 valve closed
8/22/2011	11:35:04 PM	SiCl4 pre valve closed
8/22/2011	11:35:04 PM	SiCl4 post valve closed
8/22/2011	11:35:04 PM	Bypass valve closed
8/22/2011	11:35:04 PM	Bubbler valve closed
8/22/2011	11:35:04 PM	Main Vac valve opened
8/22/2011	11:35:04 PM	Helium MFC set to  0.000000
8/22/2011	11:35:04 PM	H2 MFC set to  0.000000
8/22/2011	11:35:04 PM	BCl3 MFC set to  0.000000
8/22/2011	11:35:04 PM	PHl3 MFC set to  0.000000
8/22/2011	11:35:04 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:35:04 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:35:04 PM	Tube furnace set to 0
8/22/2011	11:35:34 PM	H2 valve closed
8/22/2011	11:35:34 PM	BCl3 valve closed
8/22/2011	11:35:34 PM	PH3 valve closed
8/22/2011	11:35:34 PM	SiCl4 pre valve closed
8/22/2011	11:35:34 PM	SiCl4 post valve closed
8/22/2011	11:35:34 PM	Bypass valve closed
8/22/2011	11:35:34 PM	Bubbler valve closed
8/22/2011	11:35:34 PM	Helium valve opened
8/22/2011	11:35:34 PM	Main Vac valve opened
8/22/2011	11:35:34 PM	Helium MFC set to  20.000000
8/22/2011	11:35:34 PM	H2 MFC set to  0.000000
8/22/2011	11:35:34 PM	BCl3 MFC set to  0.000000
8/22/2011	11:35:34 PM	PHl3 MFC set to  0.000000
8/22/2011	11:35:34 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:35:34 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:35:34 PM	Tube furnace set to 0
8/22/2011	11:36:04 PM	Helium valve closed
8/22/2011	11:36:04 PM	H2 valve closed
8/22/2011	11:36:04 PM	BCl3 valve closed
8/22/2011	11:36:04 PM	PH3 valve closed
8/22/2011	11:36:04 PM	SiCl4 pre valve closed
8/22/2011	11:36:04 PM	SiCl4 post valve closed
8/22/2011	11:36:04 PM	Bypass valve closed
8/22/2011	11:36:04 PM	Bubbler valve closed
8/22/2011	11:36:04 PM	Main Vac valve opened
8/22/2011	11:36:04 PM	Helium MFC set to  0.000000
8/22/2011	11:36:04 PM	H2 MFC set to  0.000000
8/22/2011	11:36:04 PM	BCl3 MFC set to  0.000000
8/22/2011	11:36:04 PM	PHl3 MFC set to  0.000000
8/22/2011	11:36:04 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:36:04 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:36:05 PM	Tube furnace set to 0
8/22/2011	11:36:35 PM	H2 valve closed
8/22/2011	11:36:35 PM	BCl3 valve closed
8/22/2011	11:36:35 PM	PH3 valve closed
8/22/2011	11:36:35 PM	SiCl4 pre valve closed
8/22/2011	11:36:35 PM	SiCl4 post valve closed
8/22/2011	11:36:35 PM	Bypass valve closed
8/22/2011	11:36:35 PM	Bubbler valve closed
8/22/2011	11:36:35 PM	Helium valve opened
8/22/2011	11:36:35 PM	Main Vac valve opened
8/22/2011	11:36:35 PM	Helium MFC set to  20.000000
8/22/2011	11:36:35 PM	H2 MFC set to  0.000000
8/22/2011	11:36:35 PM	BCl3 MFC set to  0.000000
8/22/2011	11:36:35 PM	PHl3 MFC set to  0.000000
8/22/2011	11:36:35 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:36:35 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:36:35 PM	Tube furnace set to 0
8/22/2011	11:37:05 PM	Helium valve closed
8/22/2011	11:37:05 PM	H2 valve closed
8/22/2011	11:37:05 PM	BCl3 valve closed
8/22/2011	11:37:05 PM	PH3 valve closed
8/22/2011	11:37:05 PM	SiCl4 pre valve closed
8/22/2011	11:37:05 PM	SiCl4 post valve closed
8/22/2011	11:37:05 PM	Bypass valve closed
8/22/2011	11:37:05 PM	Bubbler valve closed
8/22/2011	11:37:05 PM	Main Vac valve opened
8/22/2011	11:37:05 PM	Helium MFC set to  0.000000
8/22/2011	11:37:05 PM	H2 MFC set to  0.000000
8/22/2011	11:37:05 PM	BCl3 MFC set to  0.000000
8/22/2011	11:37:05 PM	PHl3 MFC set to  0.000000
8/22/2011	11:37:05 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:37:05 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:37:05 PM	Tube furnace set to 0
8/22/2011	11:37:35 PM	H2 valve closed
8/22/2011	11:37:35 PM	BCl3 valve closed
8/22/2011	11:37:35 PM	PH3 valve closed
8/22/2011	11:37:35 PM	SiCl4 pre valve closed
8/22/2011	11:37:35 PM	SiCl4 post valve closed
8/22/2011	11:37:35 PM	Bypass valve closed
8/22/2011	11:37:35 PM	Bubbler valve closed
8/22/2011	11:37:35 PM	Helium valve opened
8/22/2011	11:37:35 PM	Main Vac valve opened
8/22/2011	11:37:35 PM	Helium MFC set to  20.000000
8/22/2011	11:37:35 PM	H2 MFC set to  0.000000
8/22/2011	11:37:35 PM	BCl3 MFC set to  0.000000
8/22/2011	11:37:35 PM	PHl3 MFC set to  0.000000
8/22/2011	11:37:35 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:37:35 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:37:35 PM	Tube furnace set to 0
8/22/2011	11:38:05 PM	Helium valve closed
8/22/2011	11:38:05 PM	H2 valve closed
8/22/2011	11:38:05 PM	BCl3 valve closed
8/22/2011	11:38:05 PM	PH3 valve closed
8/22/2011	11:38:05 PM	SiCl4 pre valve closed
8/22/2011	11:38:05 PM	SiCl4 post valve closed
8/22/2011	11:38:05 PM	Bypass valve closed
8/22/2011	11:38:05 PM	Bubbler valve closed
8/22/2011	11:38:05 PM	Main Vac valve opened
8/22/2011	11:38:05 PM	Helium MFC set to  0.000000
8/22/2011	11:38:05 PM	H2 MFC set to  0.000000
8/22/2011	11:38:05 PM	BCl3 MFC set to  0.000000
8/22/2011	11:38:05 PM	PHl3 MFC set to  0.000000
8/22/2011	11:38:05 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:38:05 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:38:06 PM	Tube furnace set to 0
8/22/2011	11:38:36 PM	H2 valve closed
8/22/2011	11:38:36 PM	BCl3 valve closed
8/22/2011	11:38:36 PM	PH3 valve closed
8/22/2011	11:38:36 PM	SiCl4 pre valve closed
8/22/2011	11:38:36 PM	SiCl4 post valve closed
8/22/2011	11:38:36 PM	Bypass valve closed
8/22/2011	11:38:36 PM	Bubbler valve closed
8/22/2011	11:38:36 PM	Helium valve opened
8/22/2011	11:38:36 PM	Main Vac valve opened
8/22/2011	11:38:36 PM	Helium MFC set to  20.000000
8/22/2011	11:38:36 PM	H2 MFC set to  0.000000
8/22/2011	11:38:36 PM	BCl3 MFC set to  0.000000
8/22/2011	11:38:36 PM	PHl3 MFC set to  0.000000
8/22/2011	11:38:36 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:38:36 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:38:36 PM	Tube furnace set to 0
8/22/2011	11:39:06 PM	Helium valve closed
8/22/2011	11:39:06 PM	H2 valve closed
8/22/2011	11:39:06 PM	BCl3 valve closed
8/22/2011	11:39:06 PM	PH3 valve closed
8/22/2011	11:39:06 PM	SiCl4 pre valve closed
8/22/2011	11:39:06 PM	SiCl4 post valve closed
8/22/2011	11:39:06 PM	Bypass valve closed
8/22/2011	11:39:06 PM	Bubbler valve closed
8/22/2011	11:39:06 PM	Main Vac valve opened
8/22/2011	11:39:06 PM	Helium MFC set to  0.000000
8/22/2011	11:39:06 PM	H2 MFC set to  0.000000
8/22/2011	11:39:06 PM	BCl3 MFC set to  0.000000
8/22/2011	11:39:06 PM	PHl3 MFC set to  0.000000
8/22/2011	11:39:06 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:39:06 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:39:06 PM	Tube furnace set to 0
8/22/2011	11:39:36 PM	H2 valve closed
8/22/2011	11:39:36 PM	BCl3 valve closed
8/22/2011	11:39:36 PM	PH3 valve closed
8/22/2011	11:39:36 PM	SiCl4 pre valve closed
8/22/2011	11:39:36 PM	SiCl4 post valve closed
8/22/2011	11:39:36 PM	Bypass valve closed
8/22/2011	11:39:36 PM	Bubbler valve closed
8/22/2011	11:39:36 PM	Helium valve opened
8/22/2011	11:39:36 PM	Main Vac valve opened
8/22/2011	11:39:36 PM	Helium MFC set to  20.000000
8/22/2011	11:39:36 PM	H2 MFC set to  0.000000
8/22/2011	11:39:36 PM	BCl3 MFC set to  0.000000
8/22/2011	11:39:36 PM	PHl3 MFC set to  0.000000
8/22/2011	11:39:36 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:39:36 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:39:36 PM	Tube furnace set to 0
8/22/2011	11:40:06 PM	Helium valve closed
8/22/2011	11:40:06 PM	H2 valve closed
8/22/2011	11:40:06 PM	BCl3 valve closed
8/22/2011	11:40:06 PM	PH3 valve closed
8/22/2011	11:40:06 PM	SiCl4 pre valve closed
8/22/2011	11:40:06 PM	SiCl4 post valve closed
8/22/2011	11:40:06 PM	Bypass valve closed
8/22/2011	11:40:06 PM	Bubbler valve closed
8/22/2011	11:40:06 PM	Main Vac valve opened
8/22/2011	11:40:06 PM	Helium MFC set to  0.000000
8/22/2011	11:40:06 PM	H2 MFC set to  0.000000
8/22/2011	11:40:06 PM	BCl3 MFC set to  0.000000
8/22/2011	11:40:06 PM	PHl3 MFC set to  0.000000
8/22/2011	11:40:06 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:40:06 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:40:06 PM	Tube furnace set to 0
8/22/2011	11:40:36 PM	H2 valve closed
8/22/2011	11:40:36 PM	BCl3 valve closed
8/22/2011	11:40:36 PM	PH3 valve closed
8/22/2011	11:40:36 PM	SiCl4 pre valve closed
8/22/2011	11:40:36 PM	SiCl4 post valve closed
8/22/2011	11:40:36 PM	Bypass valve closed
8/22/2011	11:40:36 PM	Bubbler valve closed
8/22/2011	11:40:36 PM	Helium valve opened
8/22/2011	11:40:36 PM	Main Vac valve opened
8/22/2011	11:40:36 PM	Helium MFC set to  20.000000
8/22/2011	11:40:36 PM	H2 MFC set to  0.000000
8/22/2011	11:40:36 PM	BCl3 MFC set to  0.000000
8/22/2011	11:40:36 PM	PHl3 MFC set to  0.000000
8/22/2011	11:40:36 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:40:36 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:40:37 PM	Tube furnace set to 0
8/22/2011	11:41:07 PM	Helium valve closed
8/22/2011	11:41:07 PM	H2 valve closed
8/22/2011	11:41:07 PM	BCl3 valve closed
8/22/2011	11:41:07 PM	PH3 valve closed
8/22/2011	11:41:07 PM	SiCl4 pre valve closed
8/22/2011	11:41:07 PM	SiCl4 post valve closed
8/22/2011	11:41:07 PM	Bypass valve closed
8/22/2011	11:41:07 PM	Bubbler valve closed
8/22/2011	11:41:07 PM	Main Vac valve opened
8/22/2011	11:41:07 PM	Helium MFC set to  0.000000
8/22/2011	11:41:07 PM	H2 MFC set to  0.000000
8/22/2011	11:41:07 PM	BCl3 MFC set to  0.000000
8/22/2011	11:41:07 PM	PHl3 MFC set to  0.000000
8/22/2011	11:41:07 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:41:07 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:41:07 PM	Tube furnace set to 0
8/22/2011	11:41:37 PM	H2 valve closed
8/22/2011	11:41:37 PM	BCl3 valve closed
8/22/2011	11:41:37 PM	PH3 valve closed
8/22/2011	11:41:37 PM	SiCl4 pre valve closed
8/22/2011	11:41:37 PM	SiCl4 post valve closed
8/22/2011	11:41:37 PM	Bypass valve closed
8/22/2011	11:41:37 PM	Bubbler valve closed
8/22/2011	11:41:37 PM	Helium valve opened
8/22/2011	11:41:37 PM	Main Vac valve opened
8/22/2011	11:41:37 PM	Helium MFC set to  20.000000
8/22/2011	11:41:37 PM	H2 MFC set to  0.000000
8/22/2011	11:41:37 PM	BCl3 MFC set to  0.000000
8/22/2011	11:41:37 PM	PHl3 MFC set to  0.000000
8/22/2011	11:41:37 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:41:37 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:41:37 PM	Tube furnace set to 0
8/22/2011	11:42:07 PM	Helium valve closed
8/22/2011	11:42:07 PM	H2 valve closed
8/22/2011	11:42:07 PM	BCl3 valve closed
8/22/2011	11:42:07 PM	PH3 valve closed
8/22/2011	11:42:07 PM	SiCl4 pre valve closed
8/22/2011	11:42:07 PM	SiCl4 post valve closed
8/22/2011	11:42:07 PM	Bypass valve closed
8/22/2011	11:42:07 PM	Bubbler valve closed
8/22/2011	11:42:07 PM	Main Vac valve opened
8/22/2011	11:42:07 PM	Helium MFC set to  0.000000
8/22/2011	11:42:07 PM	H2 MFC set to  0.000000
8/22/2011	11:42:07 PM	BCl3 MFC set to  0.000000
8/22/2011	11:42:07 PM	PHl3 MFC set to  0.000000
8/22/2011	11:42:07 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:42:07 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:42:07 PM	Tube furnace set to 0
8/22/2011	11:42:37 PM	H2 valve closed
8/22/2011	11:42:37 PM	BCl3 valve closed
8/22/2011	11:42:37 PM	PH3 valve closed
8/22/2011	11:42:37 PM	SiCl4 pre valve closed
8/22/2011	11:42:37 PM	SiCl4 post valve closed
8/22/2011	11:42:37 PM	Bypass valve closed
8/22/2011	11:42:37 PM	Bubbler valve closed
8/22/2011	11:42:37 PM	Helium valve opened
8/22/2011	11:42:37 PM	Main Vac valve opened
8/22/2011	11:42:37 PM	Helium MFC set to  20.000000
8/22/2011	11:42:37 PM	H2 MFC set to  0.000000
8/22/2011	11:42:37 PM	BCl3 MFC set to  0.000000
8/22/2011	11:42:37 PM	PHl3 MFC set to  0.000000
8/22/2011	11:42:37 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:42:37 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:42:37 PM	Tube furnace set to 0
8/22/2011	11:43:07 PM	Helium valve closed
8/22/2011	11:43:07 PM	H2 valve closed
8/22/2011	11:43:07 PM	BCl3 valve closed
8/22/2011	11:43:07 PM	PH3 valve closed
8/22/2011	11:43:07 PM	SiCl4 pre valve closed
8/22/2011	11:43:07 PM	SiCl4 post valve closed
8/22/2011	11:43:08 PM	Bypass valve closed
8/22/2011	11:43:08 PM	Bubbler valve closed
8/22/2011	11:43:08 PM	Main Vac valve opened
8/22/2011	11:43:08 PM	Helium MFC set to  0.000000
8/22/2011	11:43:08 PM	H2 MFC set to  0.000000
8/22/2011	11:43:08 PM	BCl3 MFC set to  0.000000
8/22/2011	11:43:08 PM	PHl3 MFC set to  0.000000
8/22/2011	11:43:08 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:43:08 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:43:08 PM	Tube furnace set to 0
8/22/2011	11:43:38 PM	H2 valve closed
8/22/2011	11:43:38 PM	BCl3 valve closed
8/22/2011	11:43:38 PM	PH3 valve closed
8/22/2011	11:43:38 PM	SiCl4 pre valve closed
8/22/2011	11:43:38 PM	SiCl4 post valve closed
8/22/2011	11:43:38 PM	Bypass valve closed
8/22/2011	11:43:38 PM	Bubbler valve closed
8/22/2011	11:43:38 PM	Helium valve opened
8/22/2011	11:43:38 PM	Main Vac valve opened
8/22/2011	11:43:38 PM	Helium MFC set to  20.000000
8/22/2011	11:43:38 PM	H2 MFC set to  0.000000
8/22/2011	11:43:38 PM	BCl3 MFC set to  0.000000
8/22/2011	11:43:38 PM	PHl3 MFC set to  0.000000
8/22/2011	11:43:38 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:43:38 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:43:38 PM	Tube furnace set to 0
8/22/2011	11:44:08 PM	Helium valve closed
8/22/2011	11:44:08 PM	H2 valve closed
8/22/2011	11:44:08 PM	BCl3 valve closed
8/22/2011	11:44:08 PM	PH3 valve closed
8/22/2011	11:44:08 PM	SiCl4 pre valve closed
8/22/2011	11:44:08 PM	SiCl4 post valve closed
8/22/2011	11:44:08 PM	Bypass valve closed
8/22/2011	11:44:08 PM	Bubbler valve closed
8/22/2011	11:44:08 PM	Main Vac valve opened
8/22/2011	11:44:08 PM	Helium MFC set to  0.000000
8/22/2011	11:44:08 PM	H2 MFC set to  0.000000
8/22/2011	11:44:08 PM	BCl3 MFC set to  0.000000
8/22/2011	11:44:08 PM	PHl3 MFC set to  0.000000
8/22/2011	11:44:08 PM	SiCl4 MFC set to  0.000000
8/22/2011	11:44:08 PM	Bypass solenoid MFC set to  0.000000
8/22/2011	11:44:08 PM	Tube furnace set to 0
8/22/2011	11:44:09 PM	Run finished at 11:44 PM
8/22/2011	11:44:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
